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Compound for forming organic film, composition for forming organic film, method for forming organic film, and patterning process

  • US 10,444,628 B2
  • Filed: 12/07/2016
  • Issued: 10/15/2019
  • Est. Priority Date: 12/24/2015
  • Status: Active Grant
First Claim
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1. A compound for forming an organic film shown by the formula (1A),
Rprivate use character ParenopenstX)m1



  • (1A)wherein m1 is 2, 4 or 6; and

    formula (1A) is at least one selected from the following compounds;

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