Micro electrical mechanical system (MEMS) valve
First Claim
1. A micro electrical mechanical system (MEMS) valve, comprising:
- a first body defining a first channel having a first side and a second side and a second channel intersecting the first channel between the first and second sides;
a second body defining a third channel and being disposed to slide within the first channel between;
first axial positions with the second and third channels axially aligned to permit flow through the second and third channels, andsecond axial positions with the second and third channels axially misaligned to inhibit flow through the second channel;
a medium charged into the first channel at opposite sides of the second body; and
first and second thermal element parts proximate to the first and second sides of the first channel, respectively, and comprising excitable components which are excitable by exposure to radiation to adjust relative temperatures and pressures of the medium at the opposite sides of the second body to drive a sliding of the second body to the first or the second axial positions.
1 Assignment
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Accused Products
Abstract
A micro electrical mechanical system (MEMS) valve is provided. The MEMS valve includes first and second bodies, a medium and a thermal element. The first body defines a first channel and a second channel intersecting the first channel. The second body defines a third channel and is movable within the first channel between first and second positions. When the second body is at the first positions, the second and third channels align and permit flow through the second and third channels. When the second body is at the second positions, the second and third channels misalign and inhibit flow through the second channel. The medium is charged into the first channel at opposite sides of the second body. The thermal element is proximate to the first channel and is operable to cause the medium to drive movements of the second body to the first or the second positions.
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Citations
9 Claims
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1. A micro electrical mechanical system (MEMS) valve, comprising:
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a first body defining a first channel having a first side and a second side and a second channel intersecting the first channel between the first and second sides; a second body defining a third channel and being disposed to slide within the first channel between; first axial positions with the second and third channels axially aligned to permit flow through the second and third channels, and second axial positions with the second and third channels axially misaligned to inhibit flow through the second channel; a medium charged into the first channel at opposite sides of the second body; and first and second thermal element parts proximate to the first and second sides of the first channel, respectively, and comprising excitable components which are excitable by exposure to radiation to adjust relative temperatures and pressures of the medium at the opposite sides of the second body to drive a sliding of the second body to the first or the second axial positions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A micro electrical mechanical system (MEMS) valve, comprising:
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a first body defining a first channel and a second channel intersecting the first channel; a second body defining a third channel and being disposed to slide within the first channel between; first axial positions with the second and third channels axially aligned to permit flow through the second and third channels, and second axial positions with the second and third channels axially misaligned to inhibit flow through the second channel; a medium charged into the first channel at opposite sides of the second body; and a thermal element proximate to the first channel and operable to adjust relative temperatures and pressures of the medium at the opposite sides of the second body to drive a sliding of the second body to the first or the second axial positions, wherein an exterior surface of the second body comprises concave sections arranged side-by-side along a longitudinal axis of the second body, each concave section being adjacent to at least one neighboring concave section.
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Specification