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Surface-enhanced Raman scattering element

  • US 10,408,761 B2
  • Filed: 08/09/2013
  • Issued: 09/10/2019
  • Est. Priority Date: 08/10/2012
  • Status: Active Grant
First Claim
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1. A surface-enhanced Raman scattering element comprising:

  • a substrate having a principal surface;

    a molded layer having a support part formed on the principal surface of the substrate so as to extend along the principal surface and a fine structure part formed on the support part;

    a frame part formed on the principal surface of the substrate so as to surround the support part and fine structure part along the principal surface; and

    a conductor layer formed on at least the fine structure part and constituting an optical functional part for generating surface-enhanced Raman scattering;

    wherein the fine structure part is formed integrally with the support part,wherein a front surface of the support part is formed integrally with the fine structure part, and a rear surface of the support part is joined to the principal surface of the substrate,wherein the fine structure part includes a plurality of pillars, a thickness of the support part from a front face of the substrate being larger than a column diameter of at least one of the plurality of pillars, a height of at least one of the plurality of pillars being larger than the column diameter of at least one of the plurality of pillars,wherein the conductor layer reaches the surfaces of the plurality of pillars and a surface of the support part exposed between the plurality of pillars,wherein the conductor layer is formed on both top surfaces of the pillars and the surface of the support part exposed between the pillars.

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