Method of testing an object and apparatus for performing the same

• US 10,444,162 B2
• Filed: 03/28/2018
• Issued: 10/15/2019
• Est. Priority Date: 04/03/2017
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Ueyama, Shinji, Kajinami, Masato, Ishimoto, Tatsuya
• Primary Examiner(s): Ton, Tri T
• Application Number:
  US15/938,570
• Publication Number:
  US 20180284032A1
• Time in Patent Office: 566 Days
• Field of Search: 356600-640
• CPC Class Codes: G01B 11/0608 Height gauges
• CPC Class Codes: G01B 11/25 by projecting a pattern, e.g. one or more lines, moiré fringes on the object G01B11/255 takes precedence ; image analysis for depth or shape recovery G06T7/50
• CPC Class Codes: G01B 11/303 using photoelectric detection means
• CPC Class Codes: G01N 2021/8848 Polarisation of light
• CPC Class Codes: G01N 2021/945 Liquid or solid deposits of macroscopic size on surfaces, e.g. drops, films, or clustered contaminants dust particles and microscopic contaminants in G01N21/94
• CPC Class Codes: G01N 21/8806 Specially adapted optical and illumination features
• CPC Class Codes: G01N 21/94 Investigating contamination, e.g. dust G01N21/85 takes precedence
• CPC Class Codes: G01N 21/9505 Wafer internal defects, e.g. microcracks
• CPC Class Codes: G01N 21/95684 Patterns showing highly reflecting parts, e.g. metallic elements
• CPC Class Codes: H01L 21/67288 Monitoring of warpage, curvature, damage, defects or the like
• CPC Class Codes: H01L 21/68764 characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
• CPC Class Codes: H01L 22/12 for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions electrical measurement of diffusions H01L22/14

Abstract

An apparatus for testing an object includes a moving unit configured to hold and move the object. A transmissive illuminating unit includes a light source generating light and a transmissive mask pattern. The transmissive mask pattern includes a first region configured to convert the light generated from the light source into a slit light, and a second region arranged in a movement direction of the object with respect to the first region to partially transmit the light generated from the light source. The transmissive illuminating unit is configured to project a measuring light, which is provided by transmitting the light generated from the light source through the transmissive mask pattern, to the object. A detecting unit is configured to receive a reflected light of the measuring light from the object and to detect a height and surface state of the object based on the reflected light.

Claims

1. An apparatus for testing an object, the apparatus comprising:

a moving stage configured to hold and move the object;

a transmissive illuminating optical system including a light source generating light and a transmissive mask pattern, the transmissive mask pattern including a first region configured to convert the light generated from the light source into a slit light, and a second region arranged in a movement direction of the object with respect to the first region to partially transmit the light generated from the light source, wherein the transmissive illuminating optical system is configured to project a measuring light, which is provided by transmitting the light generated from the light source through the transmissive mask pattern, to the object; and

a detector configured to receive a reflected light of the measuring light from the object and to detect a height and surface state of the object based on the reflected light,

wherein the second region comprises at least two sub-regions having different light transmission characteristics from each other.

2. The apparatus of claim 1, wherein the moving stage is configured to move the object at a constant speed.

3. The apparatus of claim 1, wherein the at least two sub-regions comprise a plurality of sub-regions having different shades of a gray scale or a half-tone.

4. The apparatus of claim 1, wherein the light source comprises a white light source, and the at least two sub-regions comprise a red sub-region, a green sub-region, and a blue sub-region.

5. The apparatus of claim 1, wherein the at least two sub-regions comprise a plurality of sub-regions configured to form a polarizer having different polarizing directions.

6. A method of testing an object, the method using a moving stage, a transmissive illuminating optical system, and a detector, wherein the moving stage is configured to hold and move the object, the transmissive illuminating optical system includes a light source generating light and a transmissive mask pattern, the transmissive mask pattern having a first region configured to convert the light generated from the light source into a slit light, and a second region arranged in a movement direction of the object with respect to the first region to partially transmit the light generated from the light source, wherein the transmissive illuminating optical system is configured to project a measuring light, which is provided by transmitting the light generated from the light source through the transmissive mask pattern, to the object, the method comprising:

acquiring a reflected light of the measuring light from the object using the detector; and

detecting a height and surface state of the object based on the reflected light acquired by the detector,

wherein the second region comprises at least two sub-regions having different light transmission characteristics from each other, wherein the at least two sub-regions are arranged in the movement direction.

7. The method of claim 6, wherein the moving stage is configured to move the object at a constant speed.

8. The method of claim 6, wherein the at least two sub-regions comprise a plurality of sub-regions having different shades of a gray scale or a half-tone.

9. The method of claim 6, wherein the light source comprises a white light source, and the at least two sub-regions comprise a red sub-region, a green sub-region, and a blue sub-region.

10. The method of claim 6, wherein the at least two sub-regions comprise a plurality of sub-regions configured to form a polarizer having different polarizing directions.

11. An apparatus for testing an object, the apparatus comprising:

a moving stage configured to hold and move the object;

a transmissive illuminating optical system including a light source generating light and a transmissive mask pattern, the transmissive mask pattern including a first region configured to convert the light generated from the light source into a slit light, and a second region arranged in a movement direction of the object with respect to the first region to partially transmit the light generated from the light source, wherein the transmissive illuminating optical system is configured to project a measuring light, which is provided by transmitting the light generated from the light source through the transmissive mask pattern, to the object; and

a detector configured to receive a reflected light of the measuring light from the object and to detect a height and surface state of the object based on the reflected light,

wherein the second region of the transmissive mask pattern comprises at least two sub-regions of different colors or of different polarization directions.

12. The apparatus of claim 11, wherein the light source comprises a white light source, and the at least two sub-regions comprise a red sub-region, a green sub-region, and a blue sub-region.

13. The apparatus of claim 11, wherein the at least two sub-regions comprise a plurality of sub-regions configured to form a polarizer having different polarizing directions.

14. The apparatus of claim 11, wherein the moving stage is configured to move the object at a constant speed.