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Toroidal plasma processing apparatus with a shaped workpiece holder

  • US 10,443,150 B2
  • Filed: 05/16/2016
  • Issued: 10/15/2019
  • Est. Priority Date: 05/21/2015
  • Status: Active Grant
First Claim
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1. A plasma processing apparatus comprising:

  • a) a toroidal-shape plasma vessel comprising a process chamber;

    b) a magnetic core surrounding a portion of the toroidal-shape plasma vessel;

    c) an RF power supply having an output that is electrically connected to the magnetic core, the RF power supply energizing the magnetic core, thereby forming a toroidal plasma loop discharge in the toroidal-shape plasma vessel;

    d) a workpiece holder comprising at least one face that supports the workpiece during growth; and

    e) a plasma guiding structure being shaped and dimensioned so as to constrain a section of a plasma in the toroidal plasma loop discharge to travel substantially perpendicular to a normal to the at least one face that supports a workpiece during growth.

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