Waveguide-to-waveguide couplers with multiple tapers

• US 10,429,582 B1
• Filed: 05/02/2018
• Issued: 10/01/2019
• Est. Priority Date: 05/02/2018
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: GlobalFoundries, Inc.
• Inventors: Bian, Yusheng, Jacob, Ajey Poovannummoottil, Shank, Steven M.
• Primary Examiner(s): Wong, Eric
• Application Number:
  US15/968,997
• Time in Patent Office: 517 Days
• Field of Search: 385 14, 385 43
• CPC Class Codes: G02B 2006/12061 Silicon
• CPC Class Codes: G02B 2006/12107 Grating
• CPC Class Codes: G02B 2006/1215 Splitter
• CPC Class Codes: G02B 2006/12176 Etching
• CPC Class Codes: G02B 6/12002 Three-dimensional structures
• CPC Class Codes: G02B 6/1228 Tapered waveguides, e.g. integrated spot-size transformers for coupling with fibres G02B6/305
• CPC Class Codes: G02B 6/124 Geodesic lenses or integrated gratings
• CPC Class Codes: G02B 6/125 Bends, branchings or intersections
• CPC Class Codes: G02B 6/136 by etching
• CPC Class Codes: G02B 6/2813 based on multimode interference effect, i.e. self-imaging

Abstract

Waveguide-to-waveguide couplers, systems that include waveguide-to-waveguide couplers, and methods of fabricating waveguide-to-waveguide couplers. A first waveguide is coupled to a first waveguide taper, and a second waveguide is coupled to a second waveguide taper. The first waveguide and the first waveguide taper are comprised of silicon, and the second waveguide and the second waveguide taper are comprised of silicon nitride. The second waveguide and the second waveguide taper are arranged in a vertical direction over the first waveguide and the first waveguide taper.

Claims

1. A structure for a waveguide-to-waveguide coupler, the structure comprising:

a first waveguide taper;

a first waveguide coupled to the first waveguide taper, the first waveguide and the first waveguide taper having a first arrangement in which the first waveguide terminates the first arrangement;

a second waveguide taper; and

a second waveguide coupled to the second waveguide taper, the second waveguide and the second waveguide taper having a second arrangement in which the second waveguide terminates the second arrangement,

wherein the first waveguide and the first waveguide taper are comprised of silicon, the second waveguide and the second waveguide taper are comprised of silicon nitride, the second waveguide is arranged in a vertical direction directly and primarily over the first waveguide taper, and the second waveguide taper is arranged in the vertical direction directly and primarily over the first waveguide.

2. The structure of claim 1 further comprising:

a plurality of dielectric layers arranged in a layer stack in the vertical direction between the first waveguide taper and the second waveguide taper.

3. The structure of claim 2 wherein the plurality of dielectric layers in the layer stack includes a first silicon dioxide layer, a second silicon dioxide layer, and a silicon nitride layer arranged in the vertical direction between the first silicon dioxide layer and the second silicon dioxide layer.

4. The structure of claim 1 wherein the first waveguide taper has a first length and tapers along the first length from a first end having a first width to a second end having a second width, the second waveguide taper has a second length and tapers along the second length from a first end having a first width to a second end having a second width, and the second end of the first waveguide taper is adjacent to the second end of the second waveguide taper.

5. The structure of claim 1 wherein the first waveguide taper has a first length and tapers along the first length from a first end having a first width to a second end having a second width, the second waveguide taper has a second length and tapers along the second length from a first end having a first width to a second end having a second width, and the first end of the first waveguide taper is adjacent to the first end of the second waveguide taper.

6. The structure of claim 1 wherein the first waveguide taper is tapered in a first direction and the second waveguide taper is tapered in a second direction opposite to the first direction.

7. The structure of claim 6 wherein the first waveguide taper has a first length and a first width that narrows along the first length, the second waveguide taper has a second length and a second width that narrows along the second length, and the first width at any position along the first length is less than the second width at any position along the second length.

8. The structure of claim 1 further comprising:

an interlayer dielectric layer over the second waveguide taper, the interlayer dielectric layer having a refractive index in a mid-infrared wavelength range that is less than a refractive index of silicon dioxide.

9. The structure of claim 1 further comprising:

an interlayer dielectric layer over the second waveguide taper and the second waveguide, the interlayer dielectric layer having a refractive index in a mid-infrared wavelength range that is less than a refractive index of silicon dioxide.

