Substrate storage and processing

• US 10,403,526 B2
• Filed: 06/28/2017
• Issued: 09/03/2019
• Est. Priority Date: 06/28/2016
• Status: Active Grant

• Current Assignee: Murata Machinery Limited (Muratec)
• Original Assignee: Murata Machinery Limited (Muratec)
• Inventors: Schober, Thomas, Rahrbach, Bernd, Wohanka, Christian, Fenner, Yves, Dovids, Gerhard
• Primary Examiner(s): Joerger, Kaitlin S
• Application Number:
  US15/635,263
• Publication Number:
  US 20170372930A1
• Time in Patent Office: 797 Days
• CPC Class Codes: H01L 21/67346 characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
• CPC Class Codes: H01L 21/67383 characterised by substrate supports
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions
• CPC Class Codes: Y10S 414/135 Associated with semiconductor wafer handling

Abstract

The system, method and apparatus described relates generally to a device related to substrate storage and processing. In one example embodiment to methods, apparatus, and systems of a substrate storage and processing module improving upon existing devices used in one or more instances for substrate transportation, sorting, and cleaning. The single piece design system may contain and support substrates in a method, reducing strain on its contents by utilizing an innovative support system without the use of standard clamping techniques and, in this or other iterations, such stacking methods may minimize chaffing of surfaces. Thus the device is vastly improved in its ability to preserve pristine conditions of contained substrates.

Claims

1. A substrate manufacturing, processing, or transfer system, the system comprising:

a substrate handling system including one or more holders;

wherein

each of the one or more holders;

is stackable;

includes one or more holding arms that extend into a center interior recess of the holder such that the holder holds a substrate via the one or more holding arms;

holds the substrate such that there is a separation between each of a plurality of substrates when a plurality of holders are stacked;

is formed from one piece; and

includes an opening located between the center interior recess and an outer edge of the holder such that, when the plurality of holders are stacked, openings of the plurality of holders collectively define a purge gas distribution channel that extends vertically parallel to the center interior recess.

2. The system according to claim 1, wherein

the substrates held by the holder is not clamped by the holder.

4. The system according to claim 1, wherein

the one or more holding arms have an angled arch with a notch on an inward side of the arch;

and

the notch angles downward in relation to the substrate.

5. The system according to claim 4, wherein the notch allows the substrate to be placed on the one or more holding arms such that the substrate is held by the one or more holding arms and rests on the notch.

6. The system according to claim 4, wherein the one or more holding arms position the contact patch to be on an extreme end of the substrate.

7. The system according to claim 4, wherein the one or more holding arms allow the substrate to self-center on the one or more holding arms.

8. The system according to claim 4, wherein the notch helps to self-center the substrates on the one or more holding arms.

9. The system according to claim 1, wherein

each of the one or more holders includes recesses and extrusions;

the extrusions of one holder key into the recesses of another holder, such that the plurality of holders are aided in stopping from falling or misaligning when stacked.

10. The system according to claim 1, wherein the plurality of holders self-center or self-align when stacked.

11. The system according to claim 1, wherein the plurality of holders when stacked hold the substrates at a high density.

12. The system according to claim 1, wherein the plurality of holders and the plurality of substrates are housed in a container or compartment, isolated from an environment internal to the manufacturing, processing or transfer system or an exterior ambient environment.

13. The system according to claim 1, wherein forced gas is fed through recesses in the plurality of holders and a compartment or container which is able to contact the plurality of substrates in a laminar fashion throughout the plurality of substrates and the plurality of holders when stacked, such that the plurality of substrates are treated, or kept free from contamination or damage.

14. The system according to claim 1, wherein the one piece construction of the one or more holders reduces production steps.

15. The system according to claim 1, wherein the one piece construction of the one or more holders reduces friction and contact patch between the plurality of substrates and the plurality of holders.

16. The system according to claim 1, wherein the plurality of substrates and the one or more holders have sensors and associated data tracking abilities to provide for efficient transfer, tracking and propagation of the plurality of substrates and the one or more holders, as well as exterior systems and devices.

3. A substrate manufacturing, processing, or transfer system, the system comprising:

a substrate handling system including one or more holders;

wherein

each of the one or more holders;

is stackable;

includes one or more holding arms that extend into a center interior recess of the holder such that the holder holds a substrate via the one or more holding arms;

holds the substrate such that there is a separation between each of a plurality of substrates when a plurality of holders are stacked;

is formed from one piece; and

is square-shaped; and

the one or more holding arms include four arms located on respective diagonal sides of the square-shaped holder.

17. A substrate manufacturing, processing, or transfer system, the system comprising:

a substrate handling system including one or more holders, wherein each of the one or more holders;

is stackable such that the system holds a plurality of substrates at a high density;

includes one or more holding arms that extend into a center interior recess of the holder such that the holder holds a substrate via the one or more holding arms; and

is squared-shaped;

the one or more holding arms;

include four arms located on respective diagonal sides of the square-shaped holder; and

have an angled arch with a notch on an inward side of the arch, the notch angles downward in relation to the substrate such that the substrate is held by the one or more holding arms and rests on the notch, making the smallest contact patch and self-centering the substrate;

each of the one or more holders holds the substrate such that there is a separation between each of the plurality of substrates when a plurality of holders are stacked;

each of the one or more holders is formed from one piece; and

each of the one or more holders does not clamp the substrate.

18. The system according to claim 17, wherein each of the one or more holders includes recesses and extrusions, wherein

the extrusions of one holder key into the recesses of another holder, such that the plurality of holders are aided in stopping from falling or misaligning when stacked, and such that the plurality of holders self-center or self-align when stacked.

19. The system according to claim 17, wherein the plurality of holders are able to direct forced gas fed through recesses so as to contact the substrates in a laminar fashion throughout the plurality of holders and the plurality of substrates when stacked, such that the plurality of substrates are treated, or kept free from contamination or damage.