Method of controlling ion energy distribution using a pulse generator with a current-return output stage

• US 10,448,495 B1
• Filed: 04/25/2019
• Issued: 10/15/2019
• Est. Priority Date: 05/10/2018
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Dorf, Leonid, Luere, Olivier, Dhindsa, Rajinder, Rogers, James, Srinivasan, Sunil, Mishra, Anurag Kumar
• Primary Examiner(s): Le, Tung X
• Application Number:
  US16/394,860
• Time in Patent Office: 173 Days
• Field of Search: 31511121
• CPC Class Codes: C23C 14/345 using substrate bias
• CPC Class Codes: C23C 14/3485 using pulsed power to the target
• CPC Class Codes: C23C 14/54 Controlling or regulating the coating process
• CPC Class Codes: C23C 16/505 using radio frequency discharges
• CPC Class Codes: H01J 37/08 Ion sources; Ion guns
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge
• CPC Class Codes: H01J 37/3426 Material
• CPC Class Codes: H01J 37/3438 Electrodes other than cathode
• CPC Class Codes: H01J 37/3444 Associated circuits
• CPC Class Codes: H01J 37/3467 Pulsed operation, e.g. HIPIMS
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 2242/20 Power circuits

Abstract

Embodiments of this disclosure describe an electrode biasing scheme that enables maintaining a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate that consequently enables a precise control over the shape of IEDF and the profile of the features formed in the surface of the substrate.

Claims

1. A method of processing of a substrate, comprising:

generating a plasma over a plasma facing surface of a substrate disposed on a substrate support assembly; and

biasing a biasing electrode disposed within the substrate support assembly using a bias generator that is electrically coupled to a generator end of an electrical conductor, an electrode end of the electrical conductor is electrically coupled to the biasing electrode, wherein the bias generator is used to establish a pulsed voltage waveform at the biasing electrode,

wherein the pulsed voltage waveform has a series of repeating cycles, such that

a waveform within each cycle has a first portion that occurs during a first time interval and a second portion that occurs during a second time interval,

a positive voltage pulse is only present during the first time interval,

the pulsed voltage waveform is substantially constant during at least a portion of the second time interval, and

the second time interval is longer than the first time interval.

2. The method of claim 1, wherein

the first portion further comprises a positive voltage pulse resulting in restoration of a sheath voltage drop, wherein a sheath is formed over the plasma facing surface of the substrate at the end of the first portion.

3. The method of claim 2, wherein the sheath voltage drop formed during a cycle of the series of repeating cycles is substantially equal to the sheath voltage drop formed during a subsequent cycle of the series of repeating cycles.

4. The method of claim 2, wherein the second portion further comprises a substantially constant voltage determined by an ion current from the plasma.

5. The method of claim 1, wherein the second portion further comprises a substantially constant voltage determined by an ion current from the plasma and a DC chucking voltage.

6. The method of claim 1, wherein

a local plasma potential formed within the generated plasma is either a potential in the plasma adjacent to the plasma facing surface of the substrate in the absence of a plasma sheath or a potential in the plasma adjacent to a plasma sheath boundary in the presence of a plasma sheath, and

the first portion further comprises:

a positive voltage jump causing a sheath collapse during a sheath collapse phase having a sheath collapse time duration, wherein at the end of the sheath collapse time duration a potential at the surface of the substrate substantially equals the local plasma potential of the generated plasma; and

a negative voltage jump causing a sheath formation during a sheath formation phase having a sheath formation time duration, wherein at the end of the sheath formation time duration a sheath with a sheath voltage drop is formed over the plasma facing surface of the substrate.

7. The method of claim 1, wherein first time interval is between about 200 ns and about 400 ns.

8. The method of claim 7, wherein the first time interval is less than about 20% of a cycle of the series of repeating cycles.

9. The method of claim 1, wherein a first end of a pulse generator of the bias generator is electrically coupled to the generator end of electrical conductor, and a second end of the pulse generator is electrically coupled to ground.

10. The method of claim 1, wherein the bias generator is electrically coupled to the generator end of the electrical conductor using a generator coupling assembly, and the generator coupling assembly comprises one of the components selected from the group consisting of a capacitor, a capacitor and an electrical conductor in series, an inductor, and an inductor and an electrical conductor in series.

11. The method of claim 1, wherein the bias generator is electrically coupled to the generator end of the electrical conductor using a generator coupling assembly, and the generator coupling assembly comprises an electrical conductor.

12. The method of claim 1, wherein the electrical conductor if electrically coupled to the biasing electrode using an electrode coupling assembly, and the electrode coupling assembly comprises one of the components selected from the group consisting of a capacitor, a capacitor and an electrical conductor in series, an inductor, and an inductor and an electrical conductor in series.

13. The method of claim 1, wherein the electrical conductor if electrically coupled to the biasing electrode using an electrode coupling assembly, and the electrode coupling assembly comprises an electrical conductor.

14. The method of claim 1, wherein the bias generator is electrically coupled to the generator end of the electrical conductor using a generator coupling assembly, and the generator coupling assembly comprises a capacitor having a capacitance in a range of about 40 nF to about 80 nF.

15. The method of claim 1, wherein the first portion further comprises:

a positive voltage jump causing a sheath collapse during a sheath collapse phase having a sheath collapse time duration, wherein at the end of the sheath collapse time duration a potential at the surface of the substrate substantially equals a local plasma potential of the generated plasma; and

a negative voltage jump causing a sheath formation during a sheath formation phase having a sheath formation time duration, wherein at the end of the sheath formation time duration a sheath with a sheath voltage drop is formed over the plasma facing surface of the substrate.