III-nitride semiconductor light emitting device having amber-to-red light emission (>600 nm) and a method for making same

• US 10,396,240 B2
• Filed: 10/06/2016
• Issued: 08/27/2019
• Est. Priority Date: 10/08/2015
• Status: Active Grant

• Current Assignee: Ostendo Technologies Inc.
• Original Assignee: Ostendo Technologies Inc.
• Inventors: Yeh, Yea-Chuan Milton, El-Ghoroury, Hussein S., Li, Xing, Chen, Jyh-Chia, Chuang, Chih-Li
• Primary Examiner(s): Choi, Calvin Y
• Application Number:
  US15/287,384
• Publication Number:
  US 20170104128A1
• Time in Patent Office: 1,055 Days
• Field of Search: None
• CPC Class Codes: H01L 33/0075 comprising nitride compounds
• CPC Class Codes: H01L 33/02 characterised by the semiconductor bodies
• CPC Class Codes: H01L 33/06 within the light emitting region, e.g. quantum confinement structure or tunnel barrier
• CPC Class Codes: H01L 33/12 with a stress relaxation structure, e.g. buffer layer
• CPC Class Codes: H01L 33/30 containing only elements of Group III and Group V of the Periodic Table
• CPC Class Codes: H01L 33/32 containing nitrogen

Abstract

A III-nitride semiconductor light emitting device incorporating n-type III-nitride cladding layers, indium containing III-nitride light emitting region, and p-type III-nitride cladding layers. The light emitting region is sandwiched between n- and p-type III-nitride cladding layers and includes multiple sets of multi-quantum-wells (MQWs). The first MQW set formed on the n-type cladding layer comprises relatively lower indium concentration. The second MQW set comprising relatively moderate indium concentration. The third MQW set adjacent to the p-type cladding layer incorporating relatively highest indium concentration of the three MQW sets and is capable of emitting amber-to-red light. The first two MQW sets are utilized as pre-strain layers. Between the MQW sets, intermediate strain compensation layers (ISCLs) are added. The combination of the first two MQW sets and ISCLs prevent phase separation and enhance indium uptake in the third MQW set. The third MQW set, as a result, retains sufficiently high indium concentration to emit amber-to-red light of high output power without any phase separation associated problems.

Claims

1. A III-nitride semiconductor LED comprising:

a plurality of multiple quantum well sets stacked on a substrate, the plurality of multiple quantum well sets including a first, a second, and a top multiple quantum well set;

the first multiple quantum well set being adjacent the substrate and having a low indium concentration;

each multiple quantum well set above the first multiple quantum well set having a progressively increased indium concentration;

the top multiple quantum well set having a highest indium concentration selected to emit light in the amber-to-red visible spectra region; and

adjacent multiple quantum well sets being separated by an Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layer, each Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layer having a barrier layer above and below the respective Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layer to reduce total strain in the top multiple quantum well set,

wherein an Al concentration in the Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layers is varied with the Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layer closest to the substrate having higher Al concentration than the other Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layers.

2. The III-nitride semiconductor LED according to claim 1, further comprising:

a barrier layer below the first multiple quantum well set;

an electron blocking layer above the top multiple quantum well set;

a cladding layer above the electron blocking layer; and

a contact layer above the cladding layer.

3. The III-nitride semiconductor LED according to claim 1, wherein the first and second multiple quantum well sets generate a pre-strain effect.

4. The III-nitride semiconductor LED of claim 1 wherein the plurality of multiple quantum well sets stacked on the substrate comprise three or more multiple quantum well sets stacked on the substrate.

5. The III-nitride semiconductor LED according to claim 4, wherein the first multiple quantum well set with the low indium concentration has an indium concentration of not more than 17%.

6. The III-nitride semiconductor LED according to claim 4, wherein the multiple quantum well sets between the first multiple quantum well set and the top multiple quantum well set have indium concentrations greater than 20%.

7. The III-nitride semiconductor LED according to claim 4, wherein the top multiple quantum well set has an indium concentration of greater than 30%.

8. The III-nitride semiconductor LED according to claim 4 wherein the Al concentration in at least one of the Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layers is varied within that layer in discrete steps or in a continuous variation.

9. The III-nitride semiconductor LED according to claim 4, wherein each of the barrier layers above and below the respective Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layer is comprised of GaN and each of the multiple quantum well sets is comprised of InGaN.

10. A method of forming a III-nitride semiconductor LED comprising:

forming over a substrate an active region having a plurality of sets of multiple quantum wells by;

forming over the substrate, the first set of multiple quantum wells having an indium concentration;

forming at least two additional sets of multiple quantum wells over the first set of multiple quantum wells, the formation of each additional set of multiple quantum wells being preceded by the formation of an Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layer over the preceding set of multiple quantum wells such that a first Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layer and a second Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layer are formed;

the at least two additional set of multiple quantum wells having a higher indium concentration than the first set of multiple quantum wells; and

the first Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layer closest to the substrate containing a higher Al concentration than the second Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layer.

