Magnetic sensor
First Claim
1. A magnetic sensor, comprising:
- a substrate having a first surface;
a first magneto resistive effect element and a second magneto resistive element disposed on the first surface of the substrate, each of the first and second magneto resistive effect elements having a sensitivity axis in a first direction and extending in a second direction perpendicular to the first direction;
a positioning soft magnetic body extending in the second direction and provided for the first and second magneto resistive effect elements without being in contact therewith, the positioning soft magnetic body having;
a first most proximal portion defined with respect to the first magneto resistive effect element, and a second most proximal portion defined with respect to the second magneto resistive effect element;
a first side surface extending from the first most proximal portion in a third direction perpendicular to the first surface, and a second side surface opposed to the first surface, the second surface extending from the second most proximal portion in the third direction; and
a first width along the first direction defined between the first and second side surfaces; and
a pair of first and second soft magnetic bodies extending in the second direction and adjacent to each other in the first direction in a plan view from above the first surface, the first and second magnetic bodies being integrally formed via a connection portion therebetween so as to form an integral soft magnetic body by extending from the connection portion in a respective direction away from the first surface viewed in a cross section perpendicular to the second direction,wherein the integral soft magnetic body is magnetically connected to the positioning soft magnetic body via the connection portion, the positioning soft magnetic body being a separate element independent of the connection portion, the connection portion having a bottom width along the first direction on a side of the positioning soft magnetic body, the first width of the positioning soft magnetic body being greater than the bottom width of the connection portion.
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Accused Products
Abstract
A magnetic sensor including a first magneto resistive effect element located on a first surface of a substrate and having a sensitivity axis in a first direction that is one of in-plane directions of the first surface, a positioning soft magnetic body including a first most proximal portion of which a relative position with respect to the magneto resistive effect element is defined, and provided in a non-contact manner with respect to the first magneto resistive effect element, and a first soft magnetic body and a second soft magnetic body juxtaposed in the first direction and extending in a direction away from the first surface, and each of the first soft magnetic body and the second soft magnetic body is magnetically connected to the positioning soft magnetic body.
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Citations
12 Claims
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1. A magnetic sensor, comprising:
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a substrate having a first surface; a first magneto resistive effect element and a second magneto resistive element disposed on the first surface of the substrate, each of the first and second magneto resistive effect elements having a sensitivity axis in a first direction and extending in a second direction perpendicular to the first direction; a positioning soft magnetic body extending in the second direction and provided for the first and second magneto resistive effect elements without being in contact therewith, the positioning soft magnetic body having; a first most proximal portion defined with respect to the first magneto resistive effect element, and a second most proximal portion defined with respect to the second magneto resistive effect element; a first side surface extending from the first most proximal portion in a third direction perpendicular to the first surface, and a second side surface opposed to the first surface, the second surface extending from the second most proximal portion in the third direction; and a first width along the first direction defined between the first and second side surfaces; and a pair of first and second soft magnetic bodies extending in the second direction and adjacent to each other in the first direction in a plan view from above the first surface, the first and second magnetic bodies being integrally formed via a connection portion therebetween so as to form an integral soft magnetic body by extending from the connection portion in a respective direction away from the first surface viewed in a cross section perpendicular to the second direction, wherein the integral soft magnetic body is magnetically connected to the positioning soft magnetic body via the connection portion, the positioning soft magnetic body being a separate element independent of the connection portion, the connection portion having a bottom width along the first direction on a side of the positioning soft magnetic body, the first width of the positioning soft magnetic body being greater than the bottom width of the connection portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification