Patterning of high refractive index glasses by plasma etching

• US 10,442,727 B2
• Filed: 01/04/2018
• Issued: 10/15/2019
• Est. Priority Date: 01/05/2017
• Status: Active Grant

• Current Assignee: Magic Leap, Inc.
• Original Assignee: Magic Leap, Inc.
• Inventors: Melli, Mauro, Peroz, Christophe, Singh, Vikramjit
• Primary Examiner(s): Olsen, Allan W.
• Application Number:
  US15/862,078
• Publication Number:
  US 20180186689A1
• Time in Patent Office: 649 Days
• Field of Search: None
• CPC Class Codes: C03C 15/00 Surface treatment of glass, not in the form of fibres or filaments, by etching etching or surface-brightening compositions, in general C09K13/00
• CPC Class Codes: C03C 2218/34 Masking
• CPC Class Codes: C03C 3/097 containing phosphorus, niobium or tantalum
• CPC Class Codes: G02B 27/0172 characterised by optical features
• CPC Class Codes: G02B 27/4205 having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
• CPC Class Codes: G02B 30/26 of the autostereoscopic type
• CPC Class Codes: G02B 5/1857 using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
• CPC Class Codes: G02B 6/0026 Wavelength selective element, sheet or layer, e.g. filter or grating
• CPC Class Codes: G02B 6/0038 Linear indentations or grooves, e.g. arc-shaped grooves or meandering grooves, extending over the full length or width of the light guide
• CPC Class Codes: G02B 6/0076 Stacked arrangements of multiple light guides of the same or different cross-sectional area
• CPC Class Codes: G06F 1/163 Wearable computers, e.g. on a belt
• CPC Class Codes: G06F 3/011 Arrangements for interaction with the human body, e.g. for user immersion in virtual reality blind teaching G09B21/00
• CPC Class Codes: H04N 23/57 Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices

Abstract

Plasma etching processes for forming patterns in high refractive index glass substrates, such as for use as waveguides, are provided herein. The substrates may be formed of glass having a refractive index of greater than or equal to about 1.65 and having less than about 50 wt % SiO₂. The plasma etching processes may include both chemical and physical etching components. In some embodiments, the plasma etching processes can include forming a patterned mask layer on at least a portion of the high refractive index glass substrate and exposing the mask layer and high refractive index glass substrate to a plasma to remove high refractive index glass from the exposed portions of the substrate. Any remaining mask layer is subsequently removed from the high refractive index glass substrate. The removal of the glass forms a desired patterned structure, such as a diffractive grating, in the high refractive index glass substrate.

Claims

1. A method for forming one or more diffractive gratings in a waveguide, the method comprising:

providing a waveguide having a refractive index of greater than or equal to about 1.65, wherein more than 50 wt % of the waveguide is formed of one or more of B₂O₃, Al₂O₃, ZrO₂, Li₂O, Na₂O, K₂O, MgO, CaO, SrO, BaO, ZnO, La₂O₃, Nb₂O₅, TiO₂, HfO, and Sb₂O₃;

providing a mask layer over the waveguide, the mask layer having a pattern corresponding to the one or more diffractive gratings, the pattern selectively exposing portions of the waveguide; and

anisotropically etching the exposed portions of the waveguide to define the one or more diffractive gratings in the waveguide.

2. The method of claim 1, wherein providing a mask layer comprises providing the pattern comprising a first diffraction grating pattern over a first region and a second diffraction grating pattern in the second region of the waveguide, wherein the second region extends over a majority of an area of a surface of the waveguide.

3. The method of claim 2, wherein the first diffraction grating pattern corresponds to an incoupling optical element and the second diffraction grating pattern corresponds to an outcoupling optical element.

4. The method of claim 3, wherein providing a mask layer comprises providing the pattern comprising a third diffraction grating pattern over a third region of the waveguide, wherein the third diffraction grating pattern corresponds to an orthogonal pupil expander configured to redirect light from the incoupling optical element to a top coupling optical element.

5. The method of claim 1, wherein each of the one or more diffractive gratings comprise substantially parallel lines, wherein each line has a critical dimension of less than about 1 micron and an aspect ratio of between about 1:

10 to about 10;

1.

6. The method of claim 5, wherein each line has a critical dimension of less than about 300 nm.

7. The method of claim 5, wherein the mask layer comprises an underlying mask layer and an overlying conformal layer of mask layer material.

