Electrostatic chuck
First Claim
1. An electrostatic chuck comprising:
- an attraction substrate having a first main surface and a second main surface, and having an attraction electrode; and
a heater member disposed on a side where the second main surface is present, and including a heating element that heats the attraction substrate,the electrostatic chuck causing an attraction object to be attracted to the first main surface, by using an electrostatic attraction force generated when a voltage is applied to the attraction electrode, whereinan anisotropic heat conductor is disposed between the attraction substrate and the heater member, the anisotropic heat conductor having an upper surface and a lower surface, and a coefficient of thermal conductivity which varies depending on directions,the anisotropic heat conductor is disposed so that the coefficient of thermal conductivity in a plane direction is larger than the coefficient of thermal conductivity in a thickness direction,metal layers are provided which are joined to the anisotropic heat conductor so as to cover the upper surface and the lower surface of the anisotropic heat conductor,an adhesive layer is provided on a surface of each metal layer, the adhesive layer joining the metal layer to the attraction substrate or the heater member, andat least one of the metal layers is a fused metal layer formed by solidifying a melted metal.
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Accused Products
Abstract
An electrostatic chuck includes an anisotropic heat conductor which is disposed between an attraction substrate and a first heater member, and has an upper surface and a lower surface, and a coefficient of thermal conductivity which varies depending on directions. The anisotropic heat conductor is disposed so that the coefficient of thermal conductivity in a plane direction is larger than the coefficient of thermal conductivity in a thickness direction. Further, the electrostatic chuck includes metal layers which are joined to the anisotropic heat conductor so as to cover the upper surface and the lower surface of the anisotropic heat conductor, and an adhesive layer which is provided on a surface of each metal layer, and joins the metal layer to the attraction substrate or the heater member. Moreover, at least one of the metal layers is a fused metal layer formed by solidifying a melted metal.
10 Citations
12 Claims
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1. An electrostatic chuck comprising:
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an attraction substrate having a first main surface and a second main surface, and having an attraction electrode; and a heater member disposed on a side where the second main surface is present, and including a heating element that heats the attraction substrate, the electrostatic chuck causing an attraction object to be attracted to the first main surface, by using an electrostatic attraction force generated when a voltage is applied to the attraction electrode, wherein an anisotropic heat conductor is disposed between the attraction substrate and the heater member, the anisotropic heat conductor having an upper surface and a lower surface, and a coefficient of thermal conductivity which varies depending on directions, the anisotropic heat conductor is disposed so that the coefficient of thermal conductivity in a plane direction is larger than the coefficient of thermal conductivity in a thickness direction, metal layers are provided which are joined to the anisotropic heat conductor so as to cover the upper surface and the lower surface of the anisotropic heat conductor, an adhesive layer is provided on a surface of each metal layer, the adhesive layer joining the metal layer to the attraction substrate or the heater member, and at least one of the metal layers is a fused metal layer formed by solidifying a melted metal. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An electrostatic chuck comprising:
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an attraction substrate having a first main surface and a second main surface, and having an attraction electrode; and a heater member disposed on a side where the second main surface is present, and including a heating element that heats the attraction substrate, the electrostatic chuck causing an attraction object to be attracted to the first main surface, by using an electrostatic attraction force generated when a voltage is applied to the attraction electrode, wherein an anisotropic heat conductor is disposed between the attraction substrate and the heater member, the anisotropic heat conductor having an upper surface and a lower surface, and a coefficient of thermal conductivity which varies depending on directions, the anisotropic heat conductor is disposed so that the coefficient of thermal conductivity in a plane direction is larger than the coefficient of thermal conductivity in a thickness direction, another heater member is provided between the attraction substrate and the anisotropic heat conductor, the another heater member including another heating element that heats the attraction substrate, and the another heating element of the another heater member is configured to include a plurality of heating elements separately disposed at different positions in the plane direction so that a temperature of the attraction substrate can be controlled to be different temperatures depending on the positions in the plane direction. - View Dependent Claims (9, 10, 11, 12)
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Specification