Three-axis inertial sensor for detecting linear acceleration forces

• US 10,429,407 B2
• Filed: 03/27/2017
• Issued: 10/01/2019
• Est. Priority Date: 03/27/2017
• Status: Active Grant

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Inventors: Tang, Jun
• Primary Examiner(s): Sinha, Tarun
• Application Number:
  US15/469,754
• Publication Number:
  US 20180275161A1
• Time in Patent Office: 918 Days
• Field of Search: 7351432
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0805 being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
• CPC Class Codes: G01P 2015/082 for two degrees of freedom of movement of a single mass
• CPC Class Codes: G01P 2015/0837 the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor

Abstract

An inertial sensor includes a proof mass spaced apart from a surface of a substrate. The proof mass has a first section and a second section, where the first section has a first mass that is greater than a second mass of the second section. An anchor is coupled to the surface of the substrate and a spring system is interconnected between the anchor and the first and second sections of the proof mass. The spring system enables translational motion of the first and second sections of the proof mass in response to linear acceleration forces imposed on the inertial sensor in any of three orthogonal directions.

Claims

1. An inertial sensor comprising:

a proof mass spaced apart from a planar surface of a substrate, said proof mass having a first section and a second section, said first section having a first mass that is greater than a second mass of said second section;

an anchor coupled to said planar surface of said substrate; and

a spring system interconnected between said anchor and said first and second sections of said proof mass, said spring system being configured to enable translational motion of said first and second sections of said proof mass in response to linear acceleration forces imposed on said inertial sensor in any of three orthogonal directions.

2. The inertial sensor of claim 1 wherein said spring system comprises:

a first spring element;

a rotational beam having a first beam end and a second beam end, said first spring element interconnecting said anchor and a midpoint of said rotational beam, said midpoint being centered between said first and second beam ends;

a second spring element interconnecting said first beam end of said rotational beam and said first section of said proof mass; and

a third spring element interconnecting said second beam end of said rotational beam and said second section said proof mass.

3. The inertial sensor of claim 2 wherein:

said spring system is oriented substantially parallel to said planar surface of said substrate;

said first, second, and third spring elements are oriented substantially parallel to one another; and

said rotational beam is oriented substantially perpendicular to said first, second, and third spring elements.

4. The inertial sensor of claim 1 wherein:

in response to a first linear acceleration force in a first direction substantially parallel to said planar surface, said spring structure is configured to enable said first and second sections of said proof mass to undergo translational motion in said first direction and in anti-phase relative to one another;

in response to a second acceleration force in a second direction substantially parallel to said planar surface and orthogonal to said first direction, said spring structure is configured to enable said first and second sections of said proof mass to undergo said translational motion in said second direction and in-phase relative to one another; and

in response to a third acceleration force in a third direction normal to said planar surface of said substrate, said spring structure is configured to enable said first and second sections of said proof mass to undergo said translational motion in said third direction and in anti-phase relative to one another.

5. The inertial sensor of claim 1 further comprising:

first fixed electrodes coupled to said substrate proximate said first section of said proof mass;

first movable electrodes coupled to said first section of said proof mass, said first movable electrodes being positioned in alternating arrangement with said first fixed electrodes, said first movable electrodes being movable relative to said first fixed electrodes for detecting a first linear acceleration force in a first direction substantially parallel to said planar surface of said substrate;

second fixed electrodes coupled to said substrate proximate said second section of said proof mass; and

second movable electrodes coupled to said second section of said proof mass, said second movable electrodes being positioned in alternating arrangement with said second fixed electrodes, said second movable electrodes being movable relative to said second fixed electrodes for detecting a second linear acceleration force in a second direction substantially parallel to said planar surface of said substrate and perpendicular to said first direction.

6. The inertial sensor of claim 5 further comprising third fixed electrodes formed on said planar surface of said substrate between said substrate and each of said first and second sections of said proof mass for detecting a third acceleration force in a third direction normal to said planar surface of said substrate.

