Synchronized mass gyroscope
First Claim
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1. A synchronized mass microelectromechanical systems (MEMS) device, comprising:
- a substrate;
a first proof mass coupled to the substrate by a first tether and configured to move linearly parallel to each of first and second transverse axes;
a second proof mass coupled to the substrate by a second tether and configured to move linearly parallel to each of the first and second transverse axes;
a third proof mass coupled to the substrate by a third tether and configured to move linearly parallel to each of the first and second transverse axes;
a fourth proof mass coupled to the substrate by a fourth tether and configured to move linearly parallel to each of the first and second transverse axes; and
a first coupler coupling the first and second proof masses together and configured to move linearly parallel to the first axis when the first proof mass moves in a first direction parallel to the second axis and the second proof mass moves in a second direction opposite the first direction parallel to the second axis.
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Abstract
Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.
73 Citations
20 Claims
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1. A synchronized mass microelectromechanical systems (MEMS) device, comprising:
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a substrate; a first proof mass coupled to the substrate by a first tether and configured to move linearly parallel to each of first and second transverse axes; a second proof mass coupled to the substrate by a second tether and configured to move linearly parallel to each of the first and second transverse axes; a third proof mass coupled to the substrate by a third tether and configured to move linearly parallel to each of the first and second transverse axes; a fourth proof mass coupled to the substrate by a fourth tether and configured to move linearly parallel to each of the first and second transverse axes; and a first coupler coupling the first and second proof masses together and configured to move linearly parallel to the first axis when the first proof mass moves in a first direction parallel to the second axis and the second proof mass moves in a second direction opposite the first direction parallel to the second axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of operating a synchronized mass microelectromechanical systems (MEMS) device having four proof masses coupled together, the method comprising:
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moving a first proof mass and a second proof mass of the four proof masses in linear anti-phase motion parallel to a first axis; moving a third proof mass and a fourth proof mass of the four proof masses in linear anti-phase motion parallel to the first axis; linearly translating a first coupler coupling the first and second proof masses of the four proof masses when the first and second proof masses of the four proof masses move in linear anti-phase motion parallel to the first axis; and linearly translating a second coupler coupling the third and fourth proof masses of the four proof masses when the third and fourth proof masses of the four proof masses move in linear anti-phase motion parallel to the first axis. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A synchronized mass, balanced microelectromechanical systems (MEMS) gyroscope, comprising:
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a substrate; first, second, third, and fourth proof masses suspended above and coupled to the substrate and each configured to translate linearly parallel to first and second axes; and means for enforcing linear anti-phase motion of the first and second proof masses parallel to the first axis. - View Dependent Claims (17, 18, 19, 20)
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Specification