System comprising a mechanical resonator and method therefor

• US 10,401,171 B2
• Filed: 07/28/2017
• Issued: 09/03/2019
• Est. Priority Date: 02/09/2015
• Status: Active Grant

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Inventors: Beaulaton, Hugues, Calmettes, Philippe Patrick, Cassagnes, Thierry Dominique Yves
• Primary Examiner(s): Chapman, Jr., John E
• Application Number:
  US15/662,771
• Publication Number:
  US 20170328713A1
• Time in Patent Office: 767 Days
• CPC Class Codes: G01C 19/5726 Signal processing
• CPC Class Codes: G01C 19/5762 the sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01C 19/5776 Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

Abstract

A system is provided that includes a mechanical resonator, and an analog circuit coupled to the mechanical resonator. The analog circuit is arranged to receive a mechanical resonator measurement signal having a quadrature error from the mechanical resonator, and to extract a quadrature error signal from the mechanical resonator measurement signal using a quadrature clock. A digital quadrature controller is coupled to the analog circuit and is arranged to generate a quadrature error compensation signal from the extracted quadrature error signal and apply the quadrature error compensation signal to the mechanical resonator or the mechanical resonator measurement signal to reduce quadrature error in the mechanical resonator measurement signal error.

Claims

1. A system comprising:

a mechanical resonator;

an analog circuit, coupled to the mechanical resonator, and comprising a sense demodulator configured to

receive a mechanical resonator measurement signal having a quadrature error from the mechanical resonator, and

extract the quadrature error signal from the mechanical resonator measurement signal using a quadrature clock; and

a threshold comparator, coupled to an output of the sense demodulator, and configured to output a sign that is representative of the quadrature error signal;

a digital quadrature controller, coupled to the threshold comparator, and configured to

generate a quadrature error compensation signal from the extracted quadrature error signal, and

apply the quadrature error compensation signal to the mechanical resonator or the mechanical resonator measurement signal to reduce quadrature error in the mechanical resonator measurement signal.

2. The system of claim 1, wherein the digital quadrature controller is configured to generate a quadrature error compensation signal to reduce quadrature error when the system is not measuring a Coriolis force.

3. The system of claim 1, wherein the digital quadrature controller is configured to generate a quadrature error compensation signal to reduce any quadrature error at system boot.

4. The system of claim 3, wherein the digital quadrature controller is configured to generate a quadrature error compensation signal to reduce any quadrature error at each system boot.

5. The system of claim 1, wherein the digital quadrature controller is configured to employ a binary search algorithm to generate a quadrature error compensation signal to reduce a quadrature error of the mechanical resonator measurement signal.

6. The system of claim 1, wherein the digital quadrature controller is coupled to the mechanical resonator via a feedback loop.

7. The system of claim 6, wherein the feedback loop comprises a cancellation digital-to-analog converter (CDAC) configured to

receive a digital word from the digital quadrature controller, and

convert the digital word to the quadrature error compensation signal to be applied to the mechanical resonator or the mechanical resonator measurement signal to reduce quadrature error in the mechanical resonator measurement signal.

8. The system of claim 6, wherein the mechanical resonator comprises one or more plates or electrodes and wherein the digital quadrature controller applies the quadrature error compensation signal to the mechanical resonator via the feedback loop through a mechanical adjustment induced by the one or more plates or electrodes.

9. The system of claim 6, wherein the mechanical resonator measurement signal is a capacitive signal and the analog circuit comprises a sense capacitance to voltage converter configured to receive the capacitive signal, wherein the digital quadrature controller applies the quadrature error compensation signal to adjust a capacitance associated with the mechanical resonator measurement signal input to the sense capacitance to voltage converter by an amount that is inversely proportional to the quadrature error.

10. The system of claim 6, wherein the mechanical resonator measurement signal is a capacitive signal and the analog circuit comprises a sense capacitance to voltage converter configured to receive the capacitive signal, wherein the digital quadrature controller is configured to apply an electrical quadrature error compensation signal that cancels the quadrature error at an output of the sense capacitance to voltage converter.

11. The system of claim 1, wherein the digital quadrature controller is configured to generate a quadrature error compensation signal to reduce a quadrature error due to at least one of the following:

a non-orthogonal movement of the mechanical resonator within a micro-electro-mechanical system, and

mechanical post-board-mounting stress having affected a movement of the mechanical resonator.

12. The system of claim 11 wherein the system is a vibrating micro-electro-mechanical system gyroscope and the mechanical resonator is a proof-mass.

13. An integrated circuit comprising the digital quadrature controller according to claim 1.

14. A method of generating a quadrature error compensating signal for a mechanical resonator within a micro-electro-mechanical system (MEMS) device, the method comprising:

extracting a quadrature error signal from a mechanical resonator measurement signal using a quadrature clock;

generating a quadrature error compensating signal based on the extracted quadrature error signal, wherein generating the quadrature error compensating signal comprises generating a quadrature error compensation signal through a binary search algorithm that successively reduces a quadrature error of the mechanical resonator measurement signal; and

applying the quadrature error compensating signal to the mechanical resonator or the mechanical resonator measurement signal.

15. The method of claim 14 wherein generating a quadrature error compensating signal based on the extracted quadrature error signal is performed during a system boot operation.

16. The method of claim 14 wherein generating a quadrature error compensating signal comprises:

generating by the binary search algorithm a quadrature error cancellation codeword; and

converting the quadrature error cancellation codeword to the quadrature error compensation signal.

17. The method of claim 14, wherein generating a quadrature error compensation signal comprises iteratively:

determining a sign that is representative of the quadrature error signal;

using the determined sign in the binary search algorithm to reduce a quadrature error of the mechanical resonator measurement signal.