7. The inertial sensor of claim 1 wherein said proof mass further comprises:

a third section spaced apart from said planar surface of said substrate and diagonally opposing said first section relative to a center point of said proof mass; and

a fourth section spaced apart from said planar surface of said substrate and diagonally opposing said second section relative to said center point of said proof mass.

8. The inertial sensor of claim 7 wherein said third section exhibits said first mass and said fourth section exhibits said second mass.

9. The inertial sensor of claim 7 further comprising a frame member spaced apart from said planar surface of said substrate, said frame member surrounding said proof mass, wherein said first and third sections are directly attached to said frame member and said second and fourth sections are detached from said frame member.

10. The inertial sensor of claim 7 further comprising a rigid beam spaced apart from said planar surface of said substrate and interconnecting said second and fourth sections.

11. The inertial sensor of claim 7 further comprising:

a second anchor coupled to said planar surface of said substrate proximate said center point of said proof mass; and

a second spring system interconnected between said second anchor and said third and fourth sections of said proof mass, said second spring system being configured to enable translational motion of said third and fourth sections of said proof mass in response to acceleration forces imposed on said inertial sensor in any of said three orthogonal directions.

12. An inertial sensor comprising:

a proof mass spaced apart from a planar surface of a substrate, said proof mass having a first section, a second section, a third section, and a fourth section, said third section diagonally opposing said first section relative to a center point of said proof mass, said fourth section diagonally opposing said second section relative to said center point, and each of said first and third sections having a first mass that is greater than a second mass of each of said second and fourth sections;

a first anchor coupled to said planar surface of said substrate;

a second anchor coupled to said planar surface of said substrate;

a first spring system interconnected between said first anchor and said first and second sections of said proof mass; and

a second spring system interconnected between said second anchor and said third and fourth sections of said proof mass, wherein said first and second spring systems are configured to enable translational motion of said first, second, third, and fourth sections of said proof mass in response to linear acceleration forces imposed on said inertial sensor in any of three orthogonal directions.

13. The inertial sensor of claim 12 further comprising a frame member spaced apart from said planar surface of said substrate, said frame member surrounding said proof mass, wherein said first and third sections are directly attached to said frame member and said second and fourth sections are detached from said frame member.

14. The inertial sensor of claim 12 further comprising a rigid beam spaced apart from said planar surface of said substrate and interconnecting said second and fourth sections.

15. The inertial sensor of claim 12 wherein:

in response to a first linear acceleration force in a first direction substantially parallel to said planar surface, said first and second spring structures are configured to enable said first, second, third, and fourth sections of said proof mass to undergo translational motion in said first direction, said first and third sections moving in-phase, said second and fourth sections moving in-phase, and said first and third sections moving in anti-phase relative to second and fourth sections;

in response to a second acceleration force in a second direction substantially parallel to said planar surface and orthogonal to said first direction, said first and second spring structures are configured to enable said first, second, third, and fourth sections of said proof mass to undergo said translational motion in said second direction, and in-phase relative to one another; and

in response to a third acceleration force in a third direction normal to said planar surface of said substrate, said first and second spring structures are configured to enable said first, second, third, and fourth sections of said proof mass to undergo said translational motion in said third direction, said first and third sections moving in-phase, said second and fourth sections moving in-phase, and said first and third sections moving in anti-phase relative to second and fourth sections.

16. The inertial sensor of claim 15 wherein each of said first and second spring systems comprises:

a first spring element;

a rotational beam having a first beam end and a second beam end, said first spring element interconnecting a corresponding one of said first and second anchors and a midpoint of said rotational beam, said midpoint being centered between said first and second beam ends;

a second spring element interconnecting said first beam end of said rotational beam and a corresponding one of said first and third sections of said proof mass; and

a third spring element interconnecting said second beam end of said rotational beam and a corresponding one of said second and fourth sections of said proof mass.

