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High-precision magnetic suspension accelerometer

  • US 10,444,257 B2
  • Filed: 02/17/2017
  • Issued: 10/15/2019
  • Est. Priority Date: 02/18/2016
  • Status: Active Grant
First Claim
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1. A magnetic suspension accelerometer, comprising:

  • a magnetically shielded vacuum chamber system;

    an optical coherence displacement detecting system;

    a magnetic suspension control system; and

    a magnetic proof mass,wherein the magnetic proof mass can move along three orthogonal axes,wherein, the magnetically shielded vacuum chamber system comprises a magnetically shielded outer chamber and a systemic inner chamber which is disposed inside the magnetically shielded outer chamber and at vacuum, with the magnetic proof mass disposed inside the systemic inner chamber,wherein the optical coherence displacement detecting system, disposed on the systemic inner chamber, is configured to monitor a position and a posture of the magnetic proof mass in real time by sending an optical signal to the magnetic proof mass and receiving an optical signal reflected back,wherein the magnetic suspension control system, disposed on the systemic inner chamber, is configured to control the position and the posture of the magnetic proof mass in real time to keep the magnetic proof mass continuously levitating in a center of the systemic inner chamber,wherein the optical coherence displacement detecting system comprises a plurality of pairs of interferometer probes with each pair connected to an optical displacement detecting device via an optical fiber,wherein, the optical displacement detecting device is a Michelson or Fabry-Perot displacement detecting device and the interferometer probes are located at different positions inside the systemic inner chamber,wherein a light source sends optical signals to the magnetic proof mass via each pair of the interferometer probes in the optical coherence displacement detecting system and receives optical signals reflected back by the magnetic proof mass, the optical signals containing the information of the position and the posture of the magnetic proof mass,wherein the optical signals are transmitted to the optical displacement detecting device through the optical fiber, and processed according to a principle of optical interference to convert displacements and deflection angles of the magnetic proof mass into changes of interfered light, andwherein, based on measurement results of each pair of the interferometer probes and by a calculation according to a principle of vector addition, the displacement of the magnetic proof mass deviating from the center of the systemic inner chamber, and a rotation angle of the magnetic proof mass rotating about two rotational axes perpendicular to a direction of a magnetic moment, are determined according to a change in displacement of each probe point and fed back to the magnetic suspension control system to control the position and the posture of the magnetic proof mass in real time.

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