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System for adjusting the equilibrium temperature of an inductively-heated susceptor

  • US 10,442,120 B2
  • Filed: 01/17/2015
  • Issued: 10/15/2019
  • Est. Priority Date: 11/28/2011
  • Status: Active Grant
First Claim
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1. A system for inductively heating a workpiece, comprising:

  • an induction coil configured to conduct an alternating current and generate a magnetic field in response to the alternating current, the magnetic field having flux lines oriented generally perpendicularly relative to a direction of the alternating current flowing through the induction coil;

    an upper susceptor face sheet and a lower susceptor face sheet inductively heated by the induction coil and configured to have a workpiece positioned therebetween, the upper susceptor face sheet and the lower susceptor face sheet being formed of a ferromagnetic alloy having a Curie temperature and being inductively heatable to an equilibrium temperature approaching the Curie temperature in response to the magnetic field; and

    a current controller coupled to the induction coil and configured to adjust a frequency of the alternating current as a means to shift the equilibrium temperature of the upper susceptor face sheet and/or the lower susceptor face sheet, the current controller being configured, upon attainment of an initial magnetic permeability of the upper susceptor face sheet and the lower susceptor face sheet corresponding to a first equilibrium temperature in the upper susceptor face sheet and the lower susceptor face sheet relative to the Curie temperature, to increase the frequency of the alternating current to cause a reduction in the magnetic permeability of the upper susceptor face sheet and the lower susceptor face sheet resulting in an increase in a concentration of the alternating current to a current density of greater than 1×

    107 amps/meters2 and less than or equal to 4×

    107 amps/meter2 along an outer surface of the upper susceptor face sheet and the lower susceptor face sheet and a corresponding increase in the equilibrium temperature from the first equilibrium temperature of the upper susceptor face sheet and the lower susceptor face sheet to a second equilibrium temperature of the upper susceptor face sheet and the lower susceptor face sheet relative to the Curie temperature.

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