Coupling mechanism, substrate polishing apparatus, method of determining position of rotational center of coupling mechanism, program of determining position of rotational center of coupling mechanism, method of determining maximum pressing load of rotating body, and program of determining maximum pressing load of rotating body

• US 10,442,054 B2
• Filed: 11/16/2017
• Issued: 10/15/2019
• Est. Priority Date: 01/30/2015
• Status: Active Grant

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation
• Inventors: Shinozaki, Hiroyuki
• Primary Examiner(s): Nguyen, George B
• Application Number:
  US15/815,431
• Publication Number:
  US 20180071885A1
• Time in Patent Office: 698 Days
• Field of Search: 451443, 745724, 745731, 7457311, 7457312, 7457313, 745742, 745743, 745744
• CPC Class Codes: B24B 27/0084 the grinding wheel support being angularly adjustable
• CPC Class Codes: B24B 37/005 Control means for lapping machines or devices
• CPC Class Codes: B24B 37/105 the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
• CPC Class Codes: B24B 53/017 Devices or means for dressing, cleaning or otherwise conditioning lapping tools
• CPC Class Codes: B24B 53/12 Dressing tools; Holders therefor
• CPC Class Codes: B24D 7/16 Bushings; Mountings

Abstract

A coupling mechanism which enables a rotating body to follow an undulation of a polishing surface without generating flutter or vibration of the rotating body, and can finely control a load on the rotating body on a polishing surface in a load range which is smaller than the gravity of rotating body is disclosed. The coupling mechanism includes an upper spherical bearing and a lower spherical bearing disposed between a drive shaft and the rotating body. The upper spherical bearing has a first concave contact surface and a second convex contact surface which are in contact with each other, and the lower spherical bearing has a third concave contact surface and a fourth convex contact surface which are in contact with each other. The first concave contact surface and the second convex contact surface are located above the third concave contact surface and the fourth convex contact surface. The first concave contact surface, the second convex contact surface, the third concave contact surface, the fourth convex contact surface are arranged concentrically.

Claims

1. A coupling mechanism for tiltably coupling a rotating body to a drive shaft, comprising:

a damping member disposed between the drive shaft and the rotating body,

wherein the damping member is a damping ring which has an annular shape and is fixed to a lower end of the drive shaft by a fixing member,

the damping ring is attached to both the lower end of the drive shaft and the rotating body so as to be sandwiched between the lower end of the drive shaft and the rotating body, and

the damping member has a Young'"'"'s modulus which is equal to or lower than a Young'"'"'s modulus of the drive shaft, or has a damping coefficient which is higher than a damping coefficient of the drive shaft.

2. The coupling mechanism according to claim 1, wherein the damping ring has the Young'"'"'s modulus in a range of 0.1 GPa to 210 GPa, or has the damping coefficient such that a damping ratio is in a range of 0.1 to 0.8.

3. The coupling mechanism according to claim 1, wherein the damping ring is a rubber bush.

4. A substrate polishing apparatus comprising:

a polishing table for supporting a polishing pad; and

a polishing head configured to press a substrate against the polishing pad,

wherein the polishing head is coupled to a drive shaft through the coupling mechanism according to claim 1.

5. A substrate polishing apparatus comprising:

a polishing table for supporting a polishing pad;

a polishing head configured to press a substrate against the polishing pad; and

a dresser which is pressed against the polishing pad,

wherein the dresser is coupled to a drive shaft through the coupling mechanism according to claim 1.

6. The coupling mechanism according to claim 1, wherein the damping ring has an inner circumferential surface which is in contact with an outer circumferential surface of the lower end of the drive shaft.

7. A substrate polishing apparatus comprising:

a polishing table for supporting a polishing pad;

a polishing head configured to press a substrate against the polishing pad;

a dresser configured to be pressed against the polishing pad; and

a coupling mechanism for tiltably coupling the dresser to a drive shaft,

wherein the coupling mechanism includes a damping member disposed between the drive shaft and the dresser, and

the damping member has a Young'"'"'s modulus which is equal to or lower than a Young'"'"'s modulus of the drive shaft, or has a damping coefficient which is higher than a damping coefficient of the drive shaft.