Structures and manufacture method of electrochemical units

• US 10,416,114 B2
• Filed: 11/15/2016
• Issued: 09/17/2019
• Est. Priority Date: 05/26/2016
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Chen, Jui-Chin, Tzeng, Pei-Jer, Ku, Tzu-Kun, Hsin, Yu-Chen, Chang, Yiu-Hsiang
• Primary Examiner(s): Noguerola, Alexander S
• Application Number:
  US15/352,242
• Publication Number:
  US 20170343506A1
• Time in Patent Office: 1,036 Days
• CPC Class Codes: G01N 27/27 Association of two or more measuring systems or cells, each measuring a different parameter, where the measurement results may be either used independently, the systems or cells being physically associated, or combined to produce a value for a further parameter
• CPC Class Codes: G01N 27/327 Biochemical electrodes , e.g. electrical or mechanical details for in vitro measurements
• CPC Class Codes: G01N 27/403 Cells and electrode assemblies
• CPC Class Codes: G01N 27/417 using cells , i.e. more than one cell and probes with solid electrolytes
• CPC Class Codes: G01N 33/4836 using multielectrode arrays
• CPC Class Codes: G01N 33/48721 Investigating individual macromolecules, e.g. by translocation through nanopores Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68

Abstract

A structure of an electrochemical unit includes a substrate, a first metal layer disposed on the substrate, and an array of electrochemical cells disposed on the first metal layer. The array of the electrochemical cells includes a plurality of electrochemical cells. Each of the electrochemical cells includes the first metal layer disposed on the substrate, a first electrode disposed on the first metal layer, a polymer layer disposed on the substrate and adjacent to the first metal layer and the first electrode. A second metal layer is disposed on the polymer layer, and a second electrode is disposed on the second metal layer. A pore is constituted between the polymer layers of every the two electrochemical cells. A cavity located above the first electrode is defined between every the two electrochemical cells, wherein the cavity is communicated with the pore.

Claims

1. A structure of an electrochemical unit, comprising:

a substrate;

a first metal layer disposed on the substrate; and

an array of electrochemical cells disposed on the first metal layer, wherein the array of the electrochemical cells comprises a plurality of electrochemical cells, and each of the electrochemical cells comprises;

the first metal layer disposed on the substrate;

a first electrode disposed on the first metal layer;

a polymer layer disposed on the substrate and adjacent to the first metal layer and the first electrode, wherein a pore is constituted between the polymer layers of every the two electrochemical cells, and a cavity located above the first electrode is defined between every the two electrochemical cells, wherein the cavity is communicated with the pore;

a second metal layer disposed on the polymer layer; and

a second electrode disposed on the second metal layer.

2. The structure of the electrochemical unit as claimed in claim 1, wherein the first electrode and the second electrode are silver/silver chloride.

3. The structure of the electrochemical unit as claimed in claim 1, further comprising a protection layer formed on walls of the polymer layers located at the periphery of the cavity.

4. The structure of the electrochemical unit as claimed in claim 3, wherein the polymer layers are a T-shaped structure comprising a vertical portion and a horizontal portion disposed above the vertical portion, the horizontal portion is in contact with the second metal layer, the second metal layer is in contact with the second electrode, the vertical portion is in contact with the first electrode, the first metal layer and the substrate, and the pore is constituted between the horizontal portions of the polymer layers of every the two electrochemical cells.

5. The structure of the electrochemical unit as claimed in claim 4, wherein the horizontal portion has a first end and a second end which are vertical planes, and a pore is constituted between the first end and the second end of every two T-shaped structures, wherein the pore has a shape of circular, triangle, square, rectangle, quadrilateral, pentagon or polygon.

6. The structure of the electrochemical unit as claimed in claim 4, wherein the horizontal portion has a first end and a second end which are inclined planes, and a conical pore is constituted between the first end and the second end.

7. The structure of the electrochemical unit as claimed in claim 4, wherein the horizontal portion comprises polymer materials, silicon oxide, silicon nitride or a multi-layered film, and the vertical portion comprises silicon oxide, silicon nitride or a multi-layered film.

8. The structure of the electrochemical unit as claimed in claim 1, wherein the substrate comprises a silicon substrate and an oxide layer or a nitride layer having metal wires and active components disposed on the silicon substrate.

9. The structure of the electrochemical unit as claimed in claim 1, wherein the first metal layer and the second metal layer comprise a stack of titanium, copper and gold, wherein the titanium is in contact with an oxide layer or a nitride layer of the substrate, or the first metal layer and the second metal layer comprising chromium/nickel, chromium/gold, titanium/copper, nickel/gold, chromium/nickel/gold, titanium/copper/gold or titanium/gold.

10. The structure of the electrochemical unit as claimed in claim 1, wherein the polymer layer is disposed in an opening between the first electrodes and in a first opening between the first metal layers, and adjacent to the first metal layer and the first electrode.

11. The structure of the electrochemical unit as claimed in claim 10, wherein the polymer layer comprises polymer materials, silicon oxide, silicon nitride or a multi-layered film.

12. The structure of the electrochemical unit as claimed in claim 1, wherein the second metal layer comprises a stack of titanium, copper and gold, and comprises a plurality of second openings, wherein the titanium is in contact with the polymer layer and the gold is in contact with the second electrode.

13. The structure of the electrochemical unit as claimed in claim 1, further comprising a first internal circuit extending from the first electrode and the first metal layer to the interior of the substrate, and further extending to connect to an external circuit or a circuit board.

14. The structure of the electrochemical unit as claimed in claim 13, wherein the electrochemical cell further comprises an interconnection extending from the second electrode and the second metal layer to a second internal circuit within the substrate through the polymer layer and a first opening of the first metal layer, and further extending to connect to the external circuit or the circuit board, wherein the first internal circuit and second internal circuit are separated.

