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Electronic device, method of manufacturing electronic device, physical quantity sensor, electronic apparatus and moving object

  • US 10,408,856 B2
  • Filed: 01/04/2016
  • Issued: 09/10/2019
  • Est. Priority Date: 01/06/2015
  • Status: Active Grant
First Claim
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1. An electronic device, comprising:

  • a first sensor detecting a physical quantity in a first direction, the first sensor detecting acceleration based on variation of capacitance;

    a second sensor detecting a physical quantity in a second direction different from the first direction, the second direction being orthogonal to the first direction; and

    an outer edge portion arranged on at least a portion of an outer periphery of the first sensor,wherein a plurality of first elongated grooves are arranged extending in a first elongated direction or lined up along the first elongated direction and are provided on the outer edge portion when the outer edge portion is seen in plan view, the plurality of first elongated grooves being configured to reduce transmission of leakage vibration or leakage force transferred from the outer edge portion to the first sensor,the plurality of first elongated grooves are through-holes extending through a thickness of the outer periphery and have a closed shape defined by the outer edge portion,at least a portion of the plurality of first elongated grooves are sandwiched between the first sensor and the second sensor,a plurality of second elongated grooves are arranged extending in a second elongated direction intersecting the first elongated direction or lined up along the second elongated direction and are provided on the outer edge portion when the outer edge portion is seen in plan view, andthe plurality of first elongated grooves alternate with the plurality of the second elongated grooves on at least one side of the outer edge portion such that one of the plurality of second elongated grooves is sandwiched by two of the plurality of first elongated grooves.

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