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Plasma reactor

  • US 10,450,916 B2
  • Filed: 02/27/2017
  • Issued: 10/22/2019
  • Est. Priority Date: 03/01/2016
  • Status: Active Grant
First Claim
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1. A plasma reactor comprising:

  • a plasma panel stack having a structure in which a plurality of electrode panels each having a discharge electrode are stacked, and generating plasma upon application of voltage between the adjacent electrode panels;

    an electrically conductive member electrically connected to the discharge electrodes of the plurality of electrode panels, the electrically conductive member includinga main body part extending in a stacking direction of the plasma panel stack, andplate parts respectively connected to both ends of the main body part and respectively disposed at upper and lower surfaces of the plasma panel stack;

    a case housing the plasma panel stack; and

    a mat intervening between the case and the plasma panel stack and fixing the plasma panel stack to the case;

    the plasma reactor being characterized in that the mat is disposed apart from the electrically conductive member so that a gap having a size of 2 mm to 30 mm is present between the mat and the electrically conductive member.

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