Surface modification control for etch metric enhancement

• US 10,446,453 B2
• Filed: 03/13/2018
• Issued: 10/15/2019
• Est. Priority Date: 03/17/2017
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Coppa, Brian J., Purohit, Viswas, Watanabe, Seiichi, Komatsu, Kenji
• Primary Examiner(s): Alanko, Anita K
• Application Number:
  US15/920,295
• Publication Number:
  US 20180269119A1
• Time in Patent Office: 581 Days
• CPC Class Codes: G03F 7/2024 of the already developed image
• CPC Class Codes: G03F 7/40 Treatment after imagewise removal, e.g. baking
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/32972 Spectral analysis
• CPC Class Codes: H01L 21/0273 characterised by the treatment of photoresist layers
• CPC Class Codes: H01L 21/31116 by dry-etching
• CPC Class Codes: H01L 21/31144 using masks
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32

Abstract

A method is disclosed for monitoring and controlling a process of plasma-assisted surface modification of a layer formed on a substrate. The method includes flowing a surface modification gas into a plasma processing chamber of a plasma processing system, igniting a plasma in the plasma processing chamber to initiate a surface modification process for a layer formed on a substrate, and acquiring optical emission spectra from an optical emission spectroscopy system attached to the plasma processing chamber, during the surface modification process for the layer. For one embodiment, the method includes altering at least one parameter of the surface modification process based on the acquired optical emission spectra. For one embodiment, the acquired optical emission spectra can include an intensity of a spectral line, a slope of a spectral line, or both to enable endpoint control of the surface modification process. Additional methods and related systems are also disclosed.

Claims

1. A method for monitoring and controlling a process of plasma-assisted surface modification of a layer formed on a substrate, the method comprising:

flowing a surface modification gas into a plasma processing chamber of a plasma processing system;

igniting a plasma in the plasma processing chamber to initiate a surface modification process, which includes a photoresist hardening step, for a photoresist layer formed on a substrate;

acquiring optical emission spectra from an optical emission spectroscopy system attached to the plasma processing chamber, during the surface modification process for the photoresist layer;

altering at least one parameter of an electron beam-based exposure recipe based on the acquired optical emission spectra, the electron beam-based exposure recipe being applied to the photoresist hardening step; and

repeating the photoresist hardening step with the altered electron beam-based exposure recipe on the photoresist layer formed on the substrate.

2. The method of claim 1, wherein the plasma processing system is a plasma etching system, and wherein the surface modification process occurs before or after one or more etch processes.

3. The method of claim 1, wherein the plasma processing system is a plasma system with deposition and/or etch capability, and wherein the modification process occurs before or after one or more etch or deposition processes.

4. The method of claim 1, wherein data from the acquired optical emission spectra is used to determine an endpoint of the surface modification process.

5. The method of claim 4, further comprising stopping the surface modification process at a determined endpoint time based on the optical emission spectra.

6. The method of claim 1, wherein data from the acquired optical emission spectra comprises an intensity of a spectral line, a slope of a spectral line, or both.

7. The method of claim 6, wherein the spectral line is a spectral line corresponding to a chemical element or compound selected from a group consisting of N, Ar, Br, CH, C, CN, O, SiF, SiN, CO, Ti, Zr and F.

8. The method of claim 6, wherein the spectral line is a spectral line corresponding to a chemical element or compound comprising one or more of N, Ar, Br, CH, C, CN, O, SiF, SiN, CO, Ti, Zr and F.

9. The method of claim 1, further comprising altering at least one parameter of the surface modification process based on the acquired optical emission spectra.

10. The method of claim 9, wherein the at least one parameter of the surface modification process is selected from a group consisting of RF or microwave power supplied to a plasma processing chamber, RF or microwave power pulse frequency, RF or microwave pulse duty cycle, substrate temperature, RF power supplied to a substrate holder in the plasma processing chamber, DC bias of the substrate holder, DC bias voltage supplied to at least one electrode arranged proximate the substrate holder, gas flow rate, gas pressure, surface modification gas flow, surface modification gas pressure, and duration of the surface modification process.

11. The method of claim 9, wherein the at least one parameter of the surface modification process comprises one or more of RF or microwave power supplied to a plasma processing chamber, RF or microwave power pulse frequency, RF or microwave pulse duty cycle, substrate temperature, RF power supplied to a substrate holder in the plasma processing chamber, DC bias of the substrate holder, DC bias voltage supplied to at least one electrode arranged proximate the substrate holder, gas flow rate, gas pressure, surface modification gas flow, surface modification gas pressure, and duration of the surface modification process.

12. The method of claim 9, wherein the altering of the at least one parameter of the surface modification process is performed to minimize a duration of the surface modification process.

13. The method of claim 9, wherein the altering of the at least one parameter of the surface modification process is performed to improve a physical property or a geometrical characteristic or both of a pattern formed during a plasma etch or deposition process subsequent to the surface modification process.

