Evanescent-wave quartz-enhanced photoacoustic sensor with resonator elements

• US 10,444,199 B2
• Filed: 04/10/2017
• Issued: 10/15/2019
• Est. Priority Date: 04/08/2016
• Status: Active Grant

• Current Assignee: Chinese University of Hong Kong
• Original Assignee: Chinese University of Hong Kong
• Inventors: Ren, Wei, Li, Zhili
• Primary Examiner(s): Larkin, Daniel S
• Application Number:
  US15/483,638
• Publication Number:
  US 20170292935A1
• Time in Patent Office: 918 Days
• CPC Class Codes: G01N 2291/021 Gases
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/2425 optoacoustic fluid cells therefor

Abstract

A novel evanescent-wave quartz-enhanced optical microfiber photoacoustic gas sensor is provided for detecting trace amounts of gas. Both fiber-taper based evanescent field and photoacoustic spectroscopy can be used to exploit the merits of both technologies. The use of a fiber half-taper into the tuning fork and microresonator tubes can result in reduced system size, simplified optical alignment, and high sensitivity. The techniques described can be used in chemical, biological and environmental sensing applications.

Claims

1. An evanescent-wave quartz enhanced microfiber photoacoustic detection device with oscillator and micro-resonator elements for detecting trace gas concentrations, the evanescent-wave quartz enhanced microfiber photoacoustic detection device comprising:

a light source tuned to a wavelength corresponding to the optical absorption of a gas to be detected;

an optical fiber;

a fiber-taper to generate an evanescent wave, a coating layer of the fiber-taper being stripped;

a quartz tuning fork having its free arms arranged at the level of the fiber-taper to absorb a mechanical force generated following the optical absorption by the gas, the mechanical force

exciting a piezoelectric mode of the quartz tuning fork and generating an electrical current;

a micro-resonator disposed adjacent to the quartz tuning fork and configured to enhance the mechanical force;

a transimpedance amplifier amplifying a current generated by the quartz tuning fork to determine the concentration of the gas; and

a lock-in amplifier directly connected to the transimpedance amplifier,

wherein the fiber-taper, quartz tuning fork, and micro-resonator are assembled in a sealed gas cell for gas detection.

2. The device of claim 1, wherein the light source is an incident laser guided through the optical fiber into the fiber-taper.

3. The device of claim 2, wherein the fiber-taper is movable with respect to the quartz tuning fork.

4. The device of claim 1, wherein the fiber-taper is fabricated with a diameter of wavelength or subwavelength scale from a single mode fiber using a flame-brushing method.

5. The device of claim 1, wherein the fiber-taper is inserted into the micro-resonator and placed between two prongs of the quartz tuning fork without touching any surfaces.

6. The device of claim 5, wherein the micro-resonator is made of stainless steel and a length of the micro-resonator is set for a first longitudinal mode resonance of the acoustic wave.

7. The device of claim 1, wherein the fiber-taper is inserted into the micro-resonator, and the micro-resonator includes a small hole/slit opening.

8. The device of claim 7, wherein the quartz tuning fork is placed next to the hole/slit opening of the micro-resonator.

9. A method of photoacoustic detection, the method comprising:

providing the device of claim 1;

amplifying a current generated by the quartz tuning fork; and

detecting the current generated by the quartz tuning fork.

10. The method of claim 9, wherein the light source is an incident laser guided through the optical fiber into the fiber-taper.

11. The method of claim 10, wherein the fiber-taper is movable with respect to the quartz tuning fork.

12. The method of claim 9, wherein the fiber-taper is fabricated with a diameter of wavelength or subwavelength scale from a single mode fiber using a flame-brushing method.

13. The method of claim 9, wherein the fiber-taper is inserted into the micro-resonator and placed between two prongs of the quartz tuning fork without touching any surfaces.

14. The method of claim 13, wherein the micro-resonator is made of stainless steel and a length of the micro-resonator is set for a first longitudinal mode resonance of the acoustic wave.

15. The method of claim 9, wherein the fiber-taper is inserted into the micro-resonator, and the micro-resonator includes a small hole/slit opening.

16. The method of claim 15, wherein the quartz tuning fork is placed next to the hole/slit opening of the micro-resonator.