Optical mask plate and laser lift-off device
First Claim
1. An optical mask plate for a laser lift-off device, comprising at least one totally-transmissive region and a blocking region surrounding the totally-transmissive region, wherein the totally-transmissive region allows a laser beam having a predetermined wavelength to completely pass therethrough, while the blocking region does not allow the laser beam having the predetermined wavelength to pass therethrough, wherein the optical mask plate further comprises at least one transition region, each of which is located between the totally-transmissive region and the blocking region and allows a part of the laser beam having the predetermined wavelength to pass therethrough, each of the at least one totally-transmissive region is surrounded by one of the at least one transition region, a plurality of second through holes, each having a diameter between 10 and 100 micrometers, are formed in each transition region, and within each transition region, the number of the second through holes in a unit area decreases gradually in a direction from an edge adjacent to the totally-transmissive region to an edge adjacent to the blocking region.
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Abstract
The present invention provides an optical mask plate and a laser lift-off device. The optical mask plate comprises at least one totally-transmissive region and a blocking region surrounding the totally-transmissive region. The totally-transmissive region allows lasers having a predetermined wavelength to completely pass therethrough, while the blocking region does not allow the lasers having the predetermined wavelength to pass therethrough. The laser lift-off device comprises the optical mask plate. During the whole process of scanning a rigid substrate with the laser beam, as a laser emitter for emitting the laser beam can be in an on state all the time, the energy of the laser beam is nearly uniform in the process of scanning the rigid substrate with the laser beam, and in this way, edge portions of a flexible device can be prevented from being burned by the laser beam.
33 Citations
18 Claims
- 1. An optical mask plate for a laser lift-off device, comprising at least one totally-transmissive region and a blocking region surrounding the totally-transmissive region, wherein the totally-transmissive region allows a laser beam having a predetermined wavelength to completely pass therethrough, while the blocking region does not allow the laser beam having the predetermined wavelength to pass therethrough, wherein the optical mask plate further comprises at least one transition region, each of which is located between the totally-transmissive region and the blocking region and allows a part of the laser beam having the predetermined wavelength to pass therethrough, each of the at least one totally-transmissive region is surrounded by one of the at least one transition region, a plurality of second through holes, each having a diameter between 10 and 100 micrometers, are formed in each transition region, and within each transition region, the number of the second through holes in a unit area decreases gradually in a direction from an edge adjacent to the totally-transmissive region to an edge adjacent to the blocking region.
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15. A method for lifting off a flexible member from a rigid substrate by using an optical mask plate, the optical mask plate comprising at least one totally-transmissive region and a blocking region surrounding the totally-transmissive region, wherein the totally-transmissive region allows a laser beam having a predetermined wavelength to completely pass therethrough, while the blocking region does not allow the laser beam having the predetermined wavelength to pass therethrough, wherein the optical mask plate further comprises at least one transition region, each of which is located between the totally-transmissive region and the blocking region and allows a part of the laser beam having the predetermined wavelength to pass therethrough, and each of the at least one totally-transmissive region is surrounded by one of the at least one transition region, a plurality of second through holes, each having a diameter between 10 and 100 micrometers, are formed in each transition region, and within each transition region, the number of the second through holes in a unit area decreases gradually in a direction from an edge adjacent to the totally-transmissive region to an edge adjacent to the blocking region;
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the flexible member comprising at least one flexible device and a cutoff region surrounding the flexible device; and the method comprising; aligning the optical mask plate with the flexible member such that the totally-transmissive region of the optical mask plate is aligned with the flexible device, and the cutoff region is correspondingly aligned with the blocking region of the optical mask plate; and scanning the rigid substrate with the laser beam. - View Dependent Claims (16, 17, 18)
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Specification