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Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel

  • US 10,413,198 B2
  • Filed: 12/19/2017
  • Issued: 09/17/2019
  • Est. Priority Date: 09/20/2013
  • Status: Active Grant
First Claim
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1. A sensing element provided on a film being deformable, the sensing element comprising:

  • a non-magnetic layer;

    a first magnetic layer;

    a layer provided between the non-magnetic layer and the first magnetic layer, the layer contacting the non-magnetic layer, the layer including at least one selected from the group consisting of an oxide and a nitride;

    a second magnetic layer provided between the layer and the first magnetic layer; and

    a spacer layer provided between the first magnetic layer and the second magnetic layer, whereinat least a part of the second magnetic layer is amorphous and includes boron,an electric resistance of the sensing element is configured to change in accordance with a deformation of the film,the second magnetic layer includes a first portion and a second portion,the first portion is provided between the second portion and the spacer layer, anda concentration of boron in the first portion is lower than a concentration of boron in the second portion.

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