Particle source for producing a particle beam and particle-optical apparatus

• US 10,446,360 B2
• Filed: 05/10/2018
• Issued: 10/15/2019
• Est. Priority Date: 05/11/2017
• Status: Active Grant

• Current Assignee: Carl Zeiss Microscopy GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: Carl Zeiss Microscopy GmbH (Carl-Zeiss-Stiftung)
• Inventors: Drexel, Volker, Hafner, Bernd
• Primary Examiner(s): Ippolito, Nicole M
• Application Number:
  US15/975,959
• Publication Number:
  US 20180330912A1
• Time in Patent Office: 523 Days
• Field of Search: 250396 R, 250397, 250306, 250307, 250309, 250310, 250311, 2504921, 2504922, 25049221, 25049222, 25049223, 2504923
• CPC Class Codes: H01J 2237/0453 multiple apertures
• CPC Class Codes: H01J 2237/0653 Intensity
• CPC Class Codes: H01J 2237/083 Beam forming
• CPC Class Codes: H01J 2237/152 Magnetic means
• CPC Class Codes: H01J 37/09 Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
• CPC Class Codes: H01J 37/10 Lenses
• CPC Class Codes: H01J 37/1471 for centering, aligning or positioning of ray or beam
• CPC Class Codes: H01J 37/1472 Deflecting along given lines
• CPC Class Codes: H01J 37/26 Electron or ion microscopes; Electron or ion diffraction tubes
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

A particle source for producing a particle beam includes a particle emitter, a first plate, a first deflector and a second plate with an aperture. The first plate has a smaller aperture, downstream of which a first beam is formed, and a larger aperture, downstream of which a second beam is formed. A controller sets the deflection angle of the deflector so that in a first mode of operation that particles of the first beam pass through the aperture in the second plate and form the particle beam produced by the particle source. The controller sets the deflection angle so that in a second mode of operation that particles of the second beam pass through the aperture in the second plate and form the particle beam produced by the particle source.

Claims

1. A particle source, comprising:

a controller;

a particle emitter;

a first plate;

a first deflector; and

a second plate;

wherein;

the particle emitter is configured to produce a diverging beam of charged particles;

the particle emitter, the first plate, the first deflector and the second plate are arranged consecutively in this sequence along a beam path of the charged particles;

the first plate has first and second apertures arranged in a beam path of the diverging beam and through which charged particles of the diverging beam pass through the first plate;

the first aperture has a first cross-sectional area;

the second aperture has a second cross-sectional area greater than the first cross-sectional area;

the particles of the diverging beam that pass through the first and second apertures form a first and a second beam downstream of the first plate;

the second plate has a third aperture through which charged particles of the first and the second beams pass through the second plate;

the first deflector is configured to deflect the first and second beams;

in a first mode of operation, the controller is configured to set the first deflector so that particles of the first beam pass through the third aperture and form the particle beam produced by the particle source while particles of the second beam do not pass through the second plate; and

in a second mode of operation, the controller is configured to set this first deflector so that particles of the second beam pass through the third aperture and form the particle beam produced by the particle source while the particles of the first beam do not pass through the second plate.

2. The particle source of claim 1, wherein the first deflector is configured to provide an electric and/or magnetic dipole field to deflect the first and second beams together through a first deflection angle.

3. The particle source of claim 2, further comprising a second deflector downstream of the first deflector along the beam path, wherein the second deflector is configured to deflect the particles of the first and the second particle beams by an adjustable second deflection angle.

4. The particle source of claim 3, wherein the controller is configured to set the second deflection angle of the second deflector in such a way in the first mode of operation that the produced particle beam is directed in a predetermined direction and configured to set the second deflection angle of the second deflector in such a way in the second mode of operation that the produced particle beam is directed in the same predetermined direction.

5. The particle source of claim 3, wherein the controller is configured to set the first and second deflection angles so that a difference between the second deflection angle in the first mode of operation and the second deflection angle in the second mode of operation equals a difference between the first deflection angle in the first mode of operation and the first deflection angle in the second mode of operation.

6. The particle source of claim 2, further comprising a third plate in the beam path, wherein the third plate has a fourth aperture through which particles of the produced particle beam pass through the third plate.

7. The particle source of claim 6, wherein a refractive power of the particle-optical lens is adjustable by the controller, and the controller is configured to set the refractive power of the particle-optical lens so that the produced particle beam has a beam focus at a location which, as seen in the direction of the beam path, has a distance that is less than 5 mm from a surface of the third plate facing the particle emitter.

8. The particle source of claim 1, wherein the first deflector is configured to provide an electric and/or magnetic focusing lens field to focus the first beam and the second beam together.

9. The particle source of claim 1, wherein a principal plane of the second deflector, as seen in the direction of the beam path, is arranged at a distance that is less than 5 mm from a surface of the second plate facing the particle emitter.

10. The particle source of claim 1, further comprising a particle-optical lens having a principal plane in the beam path downstream of the first plate.

11. The particle source of claim 10, wherein the principal plane of the particle-optical lens is in the beam path downstream of the second plate.

12. The particle source of claim 10, wherein the principal plane of the particle-optical lens is in the beam path between the first and second plates.

13. The particle source of claim 10, further comprising a third plate in the beam path downstream of the second plate and downstream of the principal plane of the particle-optical lens, wherein the third plate has a fourth aperture through which particles of the produced particle beam pass through the third plate.

14. The particle source of claim 13, wherein a refractive power of the particle-optical lens is adjustable by the controller, and the controller is configured to set the refractive power of the particle-optical lens so that the produced particle beam has a beam focus at a location which, as seen in the direction of the beam path, has a distance that is less than 5 mm from a surface of the third plate facing the particle emitter.

15. The particle source of claim 1, wherein the cross-sectional area of the third aperture in the second plate is greater than the cross-sectional area of the first aperture in the first plate.

16. The particle source of claim 1, wherein the particle source is configured so that, in the first mode of operation, all particles of the first beam pass through the third aperture.

17. The particle source of claim 1, wherein the particle source is configured so that, in the second mode of operation, some of the particles of the second beam are incident on the second plate and do not pass through the third aperture.

18. The particle source of claim 1, wherein the particle source is free from a deflector configured to deflect particles of a particle beam by an adjustable deflection angle and that, as seen along the beam path, is arranged between the particle emitter and the first plate.

19. The particle source of claim 1, wherein the particle source is free from a particle-optical lens configured to provide a magnetic field that focuses a particle beam, the principal plane of the lens, as seen along the beam path, being arranged between the particle emitter and the first plate.

20. A particle-optical apparatus, comprising:

a particle source according to claim 1; and

a particle-optical lens configured to focus the particle beam on an object.