Advanced polishing pads having compositional gradients by use of an additive manufacturing process

• US 10,399,201 B2
• Filed: 10/17/2016
• Issued: 09/03/2019
• Est. Priority Date: 10/17/2014
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Ganapathiappan, Sivapackia, Fu, Boyi, Chockalingam, Ashwin, Redfield, Daniel, Bajaj, Rajeev, Orilall, Mahendra C., Ng, Hou T., Fung, Jason G., Yamamura, Mayu
• Primary Examiner(s): Dunn, Colleen P
• Assistant Examiner(s): Christie, Ross J
• Application Number:
  US15/296,015
• Publication Number:
  US 20170100817A1
• Time in Patent Office: 1,051 Days
• Field of Search: None
• CPC Class Codes: B24B 37/22 characterised by a multi-layered structure
• CPC Class Codes: B24B 37/24 characterised by the composition or properties of the pad materials
• CPC Class Codes: B24B 37/26 characterised by the shape of the lapping pad surface, e.g. grooved
• CPC Class Codes: B24D 11/001 Manufacture of flexible abrasive materials
• CPC Class Codes: B24D 11/04 Zonally-graded surfaces
• CPC Class Codes: B24D 2203/00 Tool surfaces formed with a pattern
• CPC Class Codes: B24D 3/28 Resins or natural or synthetic macromolecular compounds B24D3/22 takes precedence
• CPC Class Codes: B29C 2035/0827 using UV radiation
• CPC Class Codes: B29C 35/0805 using electromagnetic radiation
• CPC Class Codes: B29C 64/112 using individual droplets, e.g. from jetting heads
• CPC Class Codes: B29K 2033/04 Polymers of esters
• CPC Class Codes: B29K 2995/0077 Yield strength; Tensile strength
• CPC Class Codes: B29K 2995/0092 hydrophilic
• CPC Class Codes: B33Y 10/00 Processes of additive manufacturing
• CPC Class Codes: B33Y 70/00 Materials specially adapted for additive manufacturing
• CPC Class Codes: B33Y 70/10 Composites of different types of material, e.g. mixtures of ceramics and polymers or mixtures of metals and biomaterials
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing
• CPC Class Codes: C09D 4/00 Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16
• CPC Class Codes: C09G 1/16 on natural or synthetic resins

Abstract

Embodiments herein relate to advanced polishing pads with tunable chemical, material and structural properties, and manufacturing methods related thereto. According to one or more embodiments herein, a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments herein thus may provide an advanced polishing pad having discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, addition polymer precursor compounds, catalysts, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one polymer precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions. Embodiments herein further provide a polishing pad with polymeric layers that may be interpenetrating polymer networks.

Claims

1. A polishing article having a polishing surface that is configured to polish a surface of a substrate during a polishing process, comprising:

an array of first polishing elements that are distributed in a first pattern, wherein

each of the first polishing elements is formed of a stacked plurality of first polymer layers,

a surface of at least one of the plurality of first polymer layers forms the polishing surface,

each of the first polymer layers comprises a plurality of first material containing regions and a plurality of second material containing regions,

the second material containing regions are formed from a resin precursor component comprising an aliphatic multifunctional urethane acrylate having a functionality that is greater than or equal to 2, and

a ratio of the first material containing regions to the second material containing regions within at least a portion of each of the first polishing elements varies across a first plane that is parallel to the polishing surface; and

one or more second polishing elements formed of a stacked plurality of second polymer layers, wherein each of the second polymer layers comprises a plurality of the first material containing regions.

2. The polishing article of claim 1, wherein the plurality of second polymer layers further comprise a plurality of the second material containing regions.

3. The polishing article of claim 2, wherein a ratio of the first material containing regions to the second material containing regions within each of the second polymer layers of each of the second polishing elements is different from the ratio of the first material containing regions to the second material containing regions within the at least the portion of each of the first polishing elements.

4. The polishing article of claim 2, wherein a ratio of the first material containing regions to the second material containing regions within one or more of the second polymer layers of each of the second polishing elements varies across a second plane that is parallel to the first plane.

5. The polishing article of claim 1, wherein at least a region of each of the one or more second polishing elements is disposed between at least one of the array of first polishing elements and a supporting surface of the polishing article.

6. The polishing article of claim 1, wherein the first polymer layers further comprise a second pattern of porosity-forming agent containing regions, wherein the second pattern is aligned in at least one direction parallel to the first plane.

7. The polishing article of claim 6, wherein the second pattern of porosity-forming agent containing regions comprise a porosity-forming agent material that degrades when exposed to an aqueous solution.

8. The polishing article of claim 7, wherein the porosity-forming agent material further comprises an acrylate.

9. The polishing article of claim 1, wherein the first and the second material containing regions each comprise a material that comprises an acrylate.

