Electro-optical device, manufacturing method for electro-optical device, and electronic apparatus

• US 10,444,493 B2
• Filed: 07/22/2015
• Issued: 10/15/2019
• Est. Priority Date: 08/01/2014
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Sugimoto, Yohei
• Primary Examiner(s): Beatty, Collin X
• Application Number:
  US14/805,806
• Publication Number:
  US 20160033760A1
• Time in Patent Office: 1,546 Days
• Field of Search: 3591961-2263
• CPC Class Codes: C30B 25/183 being provided with a buffer layer, e.g. a lattice matching layer
• CPC Class Codes: C30B 25/186 being specially pre-treated by, e.g. chemical or physical means
• CPC Class Codes: C30B 29/02 Elements
• CPC Class Codes: C30B 29/16 Oxides
• CPC Class Codes: C30B 29/38 Nitrides
• CPC Class Codes: C30B 29/68 Crystals with laminate structure, e.g. "superlattices"
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 5/0858 the reflecting layers comprising a single metallic layer with one or more dielectric layers

Abstract

An electro-optical device includes a substrate, a mirror support pillar extending in a direction in which the pillar intersects with a surface of the substrate, and a mirror that is so disposed as to be distanced from the substrate and to be capable of being displaced with respect to the mirror support pillar. The mirror has a reflective metal film, and a reflection enhancing lamination film that covers a portion including a surface and a side surface of the reflective metal film.

Claims

1. An electro-optical device comprising:

a substrate;

a mirror that includes a reflective metal film and is disposed above one surface of the substrate so as to be distanced from the substrate;

a support section that is disposed between the substrate and the mirror, the support section has a portion connected to part of the mirror to support the mirror; and

a reflection enhancing lamination film that includes a first film and a second film, the reflection enhancing lamination film covering and being directly disposed on the mirror from one outer side surface of the mirror to another outer side surface of the mirror across a surface of the mirror on an opposite side to the substrate.

2. The electro-optical device according to claim 1, wherein the second film has a larger refractive index than the first film and is disposed on a side of the first film opposite to the reflective metal film.

3. The electro-optical device according to claim 2, wherein the first film is silicon oxide, and the second film is silicon nitride.

4. The electro-optical device according to claim 1, wherein the reflective metal film is made of aluminum.

5. The electro-optical device according to claim 1, wherein the mirror includes, between the reflective metal film and the substrate, a seed lamination film for aligning crystal plane orientations.

6. The electro-optical device according to claim 5, wherein the seed lamination film is a lamination film including a titanium nitride layer which is disposed between the reflective metal film and the substrate, and a titanium layer which is disposed between the titanium nitride layer and the substrate.

7. The electro-optical device according to claim 6, wherein the seed lamination film includes a silicon oxide layer that contains boron and phosphorus and is disposed between the titanium layer and the substrate.

11. An electronic apparatus comprising the electro-optical device according to claim 1.

12. The electro-optical device according to claim 1, wherein the first film and the second film cover the surface of the mirror on the opposite side to the substrate and the outer side surfaces of the mirror continuously.

13. The electro-optical device according to claim 1, wherein the reflection enhancing lamination film is a reflection increasing lamination film.

14. The electro-optical device according to claim 1, wherein the reflective metal film is a non-oxide metal.

15. The electro-optical device according to claim 1, wherein the reflection enhancing lamination film is disposed so as to directly cover a whole surface of the mirror on the opposite side to the substrate and whole surfaces of the outer side surfaces of the mirror.

16. The electro-optical device according to claim 1, wherein the reflection enhancing lamination film is disposed only on the surface of the mirror on the opposite side to the substrate and on the outer side surfaces of the mirror.

8. A manufacturing method for an electro-optical device comprising:

forming a sacrifice layer on one surface of a substrate;

forming a seed lamination film for aligning crystal plane orientations on the sacrifice layer;

forming a reflective metal film on the seed lamination film;

forming a reflection enhancing lamination film that includes a first film and a second film such that the first film and the second film cover a surface of the reflective metal film on an opposite side to the substrate, at least a part of an outer side surface of the reflective metal film, and at least a part of a side surface of the seed lamination film; and

forming a mirror by removing the sacrifice layer.

9. The manufacturing method for the electro-optical device according to claim 8, wherein the reflective metal film is made of aluminum, and the forming of the reflection enhancing lamination film includes forming a silicon oxide layer on the aluminum layer and forming a silicon nitride layer on the silicon oxide layer.

10. The manufacturing method for the electro-optical device according to claim 8, wherein the forming of the seed lamination film includes forming a silicon oxide layer containing boron and phosphorus on the sacrifice layer, forming a titanium layer on the silicon oxide layer containing boron and phosphorus, and forming a titanium nitride layer on the titanium layer.

17. An electro-optical device comprising:

a substrate;

a mirror that includes a reflective metal film and is disposed above one surface of the substrate so as to be distanced from the substrate;

a support section that is disposed between the substrate and the mirror, the support section has a portion connected to part of the mirror to support the mirror; and

a reflection enhancing lamination film that is disposed so as to cover and be directly disposed on the mirror from one outer side surface of the mirror to another outer side surface of the mirror across a whole surface of the mirror on an opposite side to the substrate.

18. The electro-optical device according to claim 17, wherein the reflection enhancing lamination film is disposed so as to directly cover the whole surface of the mirror on the opposite side to the substrate and whole surfaces of the outer side surfaces of the mirror.

19. The electro-optical device according to claim 17, wherein the reflection enhancing lamination film is disposed only on the whole surface of the mirror on the opposite side to the substrate and on the outer side surfaces of the mirror.