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Driving apparatus and device fabrication method

  • US 10,447,136 B2
  • Filed: 04/18/2014
  • Issued: 10/15/2019
  • Est. Priority Date: 12/31/2013
  • Status: Active Grant
First Claim
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1. A driving device, comprising:

  • a stator, a mover and a deformable connection member, wherein the mover is connected with the stator through the deformable connection member and an exogenous driving force drives the mover or the deformable connection member to deform such that a position of the mover with respect to the stator is changed, and wherein;

    when the exogenous driving force has not been applied, forces acting on the deformable connection member comprise a deformation force of the deformable connection member and a first native force which is keeping opposite to the deformation force in direction, and the deformable connection member is kept at a force balance position of the deformation force and the first native force;

    wherein the force balance position is located at one of or between two endpoints of a working range of the deformable connection member;

    wherein the mover comprises a first magnet, the first magnet is a permanent magnet, the deformable connection member is a coil spring, and materials of the coil spring comprises conductive materials which are used to act as a coil driving the mover to move;

    the exogenous driving force comprises an electromagnetic force which is generated by the coil spring and used to drive the mover to move; and

    the first magnet is arranged on a curved slope, and the first native force comprises a component of a gravity of the first magnet in a direction opposite to a direction of an elastic force of the coil spring.

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