Integrated gas sensor device, in particular for detecting carbon monoxide (CO)
First Claim
1. A method, comprising:
- forming a first insulating layer on a first side of a substrate, the substrate having a second side opposite the first side;
forming a patterned layer on the first insulating layer, the patterned layer having a first electrode, a second electrode, and a third electrode, the forming the patterned layer including forming first through holes in at least one of the first electrode and the second electrode; and
forming a electrolytic hydrogel layer on the patterned layer, first portions of the electrolytic hydrogel layer being between the first, second, and third electrodes, respectively, and second portions of the electrolytic hydrogel layer being in at least one of the first through holes.
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Abstract
It is described an integrated gas sensor device comprising a silicon substrate and an oxide layer on the silicon substrate, as well as a working electrode, a counter electrode and a reference electrode, on the oxide layer, the working electrode and the counter electrode having respective active area exposed to an environmental air through at least a plurality of first openings and a plurality of second openings in the oxide layer in correspondence of the working electrode and of the counter electrode, further comprising an electrolyte layer portion and a hydrogel layer portion on the electrolyte layer portion, the electrolyte and hydrogel layer portions having a same size, suitable to cover at least the working, counter and reference electrodes, the hydrogel layer portion acting as a “quasi solid state” water reservoir.
19 Citations
20 Claims
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1. A method, comprising:
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forming a first insulating layer on a first side of a substrate, the substrate having a second side opposite the first side; forming a patterned layer on the first insulating layer, the patterned layer having a first electrode, a second electrode, and a third electrode, the forming the patterned layer including forming first through holes in at least one of the first electrode and the second electrode; and forming a electrolytic hydrogel layer on the patterned layer, first portions of the electrolytic hydrogel layer being between the first, second, and third electrodes, respectively, and second portions of the electrolytic hydrogel layer being in at least one of the first through holes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method, comprising:
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forming a first insulating layer on a first side of a substrate, the substrate having a second side opposite the first side, the first insulating layer having a plurality of first through holes; forming a patterned layer on the first insulating layer, the patterned layer having a first electrode, a second electrode, and a third electrode, the first electrode and the second electrode including a plurality of second through holes, each second through hole of the plurality of second through holes aligned with a respective one of the plurality of first through holes; forming a electrolytic hydrogel layer on the patterned layer, portions of the electrolytic hydrogel layer between each of the first, second, and third electrodes, respectively; and exposing active areas of the first and second electrodes to an external environment. - View Dependent Claims (17, 18, 19, 20)
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Specification