Micro-electro-mechanical acceleration sensor device

• US 10,436,812 B2
• Filed: 12/28/2015
• Issued: 10/08/2019
• Est. Priority Date: 03/20/2015
• Status: Active Grant

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Inventors: Enjalbert, Jerome Romain
• Primary Examiner(s): Chapman, Jr., John E
• Application Number:
  US14/980,735
• Publication Number:
  US 20160274141A1
• Time in Patent Office: 1,380 Days
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

A MEMS acceleration device for measurement of the acceleration along three axes. The device includes capacitors, which capacitance changes under the influence of an acceleration acting upon the device. The change of capacitance for acceleration parallel to the substrate are, normally used with distinct capacitors. This device combines capacitors for using the change in capacitance for sensing in two independent and different directions parallel to the substrate thereby reusing the capacitor. Thereby allowing shrinking of the device while maintaining substantially the same sensitivity.

Claims

1. A micro-electro-mechanical acceleration sensor device, the device comprising:

a substrate having a substrate plane, a first substrate surface, and a second substrate surface, the first and second substrate surfaces being perpendicular to the substrate plane, and the first substrate surface being parallel to the second substrate surface;

one or more suspension anchors formed on the substrate; and

a movable body having a first movable body surface and a second movable body surface, the movable body being interconnected with the substrate via the one or more suspension anchors and compliant members, the movable body having a first reference axis that coincides with a first centerline of the movable body, the first movable body surface being parallel to the second movable body surface, the first movable body surface being on a side of the first reference axis opposite to the second movable body surface;

wherein the first substrate surface and the first movable body surface are configured to constitute a first capacitor having a first capacitance, and the second substrate surface and the second movable body surface are configured to constitute a second capacitor having a second capacitance;

wherein the movable body is configured to undergo a first displacement relative to the substrate plane in response to a first acceleration, the first acceleration being parallel to the first reference axis, the first displacement changing the first capacitance and the second capacitance with a common polarity, and wherein the movable body is configured to undergo a second displacement in response to a second acceleration that is perpendicular to the first reference axis and that is parallel to the first substrate surface, the second displacement changing the first capacitance and the second capacitance with opposite polarities, wherein the first displacement is a translation parallel to the first reference axis and the second displacement is a translation perpendicular to the first reference axis and parallel to the substrate plane.

2. The device according to claim 1,

wherein the substrate has a third substrate surface and a fourth substrate surface, the third and fourth substrate surfaces being parallel to the substrate plane;

wherein the movable body has a second reference axis that coincides with a second centerline of the movable body perpendicular to the first reference axis, the movable body has a third movable body surface and a fourth movable body surface, the third movable body surface being parallel to the fourth movable body surface, the third movable body surface being on a side of the second reference axis opposite to the fourth movable body surface;

wherein the third substrate surface and the third movable body surface are configured to constitute a third capacitor having a third capacitance, and the fourth substrate surface and the fourth movable body surface are configured to constitute a fourth capacitor having a fourth capacitance;

wherein the movable body is configured to undergo a third displacement relative to the substrate in response to a third acceleration, the third acceleration being perpendicular to the first and second accelerations, the third displacement changing the third capacitance and the fourth capacitance with opposite polarities.

3. The device according to claim 2, wherein, when the movable body is not subjected to the first and second accelerations, the first capacitance and the second capacitance are configured to be equal.

4. The device according to claim 3, wherein, when the movable body is not subjected to the third acceleration, the third capacitance and the fourth capacitance are configured to be equal.

5. The device according to claim 1, wherein the movable body surfaces are electrically coupled.

6. A method for measuring acceleration using a system comprising a sensor device, the method comprising:

selecting a first excitation surface from a group of a first substrate surface of a substrate and a first movable body surface of a movable body, thereby defining the other surface as a first sensing surface, wherein the sensor device comprises a substrate having the first substrate surface and a second substrate surface parallel to the first substrate surface, and a movable body having the first movable body surface and a second movable body surface parallel to the first movable body surface, the movable body being interconnected with the substrate via one or more suspension anchors and compliant members, the movable body having a first reference axis that coincides with a first centerline of the movable body, the first movable body surface being on a side of the first reference axis opposite to the second movable body surface;

selecting a second excitation surface as the second substrate surface in case the first substrate surface is selected as the first excitation surface or as the second movable body surface in case the first movable body surface is selected as the first excitation surface and thereby defining the other surface as a second sensing surface;

placing, at a first time, the first and second excitation surfaces at a reference voltage;

exciting, at a second time, the first and second excitation surfaces with a first excitation voltage;

measuring a first charge change from the first sensing surface, and a second charge change from the second sensing surface from said placing at the first time to said exciting at the second time;

detecting a first acceleration when the first and second charge changes have a common polarity, the first acceleration being parallel to the first reference axis;

exciting, at a third time, the first excitation surface with a second excitation voltage and the second excitation surface with a third excitation voltage, the third excitation voltage being on an opposite side of the reference voltage compared to the second excitation voltage; and

measuring a third charge change from the first sensing surface, and a fourth charge change from the second sensing surface from said placing at the first time to said exciting at the third time; and

detecting a second acceleration when the third and fourth charge changes have opposite polarities, the second acceleration being perpendicular to first reference axis and parallel to the substrate surface

wherein the movable body is configured to undergo a first displacement relative to the substrate plane, in response to the first acceleration, and the movable body is configured to undergo a second displacement in response to the second acceleration, wherein the first displacement is a translation parallel to the first reference axis, the second displacement is a rotation parallel to the substrate plane, and a pivot axis of said rotation is perpendicular to the substrate.

7. The method according to claim 6, wherein the excitation surfaces are placed at the reference voltage prior to the second excitation.

8. The method according to claim 6, wherein the first excitation voltage and the second excitation voltage are equal.

9. The method according to claim 6, wherein the movable body has a centre of mass placed at a distance from the pivot axis.

10. The method according to claim 6, wherein, when the movable body is not subjected to the first and second accelerations, the first capacitance and the second capacitance are configured to be equal.

11. A method for measuring acceleration using a system comprising a sensor device, the method comprising:

selecting a first excitation surface from a group of a first substrate surface of a substrate and a first movable body surface of a movable body, thereby defining the other surface as a first sensing surface, wherein the sensor device comprises a substrate having the first substrate surface and a second substrate surface parallel to the first substrate surface, and a movable body having the first movable body surface and a second movable body surface parallel to the first movable body surface, the movable body being interconnected with the substrate via one or more suspension anchors and compliant members, the movable body having a first reference axis that coincides with a first centerline of the movable body, the first movable body surface being on a side of the first reference axis opposite to the second movable body surface;

selecting a second excitation surface as the second substrate surface in case the first substrate surface is selected as the first excitation surface or as the second movable body surface in case the first movable body surface is selected as the first excitation surface and thereby defining the other surface as a second sensing surface;

placing, at a first time, the first and second excitation surfaces at a reference voltage;

exciting, at a second time, the first and second excitation surfaces with a first excitation voltage;

measuring a first charge change from the first sensing surface, and a second charge change from the second sensing surface from said placing at the first time to said exciting at the second time;

detecting a first acceleration when the first and second charge changes have a common polarity, the first acceleration being parallel to the first reference axis;

exciting, at a third time, the first excitation surface with a second excitation voltage and the second excitation surface with a third excitation voltage, the third excitation voltage being on an opposite side of the reference voltage compared to the second excitation voltage;

measuring a third charge change from the first sensing surface, and a fourth charge change from the second sensing surface from said placing at the first time to said exciting at the third time;

detecting a second acceleration when the third and fourth charge changes have opposite polarities, the second acceleration being perpendicular to first reference axis and parallel to the substrate surface;

wherein the movable body is configured to undergo a first displacement relative to the substrate plane, in response to the first acceleration, and wherein the movable body is configured to undergo a second displacement in response to the second acceleration, and wherein;

the substrate further has a third substrate surface and a fourth substrate surface, the third and fourth substrate surfaces being parallel to the substrate plane;

the movable body has a second reference axis that coincides with a second centerline of the movable body perpendicular to the first reference axis;

the movable body has a third movable body surface and a fourth movable body surface, the third movable body surface being parallel to the fourth movable body surface, the third movable body surface being on a side of the second reference axis opposite to the fourth movable body surface; and

the method further comprises;

selecting a third and a fourth excitation surface being respectively the third and fourth substrate surfaces in case the first substrate surface is selected as the first excitation surface or otherwise the third and fourth movable body surfaces and thereby defining the other surfaces as respectively a third and a fourth sensing surface, wherein the third substrate surface and the third movable body surface are configured to constitute a third capacitor having a third capacitance, and the fourth substrate surface and the fourth movable body surface are configured to constitute a fourth capacitor having a fourth capacitance;

placing, at the first time, the third and fourth excitation surfaces at the reference voltage;

exciting, at the first time, the third and fourth excitation surface with a fourth excitation voltage opposite to the first excitation voltage compared to the reference voltage;

exciting, at the third time, the third excitation surface with a fifth excitation voltage on an opposite side of the reference voltage compared to the second excitation voltage and the fourth excitation surface with a sixth excitation voltage on a same side of the reference voltage compared to the second excitation voltage;

measuring a fifth charge change from the third sensing surface, and a sixth charge change from the fourth sensing surface from said placing at the first time to said exciting at the third time; and

detecting a third acceleration when the fifth and sixth charge changes have opposite polarities, the third acceleration being perpendicular to the substrate surface.

12. A method for measuring acceleration using a system comprising a sensor device, the method comprising:

selecting a first excitation surface from a group of a first substrate surface of a substrate and a first movable body surface of a movable body, thereby defining the other surface as a first sensing surface, wherein the sensor device comprises a substrate having the first substrate surface and a second substrate surface parallel to the first substrate surface, and a movable body having the first movable body surface and a second movable body surface parallel to the first movable body surface, the movable body being interconnected with the substrate via one or more suspension anchors and compliant members, the movable body having a first reference axis that coincides with a first centerline of the movable body, the first movable body surface being on a side of the first reference axis opposite to the second movable body surface;

selecting a second excitation surface as the second substrate surface in case the first substrate surface is selected as the first excitation surface or as the second movable body surface in case the first movable body surface is selected as the first excitation surface and thereby defining the other surface as a second sensing surface;

placing, at a first time, the first and second excitation surfaces at a reference voltage;

exciting, at a second time, the first and second excitation surfaces with a first excitation voltage;

measuring a first charge change from the first sensing surface, and a second charge change from the second sensing surface from said placing at the first time to said exciting at the second time;

detecting a first acceleration when the first and second charge changes have a common polarity, the first acceleration being parallel to the first reference axis;

exciting, at a third time, the first excitation surface with a second excitation voltage and the second excitation surface with a third excitation voltage, the third excitation voltage being on an opposite side of the reference voltage compared to the second excitation voltage; and

measuring a third charge change from the first sensing surface, and a fourth charge change from the second sensing surface from said placing at the first time to said exciting at the third time; and

detecting a second acceleration when the third and fourth charge changes have opposite polarities, the second acceleration being perpendicular to first reference axis and parallel to the substrate surface

wherein the movable body is configured to undergo a first displacement relative to the substrate plane, in response to the first acceleration, and the movable body is configured to undergo a second displacement in response to the second acceleration, and wherein the first displacement is a translation parallel to the first reference axis and the second displacement is a translation perpendicular to the first reference axis and parallel to the substrate plane.