Gyroscope self test by applying rotation on Coriolis sense mass

• US 10,415,994 B2
• Filed: 07/07/2017
• Issued: 09/17/2019
• Est. Priority Date: 09/16/2011
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Anac, Ozan, Seeger, Joseph
• Primary Examiner(s): Gray, Francis C
• Application Number:
  US15/644,534
• Publication Number:
  US 20170314960A1
• Time in Patent Office: 802 Days
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion
• CPC Class Codes: G01C 25/00 Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass testing, calibrating or compensating compasses G01C17/38
• CPC Class Codes: G01C 25/005 initial alignment, calibration or starting-up of inertial devices

Abstract

A self-test method by rotating the proof mass at a high frequency enables testing the functionality of both the drive and sense systems at the same time. In this method, the proof mass is rotated at a drive frequency. An input force which is substantially two times the drive frequency is applied to the actuation structures to rotate the proof mass of the gyroscope around the sensitive axis orthogonal to the drive axis. An output response of the gyroscope at the drive frequency is detected by a circuitry and a self-test response is obtained.

Claims

1. A method of testing a gyroscope comprising:

in response to a proof mass vibrating in a first direction at a drive frequency in a drive direction, generating a drive motion signal representative of a drive motion in a first direction;

applying a self-test signal to the proof mass, the self-test signal having a frequency substantially two times the drive frequency, the proof mass being rotated about an input axis using the signal at substantially two times the drive frequency, the applying the self-test signal to the proof mass causing rotation of the proof mass at substantially two times the drive frequency; and

in response to applying the self-test signal to the proof mass, detecting a change in a Coriolis force generated as a result of the rotation of the proof mass.

2. The method of testing, as recited in claim 1, further including generating the self-test signal by a self test actuation circuit.

3. The method of testing, as recited in claim 1, wherein the detecting a change in the Coriolis force further includes detecting a motion of the proof mass by using electrostatic sense electrodes and a sense amplifier and demodulating the self-test signal at the drive frequency.

4. The method of testing, as recited in claim 1, further including causing driving the proof mass anti-phase along an axis common to an axis about which a second proof mass is driven anti-phase.

5. The method of testing, as recited in claim 1, further including performing self-testing during which the proof mass and a second proof mass are actuated anti-phase along a common direction at the drive frequency.

6. The method of testing, as recited in claim 5, further including during the self-testing, in response to the self-test signal causing an anti-phase motion of one or more frame masses along a second direction, causing the proof mass and the second proof mass to rotate at substantially two times the drive frequency.

7. The method of testing, as recited in claim 6, wherein the anti-phase motion along a second direction of the frame masses results in rotation of the proof mass and the second proof mass at substantially two times the drive frequency about axes parallel to each other and aligned in a third direction.

8. The method of testing, as recited in claim 6, further including detecting the proof mass and the second proof mass rotating at substantially two times the drive frequency about axes parallel to each other and aligned in a third direction by transducers.

9. The method of testing, as recited in claim 1, further including detecting a motion of the proof mass at the drive frequency using electrostatic comb structures.

10. The method of testing, as recited in claim 1, further including detecting a motion of the proof mass at the drive frequency using transducers.

11. The method of testing, as recited in claim 1, further including using a drive comb, applying an electrostatic force to the proof mass to vibrate the proof mass.

12. The method of testing, as recited in claim 1, wherein an amplitude of the motion of the proof-mass along a second direction is proportional to an angular velocity.

13. The method of testing, as recited in claim 1, further including generating a drive signal at a drive frequency in response to detection of a drive motion displacement of the gyroscope.

14. The method of testing, as recited in claim 1, further including detecting movement of the gyroscope in response to a capacitance change at a node of the gyroscope.

15. The method of testing, as recited in claim 14, further including converting the capacitance change at the node to an output voltage proportional to the rotation of the proof mass generating the change to a Coriolis force.

16. The method of testing, as recited in claim 15, further including detecting the drive motion signal with a phase shifted by ninety degrees and provided as input to the gyroscope causing the gyroscope to vibrate at its natural frequency.

17. The method of testing, as recited in claim 1, further including detecting the Coriolis force on the proof mass as a capacitance change at a gyroscope node.