Control of gas flow

• US 10,446,377 B2
• Filed: 07/14/2016
• Issued: 10/15/2019
• Est. Priority Date: 07/14/2015
• Status: Active Grant

• Current Assignee: Thermo Fisher Scientific (Bremen) GmbH (Thermo Fisher Scientific Incorporated)
• Original Assignee: Thermo Fisher Scientific (Bremen) GmbH (Thermo Fisher Scientific Incorporated)
• Inventors: Schlueter, Hans-Juergen
• Primary Examiner(s): Smyth, Andrew
• Application Number:
  US15/210,507
• Publication Number:
  US 20170018416A1
• Time in Patent Office: 1,188 Days
• Field of Search: None
• CPC Class Codes: G05D 7/0186 without moving parts
• CPC Class Codes: H01J 49/005 by collision with gas, e.g. by introducing gas or by accelerating ions with an electric field
• CPC Class Codes: H01J 49/105 using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Abstract

The invention relates to a gas inlet system for providing gas into an analytical apparatus, comprising at least a first and a second flow restriction that are arranged on a gas inlet line, a gas flow control line connected to the gas inlet line, a gas flow controller on the gas control line, and valves for controlling gas flow in the gas inlet line and the gas control line. Also provided is a method of controlling gas flow into an analytical apparatus.

Claims

1. A gas inlet system for providing gas into an analytical apparatus operating under vacuum, the system comprising

(a) a plurality of gas inlet lines fluidly connected to the apparatus, for introducing gas into the apparatus;

(b) at least one valve arranged on the plurality of gas inlet lines downstream of at least one gas inlet junction, for controlling flow of gas in the plurality of inlet lines;

(c) a plurality of gas flow control lines each fluidly connected to a respective gas inlet line of the plurality of gas inlet lines through the a respective gas inlet junction, wherein the plurality of gas flow control lines merge into a single gas flow control line;

(d) at least one first flow restriction and at least one second flow restriction arranged on each gas inlet line, upstream from and downstream from the gas inlet junction, respectively;

(e) at least one gas flow controller arranged on the single gas flow control line, such that the plurality of gas flow control lines merge into the single gas flow control line upstream from the at least one gas flow controller, to control pressure at the gas inlet junctions;

(f) at least one valve for controlling flow of gas in the plurality of gas flow control lines; and

(g) at least one vacuum pump or exhaust that is fluidly connected to the gas flow control lines, downstream from the gas flow controller.

2. The gas inlet system of claim 1, wherein the first flow restriction and/or the second flow restriction, when provided as a plurality of restrictions, are arranged in a parallel arrangement on the gas inlet line, and wherein the gas inlet line optionally further comprises at least one valve for selectively directing flow through the plurality of restrictions.

3. The gas inlet system of claim 1, wherein the second flow restriction is provided as a plurality of flow restrictions that are arranged in a parallel arrangement.

4. The gas inlet system of claim 1, comprising a first flow restriction and at least one second flow restriction on each of the at least one gas inlet lines, and wherein the restrictions are structured such that the ratio of gas flow through the first and the at least one second flow restriction, for the same pressure difference across both restrictions, is in the range of 1:

10 to 10;

1.

5. The gas inlet system of claim 1, comprising a first flow restriction and at least one second flow restriction on each of the at least one gas inlet lines, and wherein the restrictions are structured such that the ratio of gas flow through the first and the at least one second flow restriction, at a fixed gas pressure in the gas inlet line is, depending on flow controller settings, in the range of 1:

1 to 1000;

1.

6. The gas inlet system of claim 1, wherein each of the plurality of gas control lines is fluidly connected to a single gas flow controller.

7. The gas inlet system of claim 1, further comprising at least one flow restriction that is arranged on the gas control line.

8. The gas inlet system of claim 7, wherein the at least one flow restriction is provided as a switchable restriction that is provided as one or more restrictions on separate lines that are arranged in parallel with the gas control line and that connect to the gas control line at a first and a second junction, and wherein at least one valve is further provided for selectively directing gas flow through the one or more restrictions.

