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Electrostatic chuck

  • US 10,410,897 B2
  • Filed: 06/17/2015
  • Issued: 09/10/2019
  • Est. Priority Date: 06/23/2014
  • Status: Active Grant
First Claim
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1. An electrostatic chuck comprising:

  • an attraction substrate having a first main surface and a second main surface, and having an attraction electrode; and

    a heater member disposed on a side where the second main surface is present, and including a heating element that heats the attraction substrate,the electrostatic chuck causing an attraction object to be attracted to the first main surface, by using an electrostatic attraction force generated when a voltage is applied to the attraction electrode, whereinan anisotropic heat conductor is disposed between the attraction substrate and the heater member, the anisotropic heat conductor having an upper surface and a lower surface, and a coefficient of thermal conductivity which varies depending on directions,the anisotropic heat conductor is disposed so that the coefficient of thermal conductivity in a plane direction is larger than the coefficient of thermal conductivity in a thickness direction,metal layers are provided which are joined to the anisotropic heat conductor so as to cover the upper surface and the lower surface of the anisotropic heat conductor,an adhesive layer is provided on a surface of each metal layer, the adhesive layer joining the metal layer to the attraction substrate or the heater member, andat least one of the metal layers is a fused metal layer formed by solidifying a melted metal.

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