Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive method
First Claim
1. An exposure apparatus that performs scanning exposure of an object by relatively driving the object with respect to an optical system, the apparatus comprising:
- a first movable body that holds the object and is movable in a first direction and a second direction intersecting each other;
a reference member serving as a reference for movement of the first movable body in the first direction and the second direction;
a second movable body disposed between the first movable body and the reference member, and movable in the second direction;
a first measurement system that acquires position information of the first movable body in the first direction with respect to the reference member, with a first head disposed at one of the first movable body and the second movable body and a first scale disposed at the other of the first movable body and the second movable body that can measure a movement range of the first movable body in the first direction at the time of the scanning exposure; and
a second measurement system that acquires position information of the first movable body in the second direction with respect to the reference member, with a second head disposed at one of the second movable body and the reference member and a second scale disposed at the other of the second movable body and the reference member that can measure a movement range of the first movable body in the second direction at the time of the scanning exposure.
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Accused Products
Abstract
A substrate stage apparatus provided with: a substrate holder that can be moved in a plane including an X-axis and a Y-axis; a head unit that can be moved synchronously with the substrate holder along the Y-axis; an encoder system for measuring substrate position, the system including a scale disposed on the substrate holder, and heads disposed on the head unit, and acquiring the X-axis direction and the Y-axis direction position information of the substrate holder on the basis of the output of the heads; an encoder system for measuring head-unit position, the system acquiring the Y-axis direction position information of the head unit; and a position control system that controls the position of the substrate holder within the XY plane on the basis of the output of the encoder system for measuring substrate position and the encoder system for measuring head-unit position.
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Citations
8 Claims
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1. An exposure apparatus that performs scanning exposure of an object by relatively driving the object with respect to an optical system, the apparatus comprising:
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a first movable body that holds the object and is movable in a first direction and a second direction intersecting each other; a reference member serving as a reference for movement of the first movable body in the first direction and the second direction; a second movable body disposed between the first movable body and the reference member, and movable in the second direction; a first measurement system that acquires position information of the first movable body in the first direction with respect to the reference member, with a first head disposed at one of the first movable body and the second movable body and a first scale disposed at the other of the first movable body and the second movable body that can measure a movement range of the first movable body in the first direction at the time of the scanning exposure; and a second measurement system that acquires position information of the first movable body in the second direction with respect to the reference member, with a second head disposed at one of the second movable body and the reference member and a second scale disposed at the other of the second movable body and the reference member that can measure a movement range of the first movable body in the second direction at the time of the scanning exposure. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An exposure method in which scanning exposure of an object is performed by relatively scanning the object with respect to an optical system, the method comprising:
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acquiring position information of a first movable body, which holds the object and is movable in a first direction and a second direction intersecting each other, in the first direction with respect to a reference member, using a first measurement system having a first head disposed at one of a second movable body and the first movable body and a first scale disposed at the other of the second movable body and the first movable body that can measure a movement range of the first movable body in the first direction at the time of the scanning exposure, the second movable body being disposed between the first movable body and the reference member, and being movable in the second direction; and acquiring position information of the first movable body in the second direction with respect to the reference member, using a second measurement system, having a second head disposed at one of the second movable body and the reference member and a second scale disposed at the other of the second movable body and the reference member, that can measure a movement range of the first movable body in the second direction at the time of scanning exposure. - View Dependent Claims (8)
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Specification