Single shot full-field reflection phase microscopy

• US 10,451,402 B2
• Filed: 01/25/2012
• Issued: 10/22/2019
• Est. Priority Date: 01/25/2011
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK, Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Yaqoob, Zahid, Choi, Wonshik, Yamauchi, Toyohiko, Feld, Michael
• Primary Examiner(s): Anyikire, Chikaodili E
• Application Number:
  US13/358,254
• Publication Number:
  US 20120307035A1
• Time in Patent Office: 2,827 Days
• Field of Search: 348 79
• CPC Class Codes: G01B 9/02032 generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam shearing interferometers G01B9/02098
• CPC Class Codes: G01B 9/02047 using digital holographic imaging, e.g. lensless phase imaging without hologram in the reference path
• CPC Class Codes: G01B 9/02064 by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
• CPC Class Codes: G01B 9/0207 Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
• CPC Class Codes: G01B 9/02084 Processing in the Fourier or frequency domain when not imaged in the frequency domain
• CPC Class Codes: G01B 9/02091 Tomographic interferometers, e.g. based on optical coherence
• CPC Class Codes: G01B 9/04 Measuring microscopes
• CPC Class Codes: G01N 21/45 using interferometric methods; using Schlieren methods
• CPC Class Codes: G02B 27/1086 operating by diffraction only
• CPC Class Codes: G02B 27/50 Optics for phase object visualisation
• CPC Class Codes: G03H 1/0443 Digital holography, i.e. recording holograms with digital recording means holobject computation G03H1/0866
• CPC Class Codes: G03H 2001/005 in microscopy, e.g. digital holographic microscope [DHM] microscopes G02B21/00; digital holography G03H1/0866
• CPC Class Codes: G03H 2001/0456 Spatial heterodyne, i.e. filtering a Fourier transform of the off-axis record
• CPC Class Codes: G03H 2001/0467 Gated recording using pulsed or low coherence light source, e.g. light in flight, first arriving light
• CPC Class Codes: G03H 2222/24 Low coherence light normally not allowing valuable record or reconstruction G03H1/06 takes precedence

Abstract

The present invention relates to a full-field reflection phase microscope. In a preferred embodiment, the invention can combine low-coherence interferometry and off-axis digital holographic microscopy (DHM). The reflection-based DHM provides highly sensitive and a single-shot imaging of cellular dynamics while the use of low coherence source provides a depth-selective measurement. A preferred embodiment of the system uses a diffraction grating in the reference arm to generate an interference image of uniform contrast over the entire field-of-view albeit low-coherence light source. With improved path-length sensitivity, the present invention is suitable for full-field measurement of membrane dynamics in live cells with sub-nanometer-scale sensitivity.

Claims

1. A system for off axis reflection phase imaging of a material comprising:

a light source;

a material to be imaged that is positioned to receive illuminating light from the light source;

an optical system that optically couples illuminating light from the light source through a first lens onto the material, the optical system coupling reference light from the light source along a reference optical path wherein the reference optical path has a diffraction element that diffracts reflected light from a reflector such that a selected diffraction order of reference light from the light source is coupled to an imaging lens;

an imaging detector that detects reflected light through the first lens from the material in response to the illuminating light and wherein the imaging detector detects the diffracted order of reflected reference light from the imaging lens that interferes with the light reflected from the material, the reflected reference light being tilted at an angle relative to the light reflected from the material that is incident on the imaging detector and such that an optical path length measured from a plurality of different points on the diffraction element to a corresponding pixel of the imaging detector is constant;

a moveable translation stage to selectively position a coherence gate relative to the material such that the reflected light from a portion of the material within the coherence gate is detected by the imaging detector; and

a data processor that processes full frame off-axis reflection phase interferograms detected by the imaging detector to generate a phase image of the portion of the material within the coherence gate.

2. The system of claim 1 wherein light from the light source is transmitted through the material and reflected by a reflector mounted on a second translation stage, the reflected light from the reflector being further transmitted through the material and detected by the imaging detector.

3. The system of claim 1 wherein light from the light source is reflected off a surface of the material.

4. The system of claim 1 wherein the translation stage positions the coherence gate within a portion of the material with the lens.

5. The system of claim 1 wherein the low coherence light source comprises a laser that emits a single shot of light to generate the phase image.

6. The system of claim 1 wherein the light source comprises a broadband light source.

7. The system of claim 1 further comprising a reference light path that is incident on a surface of the imaging detector at an angle relative to light incident on the surface from the material to provide off axis interference.

8. The system of claim 1 wherein the optical system comprises a spatial filter that transmits a single order of light received from a grating.

9. The system of claim 1 wherein the diffraction element comprises a grating.

10. The system of claim 7 wherein the reference light path separates a diffraction order of the reflected light with a grating.

11. The system of claim 1 further comprising a spatial filter that receives light from the diffraction element and transmits the diffracted order of reflected light.

12. The system of claim 1 wherein the data processor that is connected to the imaging detector is configured to process image data to generate a full field phase image of the material.

13. The system of claim 12 further comprising a display that displays a full field quantitative phase image of the material.

14. The system of claim 12 further comprising a memory for storing image data.

15. The system of claim 1 further comprising an actuator providing relative movement between the light source and the material to be imaged.

16. The system of claim 1 wherein the translation stage moves the material to position the coherence gate.

17. The system of claim 16 wherein the translation stage orients the material at an oblique angle relative to an incident light axis.

18. The system of claim 1 wherein light is reflected by the material, the reflected light being incident on the imaging detector at a different angle than the diffracted order of light.

19. The system of claim 7 wherein the reference light path includes a reflector.

20. The system of claim 1 wherein the material is positioned on a reflective surface.

21. The system of claim 1 wherein a beamsplitter separates light onto a reference path and an imaging path that includes the material to be imaged.

22. The system of claim 1 further comprising a coherence gate positioned relative to the material.

23. The system of claim 22 wherein the coherence gate is positioned to provide a transmission image of the material.

24. The system of claim 22 wherein the coherence gate is positioned to provide a reflection image of the material.

25. A method for off axis reflection phase microscopy comprising:

delivering light from a low coherence light source through a first lens onto a portion of a material to be measured that is positioned within a coherence gate along a first light path optically coupled to the light source, the material being positioned over a reflecting surface that is mounted on a moveable translation stage;

delivering light through a second lens onto a reflecting reference that is optically coupled to the light source;

separating a diffraction order of light received through the second lens from the reflecting reference; and

detecting light with an imaging detector, the detected light including reflected light from within the coherence gate positioned on the portion of the material wherein the reflected light from the material is directed through the first lens and along a first axis and the separated diffraction order of light directed along a second axis that is tilted at a different angle relative to the first axis to form an interference pattern at the imaging detector that generates a full field off-axis quantitative phase image of the material in the coherence gate.

26. The system of claim 25 further comprising transmitting light from the light source through the material onto a reflector which reflects light that is further transmitted through the material to provide reflected light detected by the imaging detector.

27. The method of claim 25 further comprising reflecting light from the light source off a surface of the material.

28. The method of claim 25 further comprising using a translation stage to position the coherence gate within the portion of the material and wherein a further portion of the material outside the coherence gate is not imaged.

29. The method of claim 25 wherein the low coherence light source comprises a laser.

30. The method of claim 25 wherein the light source comprises a broadband light source.

31. The method of claim 25 wherein the reference light path is incident on a surface of the imaging detector at an angle relative to light incident on the surface from the sample.

32. The method of claim 25 further comprising using a spatial filter to transmit a single order of light received from the grating.

33. The method of claim 25 further comprising processing image data with a data processor that receives image data from the imaging detector.

34. The method of claim 25 further comprising displaying image data on a display.

35. The method of claim 25 further comprising storing image data in a memory.

36. The method of claim 25 further comprising Hilbert transforming image data to provide a phase image.

37. The method of claim 25 further comprising orienting the material at an angle relative to an incident light axis.

38. The method of claim 25 further comprising imaging a biological sample.

39. The method of claim 25 further comprising imaging a moving cellular structure.

40. A system for off-axis reflection phase microscopy comprising:

a low coherence light source;

a sample to be measured that is positioned over a reflective surface and along a first light path optically coupled to the light source such that light is delivered onto the sample through a lens, the reflective surface being mounted on a translation stage;

a reference reflector positioned on a reference light path, the reference reflector being optically coupled to the light source at a fixed distance;

an optical system that selects a diffraction order of light reflected by the reference reflector; and

an imaging detector that detects reflected light passing through the lens from the sample and the selected diffraction order of light from the reference reflector, the light from the sample being incident on the imaging detector and also being tilted at a different angle than the light received from the reference reflector at the imaging detector such that full frame off-axis reflection phase interferograms are generated.

41. The system of claim 40 wherein light from the light source is transmitted through the sample and reflected by a first light path reflector such that reflected light is further transmitted through the material and detected by the imaging detector.

42. The system of claim 40 wherein light from the light source is reflected off a surface of the sample.

43. The system of claim 40 wherein the translation stage is configured to position a coherence gate relative to the sample.

44. The system of claim 40 wherein the low coherence light source comprises a laser.

45. The system of claim 40 wherein the light source comprises a broadband light source.

46. The system of claim 40 wherein the reference light path is incident on a surface of the imaging detector at an angle relative to light incident on the surface from the sample.

47. The system of claim 40 wherein the optical system comprises a grating and a spatial filter.

48. The system of claim 47 wherein the spatial filter transmits a single diffraction order of light received from the grating.

49. The system of claim 40 wherein the system performs off axis interferometry.

50. The system of claim 40 wherein the optical system uses the first diffraction order of light to interfere with light reflected by the sample.

51. The system of claim 40 wherein the reflective surface can tilt at an angle relative to incident light.

52. The system of claim 40 wherein light from the light source is transmitted through the sample, reflects from a sample support surface and through the sample for imaging.

53. The system of claim 40 wherein the coherence gate is positioned out of the sample to obtain a no-fringe image.

54. The system of claim 40 wherein the optical system selects a first diffraction order component from a Fourier image and that shifts the component in a Fourier plane.

55. The system of claim 54 wherein the system obtains an inverse Fourier transform of an image.

56. The system of claim 40 further comprising a data processor that phase unwraps the image.

57. The system of claim 40 wherein the image comprises a full field quantitative phase image.

58. The system of claim 40 further comprising a first mirror mounted on a translation stage wherein the sample is mounted over the first mirror and wherein a second mirror is coupled to an actuator such that noise can be removed from an image.

59. The system of claim 58 wherein common-mode phase noise is subtracted from the image.

60. The system of claim 40 wherein the system determines a power spectral density of the sample.