Surface measurement instrument and method

• US 10,444,000 B2
• Filed: 11/01/2010
• Issued: 10/15/2019
• Est. Priority Date: 10/30/2009
• Status: Active Grant

• Current Assignee: Taylor Hobson Limited (Ametek Incorporated)
• Original Assignee: Taylor Hobson Limited (Ametek Incorporated)
• Inventors: Scott, Paul James
• Primary Examiner(s): Park, Hyun D
• Application Number:
  US13/504,214
• Publication Number:
  US 20120278035A1
• Time in Patent Office: 3,270 Days
• CPC Class Codes: G01B 5/20 for measuring contours or curvatures
• CPC Class Codes: G01M 11/025 by determining the shape of the object to be tested measuring contours or curvatures by optical means G01B11/24

Abstract

A method of characterizing the surface of an aspheric diffractive structure includes using a metrological apparatus to perform a measurement on the surface of the structure so as to provide a measurement profile representing the z-direction deviations of the surface of the structure; determining parameters relating to the aspheric and diffractive components of the aspheric diffractive structure; producing data having the determined parameters; and comparing the produced data with the measurement profile to determine residual error data.

Claims

1. A computer implemented method of measuring a characteristic of a surface of an aspheric diffractive structure, the method comprising:

causing a metrological apparatus that includes a measurement probe to perform a measurement operation comprising controlling the measurement probe to contact the surface of the aspheric diffractive structure and to move along a measurement path across the surface of the aspheric diffractive structure the surface having one or more steps,

wherein the characteristic of the surface comprises at least one of;

(i) a step height of the one or more steps; and

(ii) a location of at least one step edge of the one or more steps;

receiving measurement data representing results of the measurement operation and indicating a profile of the aspheric diffractive structure;

fitting by a processor an equation having an aspheric component to the received data;

producing by the processor fitted data based upon the fitted equation;

subtracting by the processor the fitted data from the received data to produce first subtracted data;

subtracting by the processor data representing a polynomial component of a diffractive component of the aspheric diffractive structure from the first subtracted data to produce second subtracted data with a profile having one or more steps corresponding to the surface; and

processing the second subtracted data to determine at least one of;

(i) a location of at least one step edge of one of the one or more steps on the surface of the aspheric diffractive structure; and

(ii) at least one step height of one of the one or more steps on the surface of the aspheric diffractive structure; and

providing output indicating the determination;

wherein the aspheric diffractive structure is one of a lens or a lens mold.

2. The method of claim 1, wherein the identification of the location comprises using an edge detection operator to identify the edges of the steps.

3. The method of claim 2, wherein the identification of the step edge locations comprises convolving the second subtracted data with a filter.

4. The method of claim 3, further comprising segmenting the filtered data.

5. The method of claim 1, wherein the identification of step heights comprises fitting a step function to the second subtraction data.

6. The method of claim 1, wherein the second subtracted data comprises a centre and the method further comprises determining the centre of the second subtraction data by:

calculating average positions between two or more pairs of step edge locations; and

calculating an average of the calculated average positions.

7. The method of claim 1, wherein step of processing the second subtracted data identifies a plurality of step edge locations and corresponding step heights,

the method further comprising fitting a function to points at the identified heights and locations to determine data representing one or more components of the surface

using the fitted function and the identified step edges and locations to produce fitted stepped data;

subtracting the fitted stepped data from the received data to produce further subtracted data; and

fitting the equation having an aspheric component to the further subtracted data to produce fitted aspheric information.

8. The method of claim 7 comprising subtracting the fitted stepped data and the aspheric information from the measurement data produce profile data that represents the non-aspheric components of the workpiece.

9. The method of claim 8 comprising the processor iteratively repeating the fitting and subtracting steps until a determined residual error is below a predetermined threshold.

