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Method for manufacturing semiconductor device

  • US 10,418,467 B2
  • Filed: 04/16/2018
  • Issued: 09/17/2019
  • Est. Priority Date: 06/30/2009
  • Status: Active Grant
First Claim
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1. A semiconductor device comprising:

  • a first conductive film over a substrate;

    a first insulating film over the first conductive film;

    a first oxide semiconductor film over the first insulating film;

    a second oxide semiconductor film over the first oxide semiconductor film;

    a second conductive film and a third conductive film over the first oxide semiconductor film and the second oxide semiconductor film;

    an oxide insulating film over the second conductive film and the third conductive film; and

    a fourth conductive film over the oxide insulating film,wherein the oxide insulating film is in contact with part of the first oxide semiconductor film and part of the second oxide semiconductor film,wherein the fourth conductive film overlaps the first conductive film, the first oxide semiconductor film and the second oxide semiconductor film, andwherein the first conductive film and the fourth conductive film are configured to be supplied with a same potential.

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