Pressure measurement based on electromagnetic signal output of a cavity

• US 10,444,102 B2
• Filed: 09/07/2017
• Issued: 10/15/2019
• Est. Priority Date: 09/07/2017
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Herbsommer, Juan Alejandro, Fruehling, Adam Joseph, Sankaran, Swaminathan, Cook, Benjamin Stassen
• Primary Examiner(s): Ha, Nguyen Q.
• Application Number:
  US15/698,528
• Publication Number:
  US 20190072448A1
• Time in Patent Office: 768 Days
• CPC Class Codes: G01L 11/00 Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00

Abstract

A pressure transducer includes a cavity, dipolar molecules disposed within the cavity, and pressure measurement circuitry. The pressure measurement circuitry is configured to measure a width of an absorption peak of the dipolar molecules, and to determine a value of pressure in the cavity based on the width of the absorption peak.

Claims

1. A pressure transducer, comprising:

a cavity;

dipolar molecules disposed within the cavity;

pressure measurement circuitry configured to;

measure a width of an absorption peak of the dipolar molecules; and

determine a value of pressure in the cavity based on the width of the absorption peak.

2. The pressure transducer of claim 1, wherein the absorption peak is at a frequency of quantum rotational state transition of the dipolar molecules.

3. The pressure transducer of claim 1, further comprising:

a first antenna coupled to the cavity, wherein the first antenna is configured to transmit signal into the cavity; and

a second antenna coupled to the cavity, wherein the second antenna is configured to receive signal from the cavity.

4. The pressure transducer of claim 3, wherein the pressure measurement circuitry is coupled to the second antenna, the pressure measurement circuitry configured to determine a range of frequencies corresponding to the absorption peak.

5. The pressure transducer of claim 4, wherein the pressure measurement circuitry is configured to:

detect a leading edge of the absorption peak;

detect a trailing edge of the absorption peak;

determine the range of frequencies based on a difference in frequency corresponding to the leading edge and frequency corresponding to the trailing edge.

6. The pressure transducer of claim 1, wherein the width of the absorption peak increases with pressure in the cavity.

7. The pressure transducer of claim 4, wherein the pressure measurement circuitry comprises:

a phase-locked loop (PLL) configured to sweep a range of frequencies comprising the absorption peak; and

frequency identification circuitry configured to determine amplitude of signal detected by the second antenna at a plurality of frequencies based on the frequencies swept by the PLL.

8. A method for measuring pressure in a cavity, comprising:

transmitting a signal into the cavity, wherein the cavity contains dipolar molecules;

measuring a width of an absorption peak of the dipolar molecules;

determining a value of pressure in the cavity based on the width of the absorption peak.

9. The method of claim 8, wherein the absorption peak is at a frequency of quantum rotational state transition of the dipolar molecules.

10. The method of claim 8, further comprising:

receiving signal output of from the cavity via a receive antenna coupled to the cavity;

wherein the transmitting comprising driving a transmit antenna coupled to the cavity.

11. The method of claim 8, further comprising processing a signal output from the cavity to determine a range of frequencies corresponding to the absorption peak.

12. The method of claim 11, further comprising:

detecting a leading edge of the absorption peak;

detecting a trailing edge of the absorption peak; and

determining the range of frequencies based on a difference in frequency corresponding to the leading edge and frequency corresponding to the trailing edge.

13. The method of claim 8, further comprising:

generating a sweep of frequencies over a range that includes the absorption peak; and

determining amplitude of signal received from the cavity at a plurality of frequencies based on the sweep of frequencies.

14. A pressure transducer, comprising:

a cavity;

dipolar molecules disposed within the cavity;

pressure measurement circuitry configured to;

identify a frequency of a standing wave in the cavity; and

determine a value of pressure in the cavity based on the frequency of the standing wave.

15. The pressure transducer of claim 14, wherein the frequency of the standing wave is higher than a frequency of an absorption peak of the dipolar molecules.

16. The pressure transducer of claim 14, further comprising:

a first antenna coupled to the cavity, wherein the first antenna is configured to transmit signal into the cavity; and

a second antenna coupled to the cavity, wherein the second antenna is configured to receive signal from the cavity.

17. The pressure transducer of claim 16, wherein the pressure measurement circuitry is coupled to the second antenna, and the pressure measurement circuitry is configured to determine the frequency of the standing wave.

18. The pressure transducer of claim 17, wherein the pressure measurement circuitry is configured to:

detect the absorption peak;

detect a maximum signal amplitude following the absorption peak as corresponding to the frequency of the standing wave.

19. The pressure transducer of claim 14, wherein the pressure measurement circuitry comprises a table that relates pressure in the cavity to the frequency of the standing wave.

20. The pressure transducer of claim 14, wherein the pressure measurement circuitry comprises:

a phase-locked loop (PLL) configured to sweep a range of frequencies comprising the absorption peak and the frequency of the standing wave; and

frequency identification circuitry configured to determine amplitude of signal detected by the second antenna at a plurality of frequencies based on the frequencies swept by the PLL.