8. A plasma etching process for forming features in a high refractive index glass substrate, the process comprising:

providing a patterned mask layer on at least a portion of the high refractive index glass substrate, the substrate formed of glass having a refractive index of greater than or equal to about 1.65 and comprising less than about 50 wt % SiO₂, and

etching the features in the substrate by exposing the mask layer and high refractive index glass substrate to a plasma etch comprising chemical and physical etchant species to selectively remove exposed high refractive index glass from the high refractive index glass substrate.

9. The plasma etching process of claim 8, wherein the high refractive index glass substrate comprises less than about 30 wt % SiO₂.

10. The plasma etching process of claim 8, wherein more than 50 wt % of the high refractive index glass substrate is formed of one or more of B₂O₃, Al₂O₃, ZrO₂, Li₂O, Na₂O, K₂O, MgO, CaO, SrO, BaO, ZnO, La₂O₃, Nb₂O₅, TiO₂, HfO, and Sb₂O₃.

11. The plasma etching process of claim 8, wherein the high refractive index glass substrate has a refractive index of greater than or equal to about 1.70.

12. The plasma etching process of claim 8, wherein exposing the mask layer and high refractive index glass substrate to a plasma etch comprises anisotropically removing high refractive index glass from an exposed surface of the high refractive index glass substrate.

13. The plasma etching process of claim 8, wherein the plasma is produced from a source gas and wherein the plasma is generated in situ in a reaction chamber accommodating the high refractive index glass substrate.

14. The plasma etching process of claim 13, wherein the source gas comprises SF₆ and Ar gas.

15. The plasma etching process of claim 13, wherein the source gas comprises BCl₃, HBr, and Ar gas.

16. The plasma etching process of claim 13, wherein the source gas comprises CF₄, CHF₃, and Ar gas.

17. The plasma etching process of claim 8, wherein the plasma etching process takes place within a reaction chamber of an inductively coupled plasma (ICP) reactor.

18. The plasm etching process of claim 17, wherein the ICP reactor is a dual frequency ICP reactor.

19. The plasma etching process of claim 8, wherein each of the features has a critical dimension of less than about 100 nm.

20. The plasma etching process of claim 19, wherein each of the features has an aspect ratio of between about 1:

10 to about 10;

1.

21. The plasma etching process of claim 19, wherein the features are sized and spaced to form a diffractive grating.

22. The plasma etching process of claim 8, wherein the mask layer comprises a polymeric resist layer.

23. The plasma etching process of claim 8, further comprising removing remaining mask layer from the high refractive index glass substrate after exposing the mask layer and high refractive index glass substrate to the plasma.

24. A process for forming features in a high refractive index glass substrate, the process comprising:

selectively exposing a portion of the high refractive index glass substrate to a plasma in a reaction chamber to selectively remove high refractive index glass from the high refractive index glass substrate;

wherein the high refractive index glass substrate comprises less than about 50 wt % SiO₂ and has a refractive index of greater than or equal to about 1.65.

25. The process of claim 24, wherein the high refractive index glass substrate comprises one or more of B₂O₃, Al₂O₃, ZrO₂, Li₂O, Na₂O, K₂O, MgO, CaO, SrO, BaO, ZnO, La₂O₃, Nb₂O₅, TiO₂, HfO, and Sb₂O₃.

26. The process of claim 24, wherein selectively exposing a portion of the high refractive index glass substrate defines a pattern of protrusions in the substrate, wherein the protrusions form an optical diffraction grating.

27. The process of claim 26, further comprising

depositing a mask layer on the substrate;

patterning the mask layer to define a first set of spaced apart lines in a first region over the substrate, and a second set of spaced part lines in a second region over the substrate,

wherein selectively exposing a portion of the high refractive index glass substrate comprises etching the substrate through the mask layer to form;

a light incoupling diffractive grating in an area of the substrate corresponding to the first region, and

a light outcoupling diffractive grating in an area of the substrate corresponding to the second region.

28. The process of claim 27, wherein patterning the mask layer further defines a third set of spaced apart lines in a third region over the substrate, and

wherein selectively exposing a portion of the high refractive index glass substrate comprises etching the substrate through the mask layer to form an orthogonal pupil expander corresponding to the third region.