17. The inertial sensor of claim 16 wherein:

said first and second spring systems are oriented substantially parallel to said planar surface of said substrate;

said first, second, and third spring elements are oriented substantially parallel to one another and said first direction of said first linear acceleration force is substantially parallel to a first lengthwise dimension of said first, second, and third spring elements; and

said rotational beam is oriented substantially perpendicular to said first, second, and third spring elements and said second direction of said second linear acceleration force is substantially parallel to a second lengthwise dimension of said rotational beam, wherein;

in response to said first linear acceleration force, said rotational beam pivots about said midpoint and said first, second, and third spring elements flex to yield said anti-phase translational motion in said first direction;

in response to a second linear acceleration force, said rotational beam refrains from pivoting, and said second and third spring elements flex to yield said in-phase translational motion in said second direction; and

in response to said third acceleration force, said rotational beam refrains from pivoting and said first, second, and third spring elements flex to yield said anti-phase translational motion in said third direction.

18. An inertial sensor comprising:

a proof mass spaced apart from a planar surface of a substrate, said proof mass having a first section and a second section, said first section having a first mass that is greater than a second mass of said second section;

an anchor coupled to said planar surface of said substrate; and

a spring system comprising;

a first spring element;

a rotational beam having a first beam end and a second beam end, said first spring element interconnecting said anchor and a midpoint of said rotational beam, said midpoint being centered between said first and second beam ends;

a second spring element interconnecting said first beam end of said rotational beam and said first section of said proof mass; and

a third spring element interconnecting said second beam end of said rotational beam and said second section said proof mass, wherein;

in response to a first linear acceleration force in a first direction substantially parallel to said planar surface, said spring structure is configured to enable said first and second sections of said proof mass to undergo translational motion in said first direction and in anti-phase relative to one another;

in response to a second acceleration force in a second direction substantially parallel to said planar surface and orthogonal to said first direction, said spring structure is configured to enable said first and second sections of said proof mass to undergo said translational motion in said second direction and in-phase relative to one another; and

in response to a third acceleration force in a third direction normal to said planar surface of said substrate, said spring structure is configured to enable said first and second sections of said proof mass to undergo said translational motion in said third direction and in anti-phase relative to one another.

19. The inertial sensor of claim 18 wherein:

said spring system is said oriented substantially parallel to said planar surface of said substrate;

first, second, and third spring elements are oriented substantially parallel to one another and said first direction of said first linear acceleration force is substantially parallel to a first lengthwise dimension of said first, second, and third spring elements; and

said rotational beam is oriented substantially perpendicular to said first, second, and third spring elements and said second direction of said second acceleration force is substantially parallel to a second lengthwise dimension of said rotational beam, wherein;

in response to said first linear acceleration force, said rotational beam pivots about said midpoint and said first, second, and third spring elements flex to yield said anti-phase translational motion in said first direction;

in response to said second linear acceleration force, said rotational beam refrains from pivoting, and said second and third spring elements flex to yield said in-phase translational motion in said second direction; and

in response to said third acceleration force normal to said planar surface of said substrate, said rotational beam refrains from pivoting and said first, second, and third spring elements flex to yield said anti-phase translational motion in said third direction.

20. The inertial sensor of claim 19 further comprising:

first fixed electrodes coupled to said substrate proximate said first section of said proof mass;

first movable electrodes coupled to said first said proof mass, said first movable electrodes being positioned in alternating arrangement with said first fixed electrodes, said first movable electrodes being movable relative to said first fixed electrodes for detecting said first linear acceleration force in said first direction;

second fixed electrodes coupled to said substrate proximate said second section of said proof mass;

second movable electrodes coupled to said second section of said proof mass, said second movable electrodes being positioned in alternating arrangement with said second fixed electrodes, said second movable electrodes being movable relative to said second fixed electrodes for detecting said second linear acceleration force in said second direction; and

third fixed electrodes formed on said planar surface of said substrate between said substrate and each of said first and second sections of said proof mass for detecting said third acceleration force in said third direction.