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MEMS gyroscope with frequency regulation and electrostatic cancellation of the quadrature error

  • US 10,444,013 B2
  • Filed: 03/14/2017
  • Issued: 10/15/2019
  • Est. Priority Date: 08/02/2016
  • Status: Active Grant
First Claim
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1. A MEMS gyroscope, comprising:

  • a supporting structure;

    a mobile mass mobile with respect to the supporting structure in a driving direction and in a sensing direction, the driving direction and the sensing direction being perpendicular to each other, the mobile mass being affected by a quadrature error caused by a quadrature moment;

    a driving structure coupled to the mobile mass and configured to control movement of the mobile mass in the driving direction at a driving frequency, the mobile mass having a variable resonance frequency that differs from the driving frequency by a frequency mismatch;

    motion-sensing electrodes coupled to the mobile mass and configured to detect movement of the mobile mass in the sensing direction; and

    quadrature-compensation electrodes coupled to the mobile mass and configured to generate a compensation moment opposite to the quadrature moment; and

    a compensation controller configured to bias the quadrature-compensation electrodes with at least one compensation voltage that drives the mobile mass at a preset frequency mismatch, wherein the quadrature-compensation electrodes comprise a first quadrature-compensation electrode and a second quadrature-compensation electrode, and the compensation controller is configured to bias the first and second quadrature-compensation electrodes at first and second compensation voltages V1, V2, respectively, where V1 and V2 are chosen for satisfying the equation;

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