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Substrate storage and processing

  • US 10,403,526 B2
  • Filed: 06/28/2017
  • Issued: 09/03/2019
  • Est. Priority Date: 06/28/2016
  • Status: Active Grant
First Claim
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1. A substrate manufacturing, processing, or transfer system, the system comprising:

  • a substrate handling system including one or more holders;

    whereineach of the one or more holders;

    is stackable;

    includes one or more holding arms that extend into a center interior recess of the holder such that the holder holds a substrate via the one or more holding arms;

    holds the substrate such that there is a separation between each of a plurality of substrates when a plurality of holders are stacked;

    is formed from one piece; and

    includes an opening located between the center interior recess and an outer edge of the holder such that, when the plurality of holders are stacked, openings of the plurality of holders collectively define a purge gas distribution channel that extends vertically parallel to the center interior recess.

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