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Membrane hydrophone for high frequency ultrasound and method of manufacture

  • US 10,451,476 B2
  • Filed: 08/18/2016
  • Issued: 10/22/2019
  • Est. Priority Date: 08/18/2015
  • Status: Active Grant
First Claim
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1. A membrane hydrophone for measuring acoustic energy from a high frequency ultrasound transducer, comprising:

  • a frame;

    a piezoelectric membrane having a first side and a second side that is supported by the frame and including a conductive material on both sides of the piezoelectric membrane; and

    a first electrode pattern comprising a first electrode and a second electrode pattern comprising a second electrode formed within the conductive material, wherein the first electrode pattern and second electrode pattern overlap each other on opposite sides of the piezoelectric membrane to define an active area of the hydrophone;

    wherein the first electrode pattern comprising the first electrode is created on both the first and second sides of the piezoelectric membrane and overlap each other except in the active area, andwherein the second electrode pattern comprising the second electrode is created on both the first and second sides of the piezoelectric membrane and overlap each other except in the active area.

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