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Miniature hermetic acceleration detection device

  • US 10,422,813 B2
  • Filed: 08/17/2016
  • Issued: 09/24/2019
  • Est. Priority Date: 09/02/2015
  • Status: Active Grant
First Claim
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1. A MEMS acceleration detection device comprising:

  • a housing having a cavity, the housing laterally surrounding the cavity;

    a spring mass system assembled into the cavity of the housing, the spring mass system having an annular ring including an at least partially closable split, the annular ring having a single peripheral surface facing and in non-moving contact with a corresponding surface of the cavity during operation of the device, the housing laterally surrounding and maintaining in lateral contact the spring mass system along the peripheral surface; and

    a lid enclosing the spring mass system in the cavity and contacting a top surface of the housing.

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