10. Apparatus including a measurement probe and a processor, the processor being configured to:

cause the measurement probe to perform a measurement operation comprising contacting a surface of an aspheric diffractive structure and moving along a measurement path across the surface of the aspheric diffractive structure for characterising the surface of the aspheric diffractive structure

receive measurement data representing a surface profile of the aspheric diffractive structure, wherein the surface profile is a result of a measurement operation performed by the measurement probe on the surface of the aspheric diffractive structure, the surface having one or more steps;

fit an equation having an aspheric component to the measurement data;

produce fitted data based upon the fitted equation;

subtract the fitted data from the measurement data to produce first subtracted data;

subtract data representing a polynomial component of a diffractive component of the aspheric diffractive structure from the first subtracted data to produce second subtracted data with a profile having one or more steps corresponding to the surface; and

process the second subtracted data to perform a determination of at least one of;

(i) a location of at least one step edge of a step on the surface of the aspheric diffractive structure; and

(ii) at least one step height of a step on the surface of the aspheric diffractive structure; and

provide output indicating the determination.

11. A data processor configured to measure a characteristic of a surface by processing data provided by metrological apparatus having a measurement probe including a stylus tip controlled to contact a surface of a diffractive aspheric workpiece having an aspheric and a diffractive component and to move along a measurement path across the surface of the workpiece for characterising the diffractive aspheric workpiece, the data processor comprising:

a data receiver configured to receive measurement data produced from a measurement operation using the measurement probe;

a data component remover configured to fit an equation representing the aspheric component to the measurement data to produce fitted data and to subtract the fitted data from the measurement data to produce subtracted data having a series of steps; and

a data feature finder configured to produce transformed data from the subtracted data having features on the surface of the diffractive aspheric workpiece at locations in the transformed data that correspond to one or more locations in the subtracted data of the steps, and to identify one or more locations of the features taking into account a polynomial component of the diffractive component of the surface of the diffractive aspheric workpiece, whereby edges of the steps characterise a stepped component of the diffractive component of the surface of the diffractive aspheric workpiece, thereby to perform a determination of at least one of;

(i) a location of at least one step edge of a step on the surface of the aspheric diffractive structure; and

(ii) at least one step height of a step on the surface of the aspheric diffractive structure; and

wherein the data feature finder is further configured to provide output indicating the determination.

12. The data processor of claim 11, wherein the data component remover is further configured to subtract the diffractive polynomial component from the measurement data when the diffractive polynomial component is known.

13. The data processor of claim 11, comprising:

a step height determiner configured to determine, for each of one or more determined locations, a height of a step having a step edge at one of the determined locations; and

,

a polynomial component identifier configured to produce stepped data based on one or more determined step locations and step heights and to fit a polynomial to the stepped data to determine a diffractive polynomial component.

14. The data processor of claim 13, wherein the data component remover is further configured to subtract the diffractive polynomial component determined by the polynomial component identifier.

15. The data processor of claim 11, wherein data processor further comprises:

a data storer configured to store the measurement data received by the data receiver;

a data preconditioner configured to filter the measurement data to remove noise and unwanted variations therefrom;

a data filterer configured to filter the subtracted data received from the data component remover to find features to be identified by the data feature finder;

a step height determiner configured to determine, for each of a plurality of determined locations;

a height of a step having a step edge at one of the plurality of determined locations;

an axis identifier configured to identify an axis of rotational symmetry of the aspheric diffractive workpiece; and

an error calculator configured to calculate a residual error of at least one of the determined locations, step heights and aspheric axis;

an output provider configured to output at least one of the determined locations, step heights and aspheric axis to a data display device; and

a user input receiver configured to receive a user input.

16. The data processor of claim 15, further comprising an edge detector configured to convolve the subtracted data with a Haar filter.

17. The data processor of claim 11, further comprising an edge detector configured to apply an edge detecting operator to the subtracted data.

18. The data processor of claim 11, further comprising an edge detector configured to convolve the subtracted data with a filter.

19. The data processor of claim 11, wherein the features are local maxima or minima.

20. The data processor of claim 11, further comprising an edge detector configured to perform a thresholding operation on the transformed data.

21. The data processor of claim 11, wherein the apparatus is configured to determine, for at least one of the determined locations, a height of the step having a step edge at the at least one determined location.

22. The data processor of claim 21, comprising a step height determiner configured to determine, for each of the determined locations, the height of a step having a step edge at one of the determined locations, and wherein the apparatus is further configured to fit a function to points at the determined heights and locations to determine data representing one or more components of the surface.

