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Control of gas flow

  • US 10,446,377 B2
  • Filed: 07/14/2016
  • Issued: 10/15/2019
  • Est. Priority Date: 07/14/2015
  • Status: Active Grant
First Claim
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1. A gas inlet system for providing gas into an analytical apparatus operating under vacuum, the system comprising(a) a plurality of gas inlet lines fluidly connected to the apparatus, for introducing gas into the apparatus;

  • (b) at least one valve arranged on the plurality of gas inlet lines downstream of at least one gas inlet junction, for controlling flow of gas in the plurality of inlet lines;

    (c) a plurality of gas flow control lines each fluidly connected to a respective gas inlet line of the plurality of gas inlet lines through the a respective gas inlet junction, wherein the plurality of gas flow control lines merge into a single gas flow control line;

    (d) at least one first flow restriction and at least one second flow restriction arranged on each gas inlet line, upstream from and downstream from the gas inlet junction, respectively;

    (e) at least one gas flow controller arranged on the single gas flow control line, such that the plurality of gas flow control lines merge into the single gas flow control line upstream from the at least one gas flow controller, to control pressure at the gas inlet junctions;

    (f) at least one valve for controlling flow of gas in the plurality of gas flow control lines; and

    (g) at least one vacuum pump or exhaust that is fluidly connected to the gas flow control lines, downstream from the gas flow controller.

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