15. A manufacture method of an electrochemical unit, comprising:

providing a substrate; and

forming an array of electrochemical cells on the substrate, wherein the array of the electrochemical cells comprises a plurality of electrochemical cells, and the steps comprise;

forming a first metal layer on the substrate;

forming a plurality of first electrodes on the first metal layer;

forming a polymer layer on the substrate and adjacent to the first metal layer and the first electrodes, wherein a pore is constituted between the polymer layers of every the two electrochemical cells, and a cavity located above the first electrode is defined between every the two electrochemical cells, wherein the cavity is communicated with the pore;

forming a second metal layer on the polymer layer; and

forming a second electrode on the second metal layer.

16. The manufacture method of an electrochemical unit as claimed in claim 15, further comprising forming an interconnection respectively connected to the second electrode and an external circuit or a circuit board through the polymer layer and a second internal circuit within the substrate;

and forming a first internal circuit respectively connected to the first electrode and the external circuit or the circuit board through the interior of the substrate, wherein the first internal circuit and the second internal circuit are separated.

17. The manufacture method of an electrochemical unit as claimed in claim 15, further comprising forming a cover above the electrochemical cells, and filling a solution into the interior of the electrochemical cells.

18. The manufacture method of an electrochemical unit as claimed in claim 15, wherein the substrate comprises a silicon substrate, an oxide layer or a nitride layer having metal wires and active components, a first internal circuit subsequently connected to the first electrode, and a second internal circuit subsequently connected to the second electrode.

19. The manufacture method of an electrochemical unit as claimed in claim 15, wherein a first metal layer is formed on the substrate by sputtering or chemical vapor deposition.

20. The manufacture method of an electrochemical unit as claimed in claim 19, wherein the location of the first electrode above the first metal layer is defined using a photoresist, silver is electroplated on the first metal layer, and the silver is chlorinated to form silver chloride, such that the silver/silver chloride is formed on the first metal layer to form the first electrode.

21. The manufacture method of an electrochemical unit as claimed in claim 20, wherein a sacrificial layer is formed on the first electrode, and a plurality of openings are formed between the adjacent sacrificial layers and the adjacent first electrodes after the photoresist is removed, exposing the first metal layer at the bottom of the opening.

22. The manufacture method of an electrochemical unit as claimed in claim 21, wherein the sacrificial layer comprises polymers or metal.

23. The manufacture method of an electrochemical unit as claimed in claim 21, wherein the first metal layer at the bottom of the opening is etched to form a first opening, exposing the substrate, such that the first metal layers adjacent to the bottom of the opening are separated to isolate the adjacent first electrodes, and the first electrodes of each of the electrochemical cells of the array of the electrochemical cells are independent.

24. The manufacture method of an electrochemical unit as claimed in claim 23, wherein a protection layer or a stop layer is formed on inner peripheral walls of the openings and the first openings and on the sacrificial layer.

25. The manufacture method of an electrochemical unit as claimed in claim 24, wherein a nitride layer or an oxide layer is filled into the openings and the first openings and overlies the sacrificial layer by chemical vapor deposition.

26. The manufacture method of an electrochemical unit as claimed in claim 25, wherein the nitride layer or the oxide layer is polished by chemical mechanical planarization, exposing the sacrificial layer and the nitride layer or the oxide layer.

27. The manufacture method of an electrochemical unit as claimed in claim 25, wherein the nitride layer or the oxide layer is continuously polished to a height above the sacrificial layer by chemical mechanical planarization after the nitride layer or the oxide layer is planarized.

28. The manufacture method of an electrochemical unit as claimed in claim 26, wherein the polymer layer is formed on the sacrificial layer and the nitride layer or the oxide layer by chemical vapor deposition or spin coating.

29. The manufacture method of an electrochemical unit as claimed in claim 27, wherein a via is formed through the polymer layer to the substrate by laser drilling or etching, and a conductive material is filled into the via to connect to a second internal circuit.

30. The manufacture method of an electrochemical unit as claimed in claim 29, wherein a second metal layer is formed on the polymer layer by sputtering, chemical vapor deposition or electroless plating, after the location of the second electrode of the electrochemical cell is defined using a photoresist, silver is electroplated, and the silver is chlorinated to form silver chloride, such that the silver/silver chloride is formed on the second metal layer to form the second electrode.

31. The manufacture method of an electrochemical unit as claimed in claim 30, wherein the second metal layer below the second electrode is etched to form a second opening, such that the adjacent second metal layers below the second electrodes are separated to isolate the adjacent second electrodes.

32. The manufacture method of an electrochemical unit as claimed in claim 31, wherein a nitride layer is formed on the second metal layers, the second electrodes and the polymer layer by chemical vapor deposition.

33. The manufacture method of an electrochemical unit as claimed in claim 32, wherein a location of the pore above the nitride layer is defined using a photoresist, and the nitride layer and the polymer layer are etched through to form the pore.

34. The manufacture method of an electrochemical unit as claimed in claim 33, wherein the sacrificial layer is removed using an organic or inorganic solution.

35. The manufacture method of an electrochemical unit as claimed in claim 34, wherein the nitride layer covering the second electrode is etched using a diluted hydrofluoric acid solution, exposing the second electrode.

36. The manufacture method of an electrochemical unit as claimed in claim 15, further comprising forming a cover above the array of the electrochemical cells, and filling a solution into the interior of the array of the electrochemical cells.

37. The manufacture method of an electrochemical unit as claimed in claim 36, wherein the solution is a salt-containing electrolyte solution.