9. The gas inlet system of claim 7, wherein the at least one flow restriction is provided on a vent line that is fluidly connected to the at least one gas flow control line, between the at least one valve for controlling gas flow and the gas flow controller.

10. The gas inlet system of claim 9, wherein the vent line is open to atmosphere.

11. The gas inlet system of claim 9, wherein the vent line is connected to a gas reservoir.

12. The gas inlet system of claim 1, wherein the at least one vacuum pump is provided as a single vacuum pump.

13. The gas inlet system of claim 1, wherein the at least one vacuum pump is provided as a plurality of vacuum pumps that are sequentially arranged.

14. The gas inlet system of claim 1, further comprising at least one gas supply.

15. The gas inlet system of claim 14, wherein each of the least one gas supply, when provided as a plurality of gas supplies, is connected to a respective gas inlet line.

16. The gas inlet system of claim 1, wherein the analytical apparatus is a mass spectrometer.

17. The gas inlet system of claim 16, wherein the at least one gas inlet line is fluidly connected to a collision cell of the mass spectrometer.

18. The gas inlet system of claim 16, wherein the vacuum pump connected to the gas control line is part of a vacuum pumping system of the mass spectrometer.

19. An analytical apparatus with a gas inlet system according to claim 1.

31. The gas inlet system of claim 1, wherein the gas flow controller is selected from a back pressure regulator, a mass flow controller, or a volume flow controller.

20. A method of controlling gas flow into an analytical apparatus operating under vacuum, the method comprising steps of

flowing gas from at least one gas supply into a plurality of gas inlet lines for providing gas into an analytical apparatus;

splitting away a portion of the gas flow in each gas inlet line into a respective one of a plurality of gas control lines that is arranged on the gas inlet line and that meets the gas inlet line at a respective gas inlet junction, such that a portion of the gas flow in the gas inlet line flows through the respective gas control line, and wherein gas flow in each gas control line is controlled by means of a gas flow controller that regulates pressure at the gas inlet junction, wherein the plurality of gas control lines merge into a single gas control line upstream of the gas flow controller, and a vacuum pump or exhaust that fluidly connected to the plurality of gas control lines, downstream from the gas flow controller;

whereby the portion of gas that is not split away from the gas inlet line into the gas control line is delivered into the apparatus and the flow rate into the analytical apparatus is determined by the difference in gas pressure between the gas inlet junction and the analytical apparatus.

21. The method of claim 20, wherein the portion of gas that is split away from the gas inlet line ranges from about 0.0001% to 99.99%.

22. The method of claim 20, further comprising (i) using the gas flow controller to set a first back pressure in the gas control line and thereby a first gas flow rate into the analytical apparatus, followed by (ii) using the gas flow controller to set a second back pressure in the gas control line, different to the first back pressure, and thereby a second gas flow rate into the analytical apparatus, different to the first flow rate.

23. The method of claim 22, wherein at least one of the first and second back pressures is less than 1 bar.

24. The method of claim 22, wherein the first and second flow rates differ by a factor of at least 10.

25. The method of claim 24, wherein the first and second flow rates differ by a factor that is up to up to 100.

26. The method of claim 20, wherein the flow through the gas control line is sufficiently high that no back diffusion into the gas inlet line occurs.

27. The method of claim 20, further comprising controlling flow of gas from the gas supply to the gas inlet junction by means of a first flow restriction and controlling flow of gas from the gas inlet junction into the analytical apparatus by means of at least one second flow restriction.

28. The method of claim 27, wherein the at least one second flow restriction is provided as a plurality of flow restrictions that are arranged in a parallel arrangement.

29. The method of any one of the claim 20, wherein gas from a plurality of gas supplies is flowed into separate gas inlet lines, and wherein the flow of gas in each of the gas inlet lines is controlled by splitting away a portion of the gas flow in each of the gas inlet lines.

30. The method of claim 20, wherein the analytical apparatus is a mass spectrometer.