Storage device and photoresist coating and developing machine having storage device
First Claim
1. A storage device, comprising a frame and a plurality of layers of support plates disposed in sequence in the frame in a height direction of the frame, the support plates being used for receiving substrates to be exposed, wherein the frame is provided with a plurality of layers of support members respectively associated with the plurality of layers of support plates, and each layer of the support plates is slidably mounted on a respective support member,wherein the frame is formed from a plurality of upright columns, and the support plate is composed of a plurality of transverse rods and a plurality of longitudinal rods perpendicular to the transverse rods,wherein the plurality of transverse rods and the plurality of longitudinal rods are formed integrally and positioned in one and the same plane,wherein a locking mechanism for fixing the support plates is provided at a side of the frame where the substrates are to be picked up,wherein a position limiting plate is provided at a side of the frame opposite to the side where the locking mechanism is provided, andwherein a plurality of support posts are provided on each support plate.
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Accused Products
Abstract
A storage device and a photoresist coating and developing machine having a storage device are disclosed. The storage device includes a frame and a plurality of layers of support plates disposed in sequence in the frame in a height direction of the frame, being used for receiving substrates to be exposed. The frame is provided with a plurality of layers of support members respectively associated with the plurality of layers of support plates, and each layer of the support plates is slidably mounted on the support member.
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Citations
15 Claims
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1. A storage device, comprising a frame and a plurality of layers of support plates disposed in sequence in the frame in a height direction of the frame, the support plates being used for receiving substrates to be exposed, wherein the frame is provided with a plurality of layers of support members respectively associated with the plurality of layers of support plates, and each layer of the support plates is slidably mounted on a respective support member,
wherein the frame is formed from a plurality of upright columns, and the support plate is composed of a plurality of transverse rods and a plurality of longitudinal rods perpendicular to the transverse rods, wherein the plurality of transverse rods and the plurality of longitudinal rods are formed integrally and positioned in one and the same plane, wherein a locking mechanism for fixing the support plates is provided at a side of the frame where the substrates are to be picked up, wherein a position limiting plate is provided at a side of the frame opposite to the side where the locking mechanism is provided, and wherein a plurality of support posts are provided on each support plate.
Specification