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Method of manufacturing a wire grid polarizer for a display apparatus

  • US 10,401,676 B2
  • Filed: 10/03/2017
  • Issued: 09/03/2019
  • Est. Priority Date: 10/07/2016
  • Status: Active Grant
First Claim
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1. A method of manufacturing a wire gird polarizer for a display apparatus, the method comprising the steps of:

  • forming a first layer on a base substrate including an active area and a peripheral area surrounding the active area;

    forming a hard mask layer on the first layer;

    coating an imprint resin on the hard mask layer;

    forming an imprint resin pattern by imprinting a stamp on the imprint resin, wherein the stamp is larger than the base substrate;

    forming a hard mask pattern by patterning the hard mask layer using the imprint resin pattern;

    forming a wire grid pattern layer by pattering the first layer using the hard mask pattern, wherein the wire grid pattern layer includes a plurality of protrusions in the active area and in the peripheral area;

    forming a photoresist pattern in the active area on the base substrate, wherein the photoresist pattern does not overlap the hard mask pattern and the wire grid pattern layer in the peripheral area;

    removing the hard mask pattern and the wire grid pattern layer in the peripheral area using the photoresist pattern as an etch barrier; and

    forming a capping layer on the wire grid pattern.

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