Electronic device, method of manufacturing electronic device, physical quantity sensor, electronic apparatus and moving object
First Claim
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1. An electronic device, comprising:
- a first sensor detecting a physical quantity in a first direction, the first sensor detecting acceleration based on variation of capacitance;
a second sensor detecting a physical quantity in a second direction different from the first direction, the second direction being orthogonal to the first direction; and
an outer edge portion arranged on at least a portion of an outer periphery of the first sensor,wherein a plurality of first elongated grooves are arranged extending in a first elongated direction or lined up along the first elongated direction and are provided on the outer edge portion when the outer edge portion is seen in plan view, the plurality of first elongated grooves being configured to reduce transmission of leakage vibration or leakage force transferred from the outer edge portion to the first sensor,the plurality of first elongated grooves are through-holes extending through a thickness of the outer periphery and have a closed shape defined by the outer edge portion,at least a portion of the plurality of first elongated grooves are sandwiched between the first sensor and the second sensor,a plurality of second elongated grooves are arranged extending in a second elongated direction intersecting the first elongated direction or lined up along the second elongated direction and are provided on the outer edge portion when the outer edge portion is seen in plan view, andthe plurality of first elongated grooves alternate with the plurality of the second elongated grooves on at least one side of the outer edge portion such that one of the plurality of second elongated grooves is sandwiched by two of the plurality of first elongated grooves.
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Abstract
A physical quantity sensor includes a first sensor element, an outer edge portion arranged on at least a portion of the outer periphery of the first sensor element, in which a first groove portion extending in a first direction is provided on the outer edge portion when the outer edge portion is seen in plan view.
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Citations
23 Claims
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1. An electronic device, comprising:
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a first sensor detecting a physical quantity in a first direction, the first sensor detecting acceleration based on variation of capacitance; a second sensor detecting a physical quantity in a second direction different from the first direction, the second direction being orthogonal to the first direction; and an outer edge portion arranged on at least a portion of an outer periphery of the first sensor, wherein a plurality of first elongated grooves are arranged extending in a first elongated direction or lined up along the first elongated direction and are provided on the outer edge portion when the outer edge portion is seen in plan view, the plurality of first elongated grooves being configured to reduce transmission of leakage vibration or leakage force transferred from the outer edge portion to the first sensor, the plurality of first elongated grooves are through-holes extending through a thickness of the outer periphery and have a closed shape defined by the outer edge portion, at least a portion of the plurality of first elongated grooves are sandwiched between the first sensor and the second sensor, a plurality of second elongated grooves are arranged extending in a second elongated direction intersecting the first elongated direction or lined up along the second elongated direction and are provided on the outer edge portion when the outer edge portion is seen in plan view, and the plurality of first elongated grooves alternate with the plurality of the second elongated grooves on at least one side of the outer edge portion such that one of the plurality of second elongated grooves is sandwiched by two of the plurality of first elongated grooves. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An electronic device, comprising:
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a first sensor detecting a physical quantity in a first direction, the first sensor detecting acceleration based on variation of capacitance; a second sensor detecting a physical quantity in a second direction different from the first direction, the second direction being orthogonal to the first direction; an outer edge portion arranged on at least a portion of an outer periphery of the first sensor; and a substrate, wherein the first sensor is provided on a main surface of the substrate, at least two of a first groove portion in which first elongated grooves are arranged extending or lined up in a first elongated direction, a second groove portion in which second elongated grooves are arranged extending or lined up in a second elongated direction that intersects the first elongated direction, and a third groove portion in which third elongated grooves are arranged extending or lined up in a direction orthogonal to a center line passing through the center of the first sensor are provided on at least one of the outer edge portion and a region overlapping the outer edge portion when seen in plan view, the at least two of the first elongated grooves, second elongated grooves, and third elongated grooves being configured to reduce transmission of leakage vibration or leakage force transferred from the outer edge portion to the first sensor, the at least two of the first elongated grooves, the second elongated grooves, and the third elongated grooves are through-holes extending through a thickness of the outer edge portion or the region overlapping the outer edge portion when seen in the plan view and have a closed shape defined by the outer edge portion, the at least two of the first elongated grooves, the second elongated grooves, and the third elongated grooves are sandwiched between the first sensor and the second sensor, and the at least two of the first elongated grooves, the second elongated grooves, and the third elongated grooves alternate on at least one side of the outer edge portion such that one of a first of the at least two of the first elongated grooves, the second elongated grooves, and the third elongated grooves is sandwiched by two of a second of the at least two of the first elongated grooves, the second elongated grooves, and the third elongated grooves. - View Dependent Claims (16, 17, 18)
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19. A physical quantity sensor, comprising:
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a first sensor element detecting a physical quantity in a first direction, the first sensor element detecting acceleration based on variation of capacitance; a second sensor element detecting a physical quantity in a second direction different from the first direction, the second direction being orthogonal to the first direction; and an outer edge portion arranged on at least a portion of an outer periphery of the first sensor element, wherein a first groove portion in which first elongated grooves are arranged extending in a first elongated direction or lined up along the first elongated direction is provided on the outer edge portion when the outer edge portion is seen in plan view, the first elongated grooves being configured to reduce transmission of leakage vibration or leakage force transferred from the outer edge portion to the first sensor element, the first elongated grooves are through-holes extending through a thickness of the outer edge portion and have a closed shape defined by the outer edge portion, at least a portion of the first elongated grooves are sandwiched between the first sensor element and the second sensor element, a second groove portion in which second elongated grooves are arranged extending in a second elongated direction intersecting the first elongated direction or lined up along the second elongated direction is provided on the outer edge portion when the outer edge portion is seen in plan view, and the first elongated grooves alternate with the second elongated grooves on at least one side of the outer edge portion such that one of the second elongated grooves is sandwiched by two of the first elongated grooves. - View Dependent Claims (20, 21, 22)
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23. A physical quantity sensor, comprising:
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a first sensor element detecting a physical quantity in a first direction, the first sensor element detecting acceleration based on variation of capacitance; a second sensor element detecting a physical quantity in a second direction different from the first direction, the second direction being orthogonal to the first direction; an outer edge portion arranged on at least a portion of an outer periphery of the first sensor element, and a substrate, wherein the first sensor element and the second sensor element are provided on a main surface of the substrate; at least two of a first groove portion in which first elongated grooves are arranged extending or lined up in a first direction, a second groove portion in which second elongated grooves are arranged extending or lined up in a second direction that intersects the first direction, and a third groove portion in which third elongated grooves are arranged extending or lined up in a direction orthogonal to a center line passing through a center of the first sensor element are provided on at least one of the outer edge portion and a region overlapping the outer edge portion when seen in plan view, the at least two of the first elongated grooves, second elongated grooves, and third elongated grooves being configured to reduce transmission of leakage vibration or leakage force transferred from the outer edge portion to the first sensor, the at least two of the first elongated grooves, the second elongated grooves, and the third elongated grooves are through-holes extending through a thickness of the outer edge portion or the region overlapping the outer edge portion when seen in the plan view and have a closed shape defined by the outer edge portion, at least a portion of the at least two of the first elongated grooves, second elongated grooves, and third elongated grooves are sandwiched between the first sensor element and the second sensor element, and the at least two of the first elongated grooves, the second elongated grooves, and the third elongated grooves alternate on at least one side of the outer edge portion such that one of a first of the at least two of the first elongated grooves, the second elongated grooves, and the third elongated grooves is sandwiched by two of a second of the at least two of the first elongated grooves, the second elongated grooves, and the third elongated grooves.
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Specification