Miniature hermetic acceleration detection device

• US 10,422,813 B2
• Filed: 08/17/2016
• Issued: 09/24/2019
• Est. Priority Date: 09/02/2015
• Status: Active Grant

• Current Assignee: Circor Aerospace, Inc. (Circor International Incorporated)
• Original Assignee: Circor Aerospace, Inc. (Circor International Incorporated)
• Inventors: Salamone, Brent
• Primary Examiner(s): Macchiarolo, Peter J
• Assistant Examiner(s): Mercado, Alexander A
• Application Number:
  US15/238,988
• Publication Number:
  US 20170059607A1
• Time in Patent Office: 1,133 Days
• CPC Class Codes: B81B 2201/016 having a bridge fixed on two ends and connected to one or more dimples
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2203/055 Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
• CPC Class Codes: B81C 1/00269 Bonding of solid lids or wafers to the substrate
• CPC Class Codes: B81C 3/00 Assembling of devices or systems from individually processed components
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/135 by making use of contacts which are actuated by a movable inertial mass
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/082 for two degrees of freedom of movement of a single mass

Abstract

A MEMS acceleration detection device including a housing having a cavity and a spring mass system assembled into the cavity of the housing. A lid enclosing the spring mass system in the cavity and contacting a top surface of the housing.

Claims

1. A MEMS acceleration detection device comprising:

a housing having a cavity, the housing laterally surrounding the cavity;

a spring mass system assembled into the cavity of the housing, the spring mass system having an annular ring including an at least partially closable split, the annular ring having a single peripheral surface facing and in non-moving contact with a corresponding surface of the cavity during operation of the device, the housing laterally surrounding and maintaining in lateral contact the spring mass system along the peripheral surface; and

a lid enclosing the spring mass system in the cavity and contacting a top surface of the housing.

2. The device of claim 1, wherein upon assembly, the spring mass system maintains an interference fit with the cavity.

3. The device of claim 1, wherein the housing includes a chamfer formed along an entrance to the cavity, the lid having a first surface facing the top surface of the housing, the first surface including a stepped surface received by the chamfer for aligning the lid with the housing during assembly.

4. The device of claim 1, wherein the spring mass system comprises:

the annular ring surrounding a central mass; and

a spring positioned between the annular ring and the central mass, the annular ring in contact with a surface of the cavity.

5. The device of claim 4, wherein the central mass is urged into contact with at least one of a non-protruding surface in the cavity and a protrusion positioned in the cavity in response to a sufficient force in a z direction.

6. The device of claim 4, wherein the central mass is urged into contact with a protrusion positioned in the cavity in response to a sufficient force an x direction, y direction or a combination thereof.

7. The device of claim 4, wherein the central mass is urged into contact with a protrusion positioned in the cavity in response to a sufficient force in an x direction, y direction, z direction or a combination thereof.

8. The device of claim 4, wherein the split is partially closable in response to forces applied to an outer surface of the annular ring toward the central mass.

9. The device of claim 8, wherein the housing includes a chamfer formed along an entrance to the cavity, a size of the cavity being less than a size of the annular ring of the spring mass system in an uncompressed condition;

wherein in response to the annular ring of the spring mass system being brought into sliding contact with the chamfer during assembly of the spring mass system into the cavity, the chamfer exerts a force partially closing the split, resulting in the annular ring being in a compressed condition, the annular ring being maintained in the compressed condition after the spring mass system is assembled into the cavity.

10. A MEMS acceleration detection device comprising:

a housing having a cavity, the housing laterally surrounding the cavity; and

a spring mass system assembled into the cavity of the housing, the spring mass system having an annular ring including an at least partially closable split, the annular ring having a single peripheral surface facing and in non-moving contact with a corresponding surface of the cavity during operation of the device, the housing laterally surrounding and maintaining in lateral contact the spring mass system along the peripheral surface;

the spring mass system comprising;

the annular ring surrounding a central mass; and

a spring positioned between the annular ring and the central mass, the annular ring in contact with a surface of the cavity; and

a lid enclosing the spring mass system in the cavity and contacting a top surface of the housing, the housing including a chamfer formed along an entrance to the cavity, the lid having a first surface facing the top surface of the housing, the first surface including a stepped surface received by the chamfer for aligning the lid with the housing during assembly.

11. The device of claim 10, wherein the annular ring includes an at least partially closable split, the split being partially closable in response to forces applied to an outer surface of the annular ring toward the central mass.

12. The device of claim 10, wherein the central mass is urged into contact with at least one of a non-protruding surface of the cavity and a protrusion positioned in the cavity in response to a sufficient force in a z direction.

13. The device of claim 10, wherein the central mass is urged into contact with a protrusion positioned in the cavity in response to a sufficient force in an x direction, y direction or a combination thereof.

14. The device of claim 10, wherein the central mass is urged into contact with a protrusion positioned in the cavity in response to a sufficient force in an x direction, y direction, z direction or a combination thereof.

15. The device of claim 11, wherein the housing includes the chamfer formed along an entrance to the cavity, a size of the cavity being less than a size of the annular ring of the spring mass system in an uncompressed condition;

wherein in response to the annular ring of the spring mass system being brought into sliding contact with the chamfer during assembly of the spring mass system into the cavity, the chamfer exerts a force partially closing the split, resulting in the annular ring being in a compressed condition, the annular ring being maintained in the compressed condition after the spring mass system is assembled into the cavity.

16. A method of manufacture of a MEMS acceleration detection device comprising:

providing a housing having a cavity, the housing laterally surrounding the cavity;

assembling a spring mass system into the cavity of the housing, the spring mass system having an annular ring including an at least partially closable split, the annular ring having a single peripheral surface facing and in non-moving contact with a corresponding surface of the cavity during operation of the device, the housing laterally surrounding and maintaining in lateral contact the spring mass system along the peripheral surface; and

assembling a lid enclosing the spring mass system in the cavity and contacting a top surface of the housing.

17. The method of claim 16, wherein assembling the spring mass system into the cavity of the housing results in an interference fit between the spring mass system and the cavity.

18. The method of claim 16, wherein assembling the spring mass system into the cavity of the housing further comprises:

slidably contacting the annular ring of the spring mass system with a chamfer formed along an entrance to the cavity, the chamfer exerting a force partially closing the split formed in the annular ring, resulting in the annular ring being in a compressed condition, the annular ring being maintained in the compressed condition after the spring mass system is assembled into the cavity.

19. The method of claim 16, wherein assembling the lid enclosing the spring mass system in the cavity further comprises:

aligning the lid with the housing during assembly, wherein the housing including a top surface and a chamfer formed along an entrance to the cavity, the lid having a first surface facing the top surface of the housing, the first surface including a stepped surface received by the chamfer during assembly.