Angular velocity sensor
First Claim
Patent Images
1. An angular velocity sensor comprising:
- a detecting device which detects angular velocity wherein the detecting device includes;
a first base portion, a second base portion, a third base portion and a fourth base portion;
a first weight portion, a second weight portion, a third weight portion and a fourth weight portion; and
portions to connect the base portions to the weight portions, wherein the portions include;
a first central beam portion extending along a first imaginary line,a second central beam portion extending along a second imaginary line,a first fixing beam portion connected to an end of the second central beam portion, anda second fixing beam portion connected to the other end of the second central beam portion, wherein,a first end of the first fixing beam portion is connected to the first base portion,a second end of the first fixing beam portion is connected to the second base portion,a first end of the second fixing beam portion is connected to the third base portion,a second end of the second fixing beam portion is connected to the fourth base portion, andwherein the first imaginary line and the second imaginary line cross orthogonally at a center of the detecting device.
0 Assignments
0 Petitions
Accused Products
Abstract
An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.
27 Citations
22 Claims
-
1. An angular velocity sensor comprising:
-
a detecting device which detects angular velocity wherein the detecting device includes; a first base portion, a second base portion, a third base portion and a fourth base portion; a first weight portion, a second weight portion, a third weight portion and a fourth weight portion; and portions to connect the base portions to the weight portions, wherein the portions include; a first central beam portion extending along a first imaginary line, a second central beam portion extending along a second imaginary line, a first fixing beam portion connected to an end of the second central beam portion, and a second fixing beam portion connected to the other end of the second central beam portion, wherein, a first end of the first fixing beam portion is connected to the first base portion, a second end of the first fixing beam portion is connected to the second base portion, a first end of the second fixing beam portion is connected to the third base portion, a second end of the second fixing beam portion is connected to the fourth base portion, and wherein the first imaginary line and the second imaginary line cross orthogonally at a center of the detecting device. - View Dependent Claims (2, 3, 4, 5)
-
-
6. An angular velocity sensor comprising:
-
a detecting device which detects angular velocity wherein the detecting device includes; a first base portion, a second base portion, a third base portion and a fourth base portion; a first fixing beam portion connected to the first base portion and the second base portion; a second fixing beam portion connected to the third base portion and the fourth base portion; a first central beam portion; a second central beam portion connected to the first central beam portion, the first fixing beam portion and the second fixing beam portion; and a first weight portion, a second weight portion, a third weight portion and a fourth weight portion supported via at least the first central beam portion and the second central beam portion, and wherein the first central beam portion and the second central beam portion cross orthogonally at a center of the detecting device. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. An angular velocity sensor comprising:
-
a detecting device which detects angular velocity wherein the detecting device includes; a first central beam portion extending along a first imaginary line; a second central beam portion extending along a second imaginary line, the second imaginary line being orthogonal to the first imaginary line; driving portions capable of being moved in response to a first angular velocity around the second central beam portion and to a second angular velocity around an axis orthogonal to the first central beam portion and the second central beam portion; a first fixing beam portion connected to an end of the second central beam portion; a second fixing beam portion connected to the other end of the second central beam portion; a first base portion connected to an end of the first fixing beam portion; a second base portion connected to the other end of the first fixing beam portion; a third base portion connected to an end of the second fixing beam portion; and a fourth base portion connected to the other end of the second fixing beam portion, wherein the first imaginary line and the second imaginary line cross at a center of the detecting device. - View Dependent Claims (16, 17, 18, 19)
-
-
20. An angular velocity sensor comprising:
-
a detecting device which detects angular velocity wherein the detecting device includes; a first base portion, a second base portion, a third base portion and a fourth base portion; a first fixing beam portion connected to the first base portion and the second base portion; a second fixing beam portion connected to the third base portion and the fourth base portion; a first central beam portion passes between the first base portion and the third base portion and between the second base portion and the fourth base portion; a second central beam portion connected to the first central beam portion, the first fixing beam portion and the second fixing beam portion; and a first weight portion, a second weight portion, a third weight portion and a fourth weight portion supported via at least the first central beam portion and the second central beam portion, and wherein the first central beam portion and the second central beam portion are disposed in an area surrounded by the first base portion, the second base portion, the third base portion, the fourth base portion, the first fixing beam portion and the second fixing beam portion. - View Dependent Claims (21, 22)
-
Specification