14. The method of claim 13, wherein the physical property comprises at least one of density or wet etch resistance, and wherein the geometrical characteristic comprises at least one of line width roughness (LWR) or line-edge roughness (LER).

15. The method of claim 9, wherein the altering of the at least one parameter of the surface modification process is performed to maximize a uniformity metric of a pattern formed during an etch or deposition process subsequent to the surface modification process.

16. The method of claim 15, wherein the uniformity metric is selected from a group consisting of critical dimension (CD) uniformity, sidewall angle (SWA) uniformity, and trench depth uniformity (TDU).

17. The method of claim 15, wherein the uniformity metric comprises one or more of critical dimension (CD) uniformity, sidewall angle (SWA) uniformity, and trench depth uniformity (TDU).

18. The method of claim 9, wherein the altering of the at least one parameter of the surface modification process is performed to maximize a uniformity metric of a pattern formed during an etch process of a subsequently processed production substrate or a subsequently processed lot of production substrates.

19. The method of claim 9, wherein the altering of the at least one parameter of the surface modification process is performed to alter a physical, geometrical, electrical, chemical, or mechanical property of a material exposed to a surface modification process.

20. The method of claim 19, wherein the property is selected from a group consisting of etch width critical dimension (CD), bow, tilting, twisting, etch selectivity, sidewall angle (SWA), etch depth, surface coverage, step coverage, layer thickness, layer density, layer composition, layer smoothness, and layer hardness.

21. The method of claim 19, wherein the property comprises one or more of etch width critical dimension (CD), bow, tilting, twisting, etch selectivity, sidewall angle (SWA), etch depth, surface coverage, step coverage, layer thickness, layer density, layer composition, layer smoothness, and layer hardness.

22. The method of claim 9, wherein the altering of the at least one parameter of the surface modification process is performed to alter a physical, geometrical, electrical, or mechanical property of a layer in a subsequently processed production substrate or a subsequently processed lot of production substrates.

23. The method of claim 9, wherein the altering of the at least one parameter of the surface modification process is performed in-situ.

24. The method of claim 1, wherein the surface modification gas comprises hydrogen, hydrogen-bromide, nitrogen, carbon, chlorine, fluorine, sulfur, argon, helium, oxygen or a combination of two or more thereof.

25. The method of claim 1, wherein the layer formed on the substrate comprises a material selected from a group consisting of photoresist, spin-on-dielectric material, atomic or chemical vapor deposited dielectric material, low-k dielectric material, hi-k dielectric material, conductive material or a combination of two or more thereof.

26. The method of claim 1, wherein the layer formed on the substrate comprises a material comprising one or more of photoresist, spin-on-dielectric material, atomic or chemical vapor deposited dielectric material, low-k dielectric material, hi-k dielectric material, conductive material or a combination of two or more thereof.

27. The method of claim 1, wherein the layer formed on the substrate comprises a chemically amplified resist (CAR), and further comprising altering at least one parameter of the surface modification process based on the acquired optical emission spectra to reduce likelihood of pattern collapse for the CAR.

28. The method of claim 27, wherein the CAR comprises an ArF-based dry or immersion resist.

29. The method of claim 1, wherein the layer formed on the substrate comprises a resist utilized in conjunction with extreme ultra-violet (EUV) photolithography.

30. The method of claim 29, wherein the EUV resist comprises a material selected from a group consisting of a metallic hardmask (MHM) layer, a nanocrystalline metal oxide MHM layer, and a MHM stack including a combination of these layers.

31. The method of claim 29, wherein the EUV resist comprises a material comprising one or more of a metallic hardmask (MHM) layer, a nanocrystalline metal oxide MHM layer, and a MHM stack including a combination of these layers.

32. The method of claim 1, wherein the electron beam-based exposure recipe comprises applying a direct current (DC) superposition voltage to an electrode within the plasma processing chamber.

33. The method of claim 1, wherein the e-beam voltage or energy and exposure time is increased such that a bulk of the layer is modified for the layer.

34. The method of claim 1, wherein the surface modification process comprises at least one of a surface hardening step, a curing of the layer formed on the substrate, or a de-scum step for residue removal.

35. A method for monitoring and controlling a surface modification process in a plasma processing tool, the method comprising:

flowing a surface modification gas into a plasma processing chamber of a plasma processing system;

igniting a plasma in the plasma processing chamber to initiate surface modification process, which includes a photoresist hardening step, for a photoresist layer formed on a substrate;

monitoring the plasma in the plasma processing chamber during the surface modification process for the photoresist layer using a monitoring system;

altering at least one parameter of an electron beam-based exposure recipe based on the monitored plasma, the electron beam-based exposure recipe being applied to the photoresist hardening step; and

repeating the photoresist hardening step with the altered electron beam-based exposure recipe on the photoresist layer formed on the substrate,

wherein the monitoring system comprises at least one of an optical emission spectroscopy, a laser induced fluorescence, a laser interferometry, laser spectroscopy, a mass spectrometry, a Raman spectroscopy, a residual gas analyzer (RGA), or a Fourier Transform Infrared (FTIR) system.