10. The polishing article of claim 1, wherein the first and the second material containing regions each comprise a material that is formed from a first amount of an first resin precursor component, a second amount of a second resin precursor component, and a first amount of a first curing agent.

12. The polishing article of claim 1, wherein the first and the second material containing regions each comprise a material formed by partially curing an amount of a first precursor formulation that comprises a multifunctional urethane oligomer, a polyester acrylate oligomer, a polyether acrylate oligomer, an epoxy acrylate oligomer, a monofunctional acrylate monomer or a multifunctional acrylate monomer.

13. The polishing article of claim 1, wherein one or both of the first and the second material containing regions comprise an interpenetrating polymer network, wherein polymer chains of the second polymer are entangled with and/or penetrate a network of polymer chains of a second polymer.

14. The polishing article of claim 1, wherein

the first material containing regions are formed by dispensing and curing one or more droplets, wherein the cured droplets have a contact angle relative to a surface of a previously formed first polymer layer that is greater than or equal to 50 degrees,

the second material containing regions are formed by dispensing and curing one or more droplets, wherein the cured droplets have a contact angle relative to the surface of the previously formed first polymer layer that is greater than or equal to 50 degrees.

11. A polishing article having a polishing surface that is configured to polish a surface of a substrate during a polishing process, comprising

an array of first polishing elements that are distributed in a first pattern, wherein

each of the first polishing elements is formed of a stacked plurality of first polymer layers,

a surface of at least one of the plurality of first polymer layers forms the polishing surface,

each of the first polymer layers comprises a plurality of first material containing regions and a plurality of second material containing regions,

the first and the second material containing regions each comprise a material that is formed from a first amount of an oligomer and a second amount of a monomer, and a ratio of the first amount to the second amount by weight is from about 3:

1 to about 1;

3, and

a ratio of the first material containing regions to the second material containing regions within at least a portion of each of the first polishing elements varies across a first plane that is parallel to the polishing surface; and

one or more second polishing elements formed of a stacked plurality of second polymer layers, wherein each of the second polymer layers comprise a plurality of the first material containing regions.

15. A method of forming a polishing article, comprising sequentially forming a plurality of polymer layers, wherein forming the plurality of polymer layers comprises:

forming a first layer of a plurality of first polishing elements of the polishing article, wherein forming the first layer comprises;

forming a first pattern of first material containing regions on a surface on which the first layer is formed; and

forming a second pattern of second material containing regions on the surface on which the first layer is formed, wherein

the first layer comprises a first ratio of the first material containing regions to the second material containing regions, and

the first and the second material containing regions each comprises a material that is formed from a first resin precursor component that comprises an aliphatic multifunctional urethane acrylate that has a functionality that is greater than or equal to 2; and

forming a second layer of the plurality of first polishing elements, wherein the formed second layer is disposed on a surface of the first layer and comprises;

forming a third pattern of first material containing regions on the surface of the first layer; and

forming a fourth pattern of second material containing regions on the surface of the first layer, wherein second layer comprises a second ratio of the first material containing regions to the second material containing regions, and the first ratio is different from the second ratio.

16. The method of claim 15, wherein the first ratio also varies in a first direction that is parallel to the surface on which the first layer is disposed, and the second ratio also varies in the first direction that is parallel to the surface on which the first layer is disposed.

17. The method of claim 15, wherein the forming the first material containing regions comprise:

(a) dispensing a first amount of a first precursor formulation on the surface on which the first layer is formed by use of an additive manufacturing process;

(b) exposing the dispensed first amount of the first precursor formulation to electromagnetic radiation for a first period of time to only partially cure the first amount of the first precursor formulation; and

(c) repeating (a) and (b).

18. The method of claim 15, wherein the forming the first material containing regions further comprises:

mixing a first amount of a first resin precursor component, a second amount of a second resin precursor component, and a first amount of a first curing agent to form a first precursor formulation that has a first viscosity that enables the first precursor formulation to be dispensed using an additive manufacturing process.

19. The method of claim 15, wherein the first material containing regions or the second material containing regions have a gradient in material composition in at least one direction parallel to the surface of the first layer.

20. The method of claim 15, wherein

forming the first material containing regions comprise dispensing and curing one or more droplets, wherein the cured droplets each have a contact angle relative to the surface on which the first layer is formed that is greater than or equal to 50 degrees,

forming the second material containing regions comprise dispensing and curing one or more droplets, wherein the cured droplets each have a contact angle relative to the surface of the first layer that is greater than or equal to 50 degrees.

21. The method of claim 15, wherein

the first material containing regions are formed from a first droplet composition and the second material containing regions are formed from a second droplet composition, and wherein

the first droplet composition comprises a resin precursor composition that has a glass transition temperature of less than or equal to about 40°

C., and

the second droplet composition comprises a resin precursor composition that has a glass transition temperature of greater than about 40°

C.