Multifunctional sensor
First Claim
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1. A multifunctional sensor, comprising:
- a substrate;
a first sensing structure, disposed on the substrate;
a dielectric layer, disposed on the first sensing structure; and
a second sensing structure, disposed on the dielectric layer, wherein the second sensing structure comprises;
a second electrode, disposed on the dielectric layer; and
a sensing layer, disposed on the second electrode;
wherein the first sensing structure and the second sensing structure are located on the same side of the substrate.
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Abstract
A multifunctional sensor including a substrate, a first sensing structure, a dielectric layer and a second sensing structure is provided. The first sensing structure is disposed on the substrate. The dielectric layer is disposed on the first sensing structure. The second sensing structure is disposed on the dielectric layer. The first sensing structure and the second sensing structure are located on the same side of the substrate.
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19 Claims
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1. A multifunctional sensor, comprising:
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a substrate; a first sensing structure, disposed on the substrate; a dielectric layer, disposed on the first sensing structure; and a second sensing structure, disposed on the dielectric layer, wherein the second sensing structure comprises; a second electrode, disposed on the dielectric layer; and a sensing layer, disposed on the second electrode; wherein the first sensing structure and the second sensing structure are located on the same side of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification