Frequency compensated oscillator design for process tolerances
First Claim
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1. A resonator comprising:
- a substrate;
an anchor;
a mass element having an effective mass m; and
a spring beam;
wherein;
the spring beam is movably suspended over the substrate;
a first end of the spring beam is attached to the anchor, which anchors the spring beam, at the first end, to the substrate;
a second end of the spring beam is attached to the mass element;
the spring beam has an actual width that is defined by a process used to form the spring beam from a first constituent material and to form the mass element;
an effective mechanical stiffness ky that defines a limitation on the movability of the spring beam is defined as
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Abstract
A continuous or distributed resonator geometry is defined such that the fabrication process used to form a spring mechanism also forms an effective mass of the resonator structure. Proportional design of the spring mechanism and/or mass element geometries in relation to the fabrication process allows for compensation of process-tolerance-induced fabrication variances. As a result, a resonator having increased frequency accuracy is achieved.
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Citations
18 Claims
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1. A resonator comprising:
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a substrate; an anchor; a mass element having an effective mass m; and a spring beam; wherein; the spring beam is movably suspended over the substrate; a first end of the spring beam is attached to the anchor, which anchors the spring beam, at the first end, to the substrate; a second end of the spring beam is attached to the mass element; the spring beam has an actual width that is defined by a process used to form the spring beam from a first constituent material and to form the mass element; an effective mechanical stiffness ky that defines a limitation on the movability of the spring beam is defined as - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification