Method and apparatus to automatically create virtual sensors with templates

• US 10,409,272 B2
• Filed: 07/22/2014
• Issued: 09/10/2019
• Est. Priority Date: 08/23/2007
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kroupnova, Natalia, Yanovich, Aleksey, Kril, Thorsten, Kozine, Mikhail B.
• Primary Examiner(s): Betsch, Regis J
• Application Number:
  US14/338,027
• Publication Number:
  US 20140336966A1
• Time in Patent Office: 1,876 Days
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 23/00 Testing or monitoring of control systems or parts thereof monitoring of programme-control systems G05B19/048, G05B19/406
• CPC Class Codes: G05B 23/021 adopting a different treatment of each operating region or a different mode of the monitored system, e.g. transient modes; different operating configurations of monitored system
• CPC Class Codes: G05B 23/0221 Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
• CPC Class Codes: G05B 23/0254 based on a quantitative model, e.g. mathematical relationships between inputs and outputs; functions: observer, Kalman filter, residual calculation, Neural Networks
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template.

Claims

1. A process monitoring apparatus, comprising:

a database to store raw data received from at least one manufacturing machine and to store analyzed data received from a statistical process control (SPC) module; and

a virtual sensor manager communicatively coupled to the database, the virtual sensor manager is configured to send a plurality of virtual sensor templates to a client based at least partially on data received from the at least one manufacturing machine, to receive a first virtual sensor associated with a selected virtual sensor template from the client based on user input, and in real time to update automatically a plurality of virtual sensors by adding the first virtual sensor to the plurality of virtual sensors, wherein the plurality of virtual sensor templates include different types of data tags based at least partially on data collected from the at least one manufacturing machine and associated parameters of process recipes, each process recipe defining at least one operating parameter of the at least one manufacturing machine, wherein each virtual sensor template including the selected virtual sensor template having an algorithm to provide a desired functionality to the at least one manufacturing machine including at least one of fault detection of the at least one manufacturing machine, error detection of the at least one manufacturing machine, and process monitoring in real time of one or more process variables used in the at least one manufacturing machine.

2. The process monitoring apparatus of claim 1, wherein the SPC module is configured to automatically collect data associated with the first virtual sensor.

3. The process monitoring apparatus of claim 2, wherein the data is acquired from at least one of an external physical senor associated with a machine tool, a second calculated data tag, a database, the machine tool, or a real sensor attached to the machine tool.

4. The process monitoring apparatus of claim 1, wherein the virtual sensor manager is configured to automatically execute the first virtual sensor associated with the selected virtual sensor template in real-time based on an algorithm to provide a desired functionality by performing calculations on the collected data to generate an output of the first virtual sensor with the output being used by at least one data analysis module in real-time for process monitoring.

5. The process monitoring apparatus of claim 1, further comprising a virtual sensor wizard that is configured to present a user interface, to receive an input to select the virtual sensor template from the plurality of virtual sensor templates provided by the virtual sensor manager and to receive an input to select at least one parameter to configure the selected virtual sensor template.

6. The process monitoring apparatus of claim 5, wherein the virtual sensor wizard is automatically create the first virtual sensor configured from the selected calculated virtual sensor template.

7. The process monitoring apparatus of claim 6, wherein creating and executing the at least one virtual sensor in real-time occurs without having to restart a data analysis software application that performs functionality associated with the statistical process control module.

8. The process monitoring apparatus of claim 5, wherein selecting at least one parameter to configure the selected virtual sensor template further comprises:

selecting at least one data tag associated with a data source; and

selecting values of at least one parameter associated with the selected virtual sensor template.

9. The process monitoring apparatus of claim 1, wherein the virtual sensor manager configures the plurality of virtual sensors in a file directory to establish a correspondence between the plurality of virtual sensors and the corresponding plurality of virtual sensor templates, the configuration includes common fields including description, location, and index.

10. The process monitoring apparatus of claim 9, further comprising:

a data source manager to read the file directory of the virtual sensor manager and to create appropriate attributes for the plurality of virtual sensors.

11. An apparatus, comprising:

a means for storing raw data received from at least one manufacturing machine;

a means for analyzing data; and

a means for managing virtual sensors that is communicatively coupled to the database, the means for managing virtual sensors is configured to send a plurality of virtual sensor templates to a client based at least partially on data received from the at least one manufacturing machine, to receive a first virtual sensor associated with a selected virtual sensor template from the client based on user input, and in real time to update automatically a plurality of virtual sensors by adding the first virtual sensor to the plurality of virtual sensors, wherein the plurality of virtual sensor templates include different types of data tags based at least partially on data collected from the at least one manufacturing machine and associated parameters of process recipes, each process recipe defining at least one operating parameter of the at least one manufacturing machine, wherein each virtual sensor template including the selected virtual sensor template having an algorithm to provide a desired functionality to the at least one manufacturing machine including at least one of fault detection of the at least one manufacturing machine, error detection of the at least one manufacturing machine, and process monitoring in real time of one or more process variables used to in the at least one manufacturing machine.

12. The apparatus of claim 11, wherein the means for analyzing data is configured to automatically collect data associated with the first virtual sensor.

13. The apparatus of claim 11, wherein the means for managing virtual sensors is configured to automatically execute the first virtual sensor associated with the selected virtual sensor template in real-time based on an algorithm to provide a desired functionality by performing calculations on the collected data to generate an output of the first virtual sensor with the output being used by at least one data analysis module in real-time for process monitoring.

14. The apparatus of claim 11, further comprising a virtual sensor wizard that is configured to present a user interface, to receive an input to select the virtual sensor template from the plurality of virtual sensor templates provided by the virtual sensor manager and to receive an input to select at least one parameter to configure the selected virtual sensor template.

15. The apparatus of claim 14, wherein the virtual sensor wizard is configured to automatically create the first virtual sensor configured form the selected calculated virtual sensor template.

16. A computing system, comprising:

a display unit to provide a user interface; and

a processing device coupled to the display, the processing device is configured to execute instructions to provide a plurality of virtual sensor templates to the user interface based at least partially on data receiving from the at least one manufacturing machine, to select, based on user input received with the computing system, one or more virtual sensor templates from a plurality of virtual sensor templates, each virtual sensor template including the one or more selected virtual sensor templates having an algorithm to provide a desired functionality to a semiconductor processing system in real time, to select at least one parameter of the semiconductor processing system to configure the one or more selected virtual sensor templates and in real time to automatically create a first virtual sensor configured from the one or more selected virtual sensor templates, wherein the plurality of virtual sensor templates include different types of data tags and associated parameters of process recipes including chamber pressure, susceptor temperature, RF forward power, or RF reflected power.

17. The computing system of claim 16, wherein the processing device is further configured to execute instructions to send the first virtual sensor to the server, wherein each virtual sensor template to define a format of a virtual sensor based on an extensible markup language (xml).

18. The computing system of claim 16, wherein the processing device is further configured to execute instructions to automatically update the plurality of virtual sensors having at least one virtual sensor that is associated with one or more manufacturing machines by adding the first virtual sensor to the plurality of virtual sensors, to automatically execute the first virtual sensor associated with the selected virtual sensor template in real-based on the algorithm performing calculations on the collected data to generate an output of the first virtual sensor with the output being used by at least one data analysis module in real-time.

19. The computing system of claim 18, wherein the processing device is further configured to execute instructions to acquire the collected data from at least one of an external physical sensor associated with a machine tool, a second virtual sensor, a database, the machine tool, or a real sensor attached to the machine tool.

20. The computing system of claim 16, wherein selecting at least one parameter to configure the one or more selected virtual sensor templates further comprises:

selecting at least one data tag associated with a data source; and

selecting values of at least one parameter associated with the selected virtual sensor template.