23. The data processor of claim 22, wherein the data representing one or more components of the surface includes a diffractive polynomial component.

24. The data processor of claim 22, wherein the step height determiner is configured to fit one or more step functions to the subtracted data.

25. The data processor of claim 24, wherein the apparatus is configured to fit the step function to the subtracted data over a plurality of subsets of the subtracted data and is:

z=A+Bx+δ

where A and B are constants and δ

has a first constant value for a first one of the plurality of subsets occurring before the step edge and a second, different, constant value for a second one of the plurality of subsets occurring after the step edge; and

where z corresponds to a displacement of the stylus tip as the stylus tip moves along the measurement path, x corresponds to the displacement along the measurement path and h corresponds to the step height.

26. The data processor of claim 25, wherein the step height determiner is configured to identify locations in the subtracted data of one or more windows within which the features lie.

27. The data processor of claim 26, wherein the step height determiner is configured to identify locations of valleys or peaks on either side of each feature.

28. The data processor of claim 26, wherein the step height determiner is configured to determine locations in the subtracted data that correspond to the locations of the one or more windows within which the features lie.

29. The data processor of claim 26, wherein the step height determiner is configured to identify at least one of the first and second ones of the plurality of subsets based upon the locations of the windows within which the features lie.

30. The data processor of claim 26, comprising an error calculator configured to:

create reconstructed data having a series of steps the locations of the step edges and the heights of the steps correspond to the determined locations of the step edges and the determined heights; and

,

compare the reconstructed data and the measurement data to determine any differences therebetween.

31. The data processor of claim 11, comprising an axis identifier configured to determine a centre of the subtracted data based upon one or more pairs of the determined locations.

32. The data processor of claim 11, wherein the axis identifier is further configured to determine a centre of the subtracted data by:

calculating average positions between two or more pairs of determined locations; and

calculating an average of the calculated average positions.

33. The data processor of claim 11, wherein the data receiver comprises one or more memory elements of a computing device.

34. The data processor of claim 11, wherein the data component remover is further configured to determine data representing one or more further components of the surface by fitting a function to the measurement data.

35. The data processor of claim 34, wherein the data representing one or more components of the surface includes an aspheric component.

36. A non-transitory storage medium carrying computer readable instructions for causing a processor to execute the steps of:

receiving measurement data representing results of a measurement operation performed using a metrological apparatus that includes a measurement probe controlled to contact the surface of the aspheric diffractive structure and to move along a measurement path across the surface of the aspheric diffractive structure, the measurement operation having been performed on the surface of the aspheric diffractive structure, the surface having one or more steps, wherein the aspheric diffractive structure is a lens;

fitting an equation having an aspheric component to the received data;

producing fitted data based upon the fitted equation;

subtracting the fitted data from the received data to produce first subtracted data;

subtracting data representing a polynomial component of a diffractive component of the aspheric diffractive structure from the first subtracted data to produce second subtracted data having one or more steps;

identifying at least one of;

(i) at least one step edge location; and

(ii) a step height in the second subtracted data; and

determining, based on the at least one step edge location or step height, how well the lens conforms to a design specification.

37. A metrological apparatus for characterising the surface of an aspheric diffractive structure, the apparatus including a measurement probe controlled to contact a surface of an aspheric diffractive structure and to move along a measurement path across the surface of the aspheric diffractive structure, the apparatus further having a processor configured to:

control the measurement probe for performing a measurement operation on the surface of an aspheric diffractive structure;

receive measurement data from the measurement probe, the measurement data representing the results of a measurement operation performed by the measurement probe on the surface of the aspheric diffractive structure;

fit an equation having an aspheric component to the received data;

produce fitted data based upon the fitted equation;

subtract the fitted data from the received data to produce first subtracted data;

subtract data representing a polynomial component of a diffractive component of the aspheric diffractive structure from the first subtracted data to produce second subtracted data having one or more steps; and

process the second subtracted data to provide a determination of a location of at least one of;

(i) at least one step edge of a step on the surface of the aspheric diffractive structure; and

(ii) at least one step height of a step on the surface of the aspheric diffractive structure; and

provide output indicating the determination of the location or the step height.