17. The structure of claim 1 wherein the first waveguide has a first length and a first width that is constant over the first length, and the second waveguide has a second length and a second width that is constant over the second length.

10. A system comprising:

an input grating coupler;

a first plurality of optical components comprised of silicon nitride;

a second plurality of optical components comprised of silicon nitride;

a multimode interference splitter arranged to couple with the input grating coupler with the first plurality of optical components and with the second plurality of optical components; and

a first waveguide-to-waveguide coupler arranged in a first optical path between the input grating coupler and the multimode interference splitter or in a second optical path that includes the first plurality of optical components, the first waveguide-to-waveguide coupler including a first waveguide taper, a first waveguide coupled to the first waveguide taper, a second waveguide, and a second waveguide taper coupled to the second waveguide, the first waveguide and the first waveguide taper of the first waveguide-to-waveguide coupler comprised of single-crystal silicon, the first waveguide and the first waveguide taper of the first waveguide-to-waveguide coupler having a first arrangement in which the first waveguide terminates the first arrangement, the second waveguide and the second waveguide taper of the first waveguide-to-waveguide coupler having a second arrangement in which the second waveguide terminates the second arrangement, the second waveguide and the second waveguide taper of the first waveguide-to-waveguide coupler comprised of silicon nitride, the second waveguide of the first waveguide-to-waveguide coupler arranged in a vertical direction directly and primarily over the first waveguide taper of the first waveguide-to-waveguide coupler, and the second waveguide taper of the first waveguide-to-waveguide coupler arranged in the vertical direction directly and primarily over the first waveguide of the first waveguide-to-waveguide coupler.

11. The system of claim 10 wherein the first waveguide-to-waveguide coupler is arranged in the first optical path between the input grating coupler and the multimode interference splitter, and further comprising:

a second waveguide-to-waveguide coupler arranged in the second optical path between the multimode interference splitter and the first plurality of optical components, the second waveguide-to-waveguide coupler including a first waveguide taper comprised of single-crystal silicon and a second waveguide taper comprised of silicon nitride, and the second waveguide taper of the second waveguide-to-waveguide coupler arranged in the vertical direction over the first waveguide taper of the first waveguide-to-waveguide coupler.

12. The system of claim 10 wherein the first waveguide-to-waveguide coupler is arranged in the first optical path between the input grating coupler and the multimode interference splitter, and the multimode interference splitter is comprised of silicon nitride.

13. The system of claim 10 wherein the first waveguide-to-waveguide coupler is arranged in the second optical path between the multimode interference splitter and the first plurality of optical components, and the multimode interference splitter is comprised of single-crystal silicon.

14. The system of claim 10 further comprising:

an output grating coupler,

wherein the first waveguide-to-waveguide coupler is arranged in the second optical path between the multimode interference splitter and the output grating coupler.

18. The system of claim 10 wherein the first waveguide has a first length and a first width that is constant over the first length, and the second waveguide has a second length and a second width that is constant over the second length.

15. A method of forming a waveguide-to-waveguide coupler, the method comprising:

patterning a semiconductor layer to form a first waveguide taper and a first waveguide coupled to the first waveguide taper;

depositing a dielectric layer over the first waveguide taper and the first waveguide; and

patterning the dielectric layer to form a second waveguide taper and a second waveguide coupled to the second waveguide taper,

wherein the first waveguide and the first waveguide taper have a first arrangement in which the first waveguide terminates the first arrangement, the second waveguide and the second waveguide taper have a second arrangement in which the second waveguide terminates the second arrangement the semiconductor layer is comprised of silicon, the dielectric layer is comprised of silicon nitride, the second waveguide is arranged in a vertical direction directly and primarily over the first waveguide taper, and the second waveguide taper is arranged in the vertical direction directly and primarily over the first waveguide.

16. The method of claim 15 further comprising:

forming a layer stack arranged in the vertical direction between the first waveguide taper and the second waveguide taper,

wherein the layer stack includes a first silicon dioxide layer, a second silicon dioxide layer, and a silicon nitride layer arranged in the vertical direction between the first silicon dioxide layer and the second silicon dioxide layer.

19. The method of claim 15 wherein the first waveguide has a first length and a first width that is constant over the first length, and the second waveguide has a second length and a second width that is constant over the second length.