Optical measuring device

• US 10,436,636 B2
• Filed: 10/12/2018
• Issued: 10/08/2019
• Est. Priority Date: 10/12/2017
• Status: Active Grant

• Current Assignee: Chroma ATE Incorporated
• Original Assignee: Chroma ATE Incorporated
• Inventors: Chang, Wei-Yao
• Primary Examiner(s): Nguyen, Sang H
• Application Number:
  US16/158,319
• Publication Number:
  US 20190113384A1
• Time in Patent Office: 361 Days
• CPC Class Codes: G01J 1/0411 using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
• CPC Class Codes: G01J 1/0414 using plane or convex mirrors, parallel phase plates, or plane beam-splitters
• CPC Class Codes: G01J 1/0422 using light concentrators, collectors or condensers
• CPC Class Codes: G01J 1/4228 arrangements with two or more detectors, e.g. for sensitivity compensation
• CPC Class Codes: G01J 1/4257 applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam monitoring arrangements for lasers in general H01S3/0014

Abstract

An optical measuring device is configured to measure a light beam emitted from a light source. The optical measuring device includes a light collecting element, at least four light-sensing elements, a light splitting device, and at least one lens. The light collecting element is configured to collect the light beam. The light-sensing elements are configured to respectively sense the light fields of different light paths of the light beam. The respective distances of the light paths between the respective light-sensing elements and the light source are different from each other. The light splitting device is configured to split the light beam passing through the light collecting element and respectively guide the split light beams to the light sensing elements. The lens is disposed between at least one of the light-sensing elements and the light collecting element, and is configured to form images on the at least four light-sensing elements.

Claims

1. An optical measuring device for measuring a light beam emitted from a light source, comprising:

a light collecting element configured to collect the light beam;

at least four light-sensing elements configured to respectfully sense light fields of different light paths of the light beam, wherein distances of the light paths between the light-sensing elements and the light source are different from each other, three of the light-sensing elements are disposed within Rayleigh length of an imaging side after the light beam passes through the light collecting element and the lens, and one of the light-sensing elements is disposed outside Rayleigh length of an imaging side after the light beam passes through the light collecting element and the lens;

a light splitting device configured to split the light beam passing through the light collecting element into split light beams, and respectively guide the split light beams to the light-sensing elements; and

at least one lens disposed between at least one of the light-sensing elements and the light collecting element, wherein the lens is configured to image the light beam passing through the light collecting element on the at least four light-sensing elements;

wherein the optical measuring device calculates optical parameters of the light beam based on measurement data of the light-sensing elements.

2. The optical measuring device of claim 1, wherein the light-sensing elements comprise a first light-sensing element, a second light-sensing element, a third light-sensing element, and a fourth light-sensing element, and the light splitting device comprises:

a first light splitting device configured to split the light beam passing through the light collecting element into a first sub-light beam and a second sub-light beam;

a second light splitting device configured to split the first sub-light beam into a third sub-light beam and a fourth sub-light beam, and respectively guide the third sub-light beam and the fourth sub-light beam to the first light-sensing element and the second light-sensing element; and

a third light splitting device configured to split the second sub-light beam into a fifth sub-light beam and a sixth sub-light beam, and respectively guide the fifth sub-light beam and the sixth sub-light beam to the third light-sensing element and the fourth light-sensing element.

3. The optical measuring device of claim 2, wherein the second light splitting element and the third light splitting element are respectively located on different sides of the first light splitting element.

4. The optical measuring device of claim 1, wherein the at least four light-sensing elements comprises a first light-sensing element, a second light-sensing element, a third light-sensing element, and a fourth light-sensing element, and the light splitting device comprises:

a first light splitting element configured to split the light beam passing through the light collecting element into a first sub-light beam and a second sub-light beam, and guide the first sub-light beam to the first light-sensing element;

a second light splitting element configured to split the second sub-light beam into a third sub-light beam and a fourth sub-light beam, and guide the third sub-light beam to the second light-sensing element; and

a third light splitting element configured to split the fourth sub-light beam into a fifth sub-light beam and a sixth sub-light beam, and respectively guide the fifth sub-light beam and the sixth sub-light beam to the third light-sensing element and the fourth light-sensing element.

5. The optical measuring device of claim 4, wherein the first light splitting element, the second light splitting element, and the third light splitting element are arranged along a straight line.

6. The optical measuring device of claim 1, wherein the lens is disposed between the light splitting device and the light collecting element.

7. The optical measuring device of claim 1, wherein a number of the lens is plural, and a plurality of lenses are respectively disposed between the light splitting device and the light-sensing elements.

8. The optical measuring device of claim 7, wherein distances of respective light paths between respective the lenses and the light collecting element are same.

9. The optical measuring device of claim 1, wherein the light collecting element is a collimating element collimating the light beam into parallel light.