Magnetic noise rejection apparatus and magnetic field measurement apparatus

• US 10,444,298 B2
• Filed: 12/22/2016
• Issued: 10/15/2019
• Est. Priority Date: 01/29/2016
• Status: Active Grant

• Current Assignee: Advantest Corporation
• Original Assignee: Advantest Corporation
• Inventors: Hata, Yoshiyuki, Ogata, Yuji, Tanaka, Takeshi, Hayakawa, Toshiaki
• Primary Examiner(s): Zakaria, Akm
• Application Number:
  US15/388,084
• Publication Number:
  US 20170219661A1
• Time in Patent Office: 1,027 Days
• CPC Class Codes: G01R 33/0029 Treating the measured signals, e.g. removing offset or noise
• CPC Class Codes: G01R 33/0041 using feed-back or modulation techniques

Abstract

There is provided a magnetic noise rejection apparatus which includes: a plurality of cancellation coils arranged near a target object; a plurality of magnetic sensors disposed inside the respective cancellation coils; an adder circuit configured to take a sum of outputs of the plurality of magnetic sensors; and a feedback control circuit configured to supply the cancellation coils with such a common feedback drive current that the sum of the outputs of the magnetic sensors is equal to a sum of outputs of the magnetic sensors under a zero magnetic field.

Claims

1. A magnetic noise rejection apparatus comprising:

a plurality of cancellation coils arranged within a common plane near a target object, each cancellation coil being wound about an axis that is substantially perpendicular to the common plane, where the plurality of cancellation coils are connected in series, such that current is induced in a same direction in response to a change in magnetism, and driven by a current from a common drive circuit;

a plurality of magnetic sensors, each magnetic sensor disposed substantially at a center of a respective cancellation coil, the each magnetic sensor being substantially smaller than the respective cancellation coil;

an adder circuit connected to the plurality of magnetic sensors to produce a sum of outputs of the plurality of magnetic sensors; and

a feedback control circuit connected to the adder circuit to supply the plurality of cancellation coils with a common feedback drive current so that the sum becomes equal to a sum of outputs of the plurality of magnetic sensors under a zero magnetic field.

2. The magnetic noise rejection apparatus according to claim 1, wherein

the plurality of magnetic sensors operate by electric power supplied from a common power source.

3. The magnetic noise rejection apparatus according to claim 1, wherein

compensation magnets are provided to the respective magnetic sensors, the compensation magnets compensate for offsets of the respective magnetic sensors.

4. The magnetic noise rejection apparatus according to claim 3, wherein

each of the compensation magnets includes a coil and an adjustment circuit that adjusts a drive current to be supplied to the coil, and all of the adjustment circuits are operated by a drive current from a common power source.

5. The magnetic noise rejection apparatus according to claim 3, wherein

each of the compensation magnets includes a permanent magnet.

6. The magnetic noise rejection apparatus according to claim 1, further comprising:

a second feedback control circuit that moves a variance of a DC magnetic field component of the corresponding cancellation coil based on the output of each magnetic sensor.

7. The magnetic noise rejection apparatus according to claim 1, further comprising:

DC magnetic field compensation coils provided to the respective cancellation coils; and

an individual feedback control circuit that outputs a drive current to each of the DC magnetic field compensation coils based on a result of comparison between an output value of the corresponding magnetic sensor and a predetermined reference value, and that corrects a variance of DC magnetic field components between the magnetic sensors.

8. A magnetic field measurement apparatus comprising:

a plurality of cancellation coils arranged within a common plane near a target object, each cancellation coil being wound about an axis that is substantially perpendicular to the common plane, where the plurality of cancellation coils are connected in series, such that current is induced in a same direction in response to a change in magnetism, and driven by a current from a common drive circuit;

a plurality of magnetic sensors, each magnetic sensor disposed substantially at a center of a respective cancellation coil, each magnetic sensor being substantially smaller than the respective cancellation coil;

an adder circuit connected to the plurality of magnetic sensors to produce a sum of outputs of the plurality of magnetic sensors;

a feedback control circuit connected to the adder circuit to supply the plurality of cancellation coils with a common feedback drive current so that the sum becomes equal to a sum of outputs of the plurality of magnetic sensors under a zero magnetic field; and

a measurement circuit connected to the plurality of magnetic sensors to detect a magnetic field from an inside of the target object based on an output value of each magnetic sensor.

9. A magnetic field measurement apparatus comprising:

a plurality of cancellation coils arranged within a common plane near a target object, each cancellation coil being wound about an axis that is substantially perpendicular to the common plane, where the plurality of cancellation coils are connected in series, such that current is induced in a same direction in response to a change in magnetism, and driven by a current from a common drive circuit;

a plurality of magnetic sensors, each magnetic sensor disposed substantially at a center of a respective cancellation coil, each magnetic sensor being substantially smaller than the respective cancellation coil;

an adder circuit connected to the plurality of magnetic sensors to produce a total value of outputs of the magnetic sensors;

a feedback control circuit connected to the adder circuit to supply the plurality of cancellation coils with a common feedback drive current so that the total value becomes equal to a total value of outputs of plurality of the magnetic sensors under a zero magnetic field; and

a measurement circuit connected to the plurality of magnetic sensors to detect a magnetic field generated from a location away from the target object based on the common feedback drive current of the feedback control circuit.