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Object information acquisition method and object information acquisition apparatus

  • US 10,444,164 B2
  • Filed: 06/02/2015
  • Issued: 10/15/2019
  • Est. Priority Date: 06/12/2014
  • Status: Active Grant
First Claim
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1. An object information acquisition method for acquiring information relating to a composition of a detected object from results of a measurement using radiation, the method comprising:

  • a step of acquiring by a computer a result of measuring the detected object using radiation;

    a step of estimating by a computer a chemical composition ratio of the detected object, using an equation that contains a value derived from the measurement result as a constant and contains a value derived from the chemical composition ratio of the detected object as a variable, and then solving the equation; and

    a step of outputting the estimated chemical composition ratio or a physical property value acquired based on the estimated chemical composition ratio as information relating to the composition of the detected object,wherein the value derived from the measurement result includes an absorption characteristic value, which is a value relating to absorption characteristics of the detected object with respect to radiation, and a phase characteristic value, which is a value relating to refraction characteristics of the detected object with respect to radiation, andwherein the step of estimating the chemical composition ratio of the detected object comprises;

    a step of setting a plurality of candidates for the chemical composition ratio, anda step of estimating the chemical composition ratio of the detected object by a procedure in which an approximate solution of the equation is determined from among the plurality of candidates.

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