Structures and manufacture method of electrochemical units
First Claim
1. A structure of an electrochemical unit, comprising:
- a substrate;
a first metal layer disposed on the substrate; and
an array of electrochemical cells disposed on the first metal layer, wherein the array of the electrochemical cells comprises a plurality of electrochemical cells, and each of the electrochemical cells comprises;
the first metal layer disposed on the substrate;
a first electrode disposed on the first metal layer;
a polymer layer disposed on the substrate and adjacent to the first metal layer and the first electrode, wherein a pore is constituted between the polymer layers of every the two electrochemical cells, and a cavity located above the first electrode is defined between every the two electrochemical cells, wherein the cavity is communicated with the pore;
a second metal layer disposed on the polymer layer; and
a second electrode disposed on the second metal layer.
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Accused Products
Abstract
A structure of an electrochemical unit includes a substrate, a first metal layer disposed on the substrate, and an array of electrochemical cells disposed on the first metal layer. The array of the electrochemical cells includes a plurality of electrochemical cells. Each of the electrochemical cells includes the first metal layer disposed on the substrate, a first electrode disposed on the first metal layer, a polymer layer disposed on the substrate and adjacent to the first metal layer and the first electrode. A second metal layer is disposed on the polymer layer, and a second electrode is disposed on the second metal layer. A pore is constituted between the polymer layers of every the two electrochemical cells. A cavity located above the first electrode is defined between every the two electrochemical cells, wherein the cavity is communicated with the pore.
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Citations
37 Claims
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1. A structure of an electrochemical unit, comprising:
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a substrate; a first metal layer disposed on the substrate; and an array of electrochemical cells disposed on the first metal layer, wherein the array of the electrochemical cells comprises a plurality of electrochemical cells, and each of the electrochemical cells comprises; the first metal layer disposed on the substrate; a first electrode disposed on the first metal layer; a polymer layer disposed on the substrate and adjacent to the first metal layer and the first electrode, wherein a pore is constituted between the polymer layers of every the two electrochemical cells, and a cavity located above the first electrode is defined between every the two electrochemical cells, wherein the cavity is communicated with the pore; a second metal layer disposed on the polymer layer; and a second electrode disposed on the second metal layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A manufacture method of an electrochemical unit, comprising:
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providing a substrate; and forming an array of electrochemical cells on the substrate, wherein the array of the electrochemical cells comprises a plurality of electrochemical cells, and the steps comprise; forming a first metal layer on the substrate; forming a plurality of first electrodes on the first metal layer; forming a polymer layer on the substrate and adjacent to the first metal layer and the first electrodes, wherein a pore is constituted between the polymer layers of every the two electrochemical cells, and a cavity located above the first electrode is defined between every the two electrochemical cells, wherein the cavity is communicated with the pore; forming a second metal layer on the polymer layer; and forming a second electrode on the second metal layer. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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Specification