11. The method of claim 10 wherein the indium concentration for the at least one additional set of multiple quantum wells is selected for emitting amber-to-red light.

12. The method of claim 10 wherein the at least one additional set of multiple quantum wells is at least 2 including a second set of multiple quantum wells formed over the first set of multiple quantum wells and a third set of multiple quantum wells formed over the second set of multiple quantum wells, wherein the third set of multiple quantum wells has a higher indium concentration than the second set of multiple quantum wells.

13. The method of claim 12 further comprising:

forming barrier layers above and below each Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layer, and wherein each of the barrier layers is comprised of GaN and each of the multiple quantum well sets is comprised of InGaN;

the first set of multiple quantum wells having an indium concentration not greater than 17%, the second set of multiple quantum wells having an indium concentration greater than 20% and the third set of multiple quantum wells having an indium concentration larger than 30%.

14. A multilayer III-nitride semiconductor LED comprising:

first, second and third layered multiple quantum well sets stacked on a substrate in ascending order with the first layered multiple quantum well set closest to the substrate;

the first layered multiple quantum well set having a first indium concentration;

the second layered multiple quantum well set having a second indium concentration that is greater than the first indium concentration;

the third layered multiple quantum well set having a third indium concentration that is greater than the second indium concentration;

a first intermediate strain compensation layer comprised of Al_xGa_1-xN (0<

x≤

1) disposed between the first and second layered multiple quantum well sets;

a second intermediate strain compensation layer comprised of Al_xGa_1-xN (0<

x≤

1) disposed between the second and third layered multiple quantum well sets;

the first and second intermediate strain compensation layers each being disposed between two barrier layers; and

the third layered multiple quantum well set being configured to emit light having a peak emission at a wavelength ranging from approximately 600 nm to approximately 660 nm,

wherein the first intermediate strain compensation layer comprises a higher Al concentration than the second intermediate strain compensation layer.

15. The multilayer III-nitride semiconductor LED according to claim 14, wherein the first indium concentration is less than approximately 17%.

16. The multilayer III-nitride semiconductor LED according to claim 14, wherein the second indium concentration is greater than approximately 20%.

17. The multilayer III-nitride semiconductor LED according to claim 14, wherein the third indium concentration is greater than approximately 30% and is selected to cause the third layered multiple quantum well set to emit the amber-to-red light.

18. The multilayer III-nitride semiconductor LED according to claim 14, wherein the Al_xGa_1-xN (0<

x≤

1) composition in at least one of the intermediate strain compensation layers is varied.

19. The multilayer III-nitride semiconductor LED according to claim 14 wherein the Al concentration in at least one of the Al_xGa_1-xN (0<

x≤

1) intermediate strain compensation layers is varied within that layer in discrete steps or in a continuous variation.

20. The multilayer III-nitride semiconductor LED according to claim 14, wherein at least one of the barrier layers is comprised of GaN, and wherein at least one of the layered multiple quantum well sets is comprised of InGaN.

21. A method of manufacturing a III-nitride semiconductor LED which emits amber-to-red light, comprising:

defining a first barrier layer;

defining a first layered multiple quantum well set comprising a first indium concentration on the first barrier layer;

defining a second barrier layer on the first layered multiple quantum well set;

defining a first intermediate strain compensation layer comprised of Al_xGa_1-xN (0<

x≤

1) on the second barrier layer;

defining a third barrier layer on the first intermediate-strain compensation layer;

defining on the third barrier layer, a second layered multiple quantum well set comprising a second indium concentration that is greater than the first indium concentration;

defining a fourth barrier layer on the second layered multiple quantum well set;

defining a second intermediate strain compensation layer comprised of Al_xGa_1-xN (0<

x≤

1) on the fourth barrier layer;

defining a fifth barrier layer on the second intermediate strain compensation layer; and

defining a third layered multiple quantum well set comprising a third indium concentration that is greater than the second indium concentration configured to emit light having a peak emission at a wavelength ranging from approximately 600 nm to approximately 660 nm,

wherein the first intermediate strain compensation layer comprises a higher Al concentration than the second intermediate strain compensation layer.

22. The method of claim 21, wherein at least one of the barrier layers is comprised of GaN and wherein at least one of the layered multiple quantum well sets is comprised of InGaN and wherein the first layered multiple quantum well set comprises an indium concentration not greater than approximately 17% and wherein the second layered multiple quantum well set comprises an indium concentration greater than approximately 20% and wherein the third layered multiple quantum well set comprises an indium concentration greater than approximately 30%.